{"cik":720500,"taxonomy":"us-gaap","tag":"ShareBasedCompensation","label":"Share-based Payment Arrangement, Noncash Expense","description":"Amount of noncash expense for share-based payment arrangement.","entityName":"AMTECH SYSTEMS INC","units":{"USD":[{"start":"2008-10-01","end":"2009-09-30","val":711000,"accn":"0000720500-11-000030","fy":2011,"fp":"FY","form":"10-K","filed":"2011-11-17","frame":"CY2009"},{"start":"2009-10-01","end":"2010-06-30","val":757000,"accn":"0000720500-11-000003","fy":2011,"fp":"Q3","form":"10-Q","filed":"2011-08-09"},{"start":"2009-10-01","end":"2010-09-30","val":987000,"accn":"0000720500-11-000030","fy":2011,"fp":"FY","form":"10-K","filed":"2011-11-17"},{"start":"2009-10-01","end":"2010-09-30","val":987000,"accn":"0000720500-12-000031","fy":2012,"fp":"FY","form":"10-K","filed":"2012-12-07","frame":"CY2010"},{"start":"2010-10-01","end":"2010-12-31","val":374000,"accn":"0000720500-12-000007","fy":2012,"fp":"Q1","form":"10-Q","filed":"2012-02-09","frame":"CY2010Q4"},{"start":"2010-10-01","end":"2011-03-31","val":743000,"accn":"0000720500-12-000011","fy":2012,"fp":"Q2","form":"10-Q","filed":"2012-05-10"},{"start":"2010-10-01","end":"2011-06-30","val":1099000,"accn":"0000720500-11-000003","fy":2011,"fp":"Q3","form":"10-Q","filed":"2011-08-09"},{"start":"2010-10-01","end":"2011-06-30","val":1099000,"accn":"0000720500-12-000015","fy":2012,"fp":"Q3","form":"10-Q","filed":"2012-08-09"},{"start":"2010-10-01","end":"2011-09-30","val":1470000,"accn":"0000720500-11-000030","fy":2011,"fp":"FY","form":"10-K","filed":"2011-11-17"},{"start":"2010-10-01","end":"2011-09-30","val":1470000,"accn":"0000720500-12-000031","fy":2012,"fp":"FY","form":"10-K","filed":"2012-12-07"},{"start":"2010-10-01","end":"2011-09-30","val":1470000,"accn":"0000720500-13-000027","fy":2013,"fp":"FY","form":"10-K","filed":"2013-12-11","frame":"CY2011"},{"start":"2011-10-01","end":"2011-12-31","val":465000,"accn":"0000720500-12-000007","fy":2012,"fp":"Q1","form":"10-Q","filed":"2012-02-09"},{"start":"2011-10-01","end":"2011-12-31","val":465000,"accn":"0000720500-13-000008","fy":2013,"fp":"Q1","form":"10-Q","filed":"2013-02-07","frame":"CY2011Q4"},{"start":"2011-10-01","end":"2012-03-31","val":903000,"accn":"0000720500-12-000011","fy":2012,"fp":"Q2","form":"10-Q","filed":"2012-05-10"},{"start":"2011-10-01","end":"2012-03-31","val":903000,"accn":"0000720500-13-000015","fy":2013,"fp":"Q2","form":"10-Q","filed":"2013-05-09"},{"start":"2011-10-01","end":"2012-06-30","val":1341000,"accn":"0000720500-12-000015","fy":2012,"fp":"Q3","form":"10-Q","filed":"2012-08-09"},{"start":"2011-10-01","end":"2012-06-30","val":1341000,"accn":"0000720500-13-000023","fy":2013,"fp":"Q3","form":"10-Q","filed":"2013-08-08"},{"start":"2011-10-01","end":"2012-09-30","val":1763000,"accn":"0000720500-12-000031","fy":2012,"fp":"FY","form":"10-K","filed":"2012-12-07"},{"start":"2011-10-01","end":"2012-09-30","val":1763000,"accn":"0000720500-13-000027","fy":2013,"fp":"FY","form":"10-K","filed":"2013-12-11"},{"start":"2011-10-01","end":"2012-09-30","val":1763000,"accn":"0000720500-14-000037","fy":2014,"fp":"FY","form":"10-K","filed":"2014-11-20","frame":"CY2012"},{"start":"2012-10-01","end":"2012-12-31","val":433000,"accn":"0000720500-13-000008","fy":2013,"fp":"Q1","form":"10-Q","filed":"2013-02-07"},{"start":"2012-10-01","end":"2012-12-31","val":433000,"accn":"0000720500-14-000008","fy":2014,"fp":"Q1","form":"10-Q","filed":"2014-02-06","frame":"CY2012Q4"},{"start":"2012-10-01","end":"2013-03-31","val":758000,"accn":"0000720500-13-000015","fy":2013,"fp":"Q2","form":"10-Q","filed":"2013-05-09"},{"start":"2012-10-01","end":"2013-03-31","val":758000,"accn":"0000720500-14-000013","fy":2014,"fp":"Q2","form":"10-Q","filed":"2014-05-07"},{"start":"2012-10-01","end":"2013-06-30","val":2313000,"accn":"0000720500-13-000023","fy":2013,"fp":"Q3","form":"10-Q","filed":"2013-08-08"},{"start":"2012-10-01","end":"2013-06-30","val":2313000,"accn":"0000720500-14-000031","fy":2014,"fp":"Q3","form":"10-Q","filed":"2014-08-07"},{"start":"2012-10-01","end":"2013-09-30","val":2472000,"accn":"0000720500-13-000027","fy":2013,"fp":"FY","form":"10-K","filed":"2013-12-11"},{"start":"2012-10-01","end":"2013-09-30","val":2472000,"accn":"0000720500-14-000037","fy":2014,"fp":"FY","form":"10-K","filed":"2014-11-20"},{"start":"2012-10-01","end":"2013-09-30","val":2472000,"accn":"0000720500-15-000045","fy":2015,"fp":"FY","form":"10-K","filed":"2015-11-19","frame":"CY2013"},{"start":"2013-10-01","end":"2013-12-31","val":176000,"accn":"0000720500-14-000008","fy":2014,"fp":"Q1","form":"10-Q","filed":"2014-02-06"},{"start":"2013-10-01","end":"2013-12-31","val":176000,"accn":"0000720500-15-000010","fy":2015,"fp":"Q1","form":"10-Q","filed":"2015-02-05","frame":"CY2013Q4"},{"start":"2013-10-01","end":"2014-03-31","val":373000,"accn":"0000720500-14-000013","fy":2014,"fp":"Q2","form":"10-Q","filed":"2014-05-07"},{"start":"2013-10-01","end":"2014-03-31","val":373000,"accn":"0000720500-15-000025","fy":2015,"fp":"Q2","form":"10-Q","filed":"2015-05-07"},{"start":"2013-10-01","end":"2014-06-30","val":603000,"accn":"0000720500-14-000031","fy":2014,"fp":"Q3","form":"10-Q","filed":"2014-08-07"},{"start":"2013-10-01","end":"2014-06-30","val":603000,"accn":"0000720500-15-000037","fy":2015,"fp":"Q3","form":"10-Q","filed":"2015-08-06"},{"start":"2013-10-01","end":"2014-09-30","val":795000,"accn":"0000720500-14-000037","fy":2014,"fp":"FY","form":"10-K","filed":"2014-11-20"},{"start":"2013-10-01","end":"2014-09-30","val":795000,"accn":"0000720500-15-000045","fy":2015,"fp":"FY","form":"10-K","filed":"2015-11-19"},{"start":"2013-10-01","end":"2014-09-30","val":795000,"accn":"0000720500-16-000116","fy":2016,"fp":"FY","form":"10-K","filed":"2016-11-30","frame":"CY2014"},{"start":"2014-10-01","end":"2014-12-31","val":232000,"accn":"0000720500-15-000010","fy":2015,"fp":"Q1","form":"10-Q","filed":"2015-02-05"},{"start":"2014-10-01","end":"2014-12-31","val":232000,"accn":"0000720500-16-000081","fy":2015,"fp":"Q1","form":"10-Q","filed":"2016-02-09","frame":"CY2014Q4"},{"start":"2014-10-01","end":"2015-03-31","val":568000,"accn":"0000720500-15-000025","fy":2015,"fp":"Q2","form":"10-Q","filed":"2015-05-07"},{"start":"2014-10-01","end":"2015-03-31","val":568000,"accn":"0000720500-16-000101","fy":2016,"fp":"Q2","form":"10-Q","filed":"2016-05-05"},{"start":"2014-10-01","end":"2015-06-30","val":864000,"accn":"0000720500-15-000037","fy":2015,"fp":"Q3","form":"10-Q","filed":"2015-08-06"},{"start":"2014-10-01","end":"2015-06-30","val":864000,"accn":"0000720500-16-000106","fy":2016,"fp":"Q3","form":"10-Q","filed":"2016-08-04"},{"start":"2014-10-01","end":"2015-09-30","val":1162000,"accn":"0000720500-15-000045","fy":2015,"fp":"FY","form":"10-K","filed":"2015-11-19"},{"start":"2014-10-01","end":"2015-09-30","val":1162000,"accn":"0000720500-16-000116","fy":2016,"fp":"FY","form":"10-K","filed":"2016-11-30"},{"start":"2014-10-01","end":"2015-09-30","val":1162000,"accn":"0000720500-17-000054","fy":2017,"fp":"FY","form":"10-K","filed":"2017-11-20","frame":"CY2015"},{"start":"2015-10-01","end":"2015-12-31","val":342000,"accn":"0000720500-16-000081","fy":2015,"fp":"Q1","form":"10-Q","filed":"2016-02-09"},{"start":"2015-10-01","end":"2015-12-31","val":342000,"accn":"0000720500-17-000017","fy":2017,"fp":"Q1","form":"10-Q","filed":"2017-02-09","frame":"CY2015Q4"},{"start":"2015-10-01","end":"2016-03-31","val":708000,"accn":"0000720500-16-000101","fy":2016,"fp":"Q2","form":"10-Q","filed":"2016-05-05"},{"start":"2015-10-01","end":"2016-03-31","val":708000,"accn":"0000720500-17-000034","fy":2017,"fp":"Q2","form":"10-Q","filed":"2017-05-10"},{"start":"2015-10-01","end":"2016-06-30","val":1059000,"accn":"0000720500-16-000106","fy":2016,"fp":"Q3","form":"10-Q","filed":"2016-08-04"},{"start":"2015-10-01","end":"2016-06-30","val":1059000,"accn":"0000720500-17-000045","fy":2017,"fp":"Q3","form":"10-Q","filed":"2017-08-09"},{"start":"2016-04-01","end":"2016-06-30","val":400000,"accn":"0000720500-17-000045","fy":2017,"fp":"Q3","form":"10-Q","filed":"2017-08-09","frame":"CY2016Q2"},{"start":"2015-10-01","end":"2016-09-30","val":1390000,"accn":"0000720500-16-000116","fy":2016,"fp":"FY","form":"10-K","filed":"2016-11-30"},{"start":"2015-10-01","end":"2016-09-30","val":1390000,"accn":"0000720500-17-000054","fy":2017,"fp":"FY","form":"10-K","filed":"2017-11-20"},{"start":"2015-10-01","end":"2016-09-30","val":1390000,"accn":"0000720500-18-000051","fy":2018,"fp":"FY","form":"10-K","filed":"2018-12-07","frame":"CY2016"},{"start":"2016-10-01","end":"2016-12-31","val":319000,"accn":"0000720500-17-000017","fy":2017,"fp":"Q1","form":"10-Q","filed":"2017-02-09"},{"start":"2016-10-01","end":"2016-12-31","val":319000,"accn":"0000720500-18-000016","fy":2018,"fp":"Q1","form":"10-Q","filed":"2018-02-08","frame":"CY2016Q4"},{"start":"2016-10-01","end":"2017-03-31","val":624000,"accn":"0000720500-17-000034","fy":2017,"fp":"Q2","form":"10-Q","filed":"2017-05-10"},{"start":"2016-10-01","end":"2017-03-31","val":624000,"accn":"0000720500-18-000026","fy":2018,"fp":"Q2","form":"10-Q","filed":"2018-05-10"},{"start":"2017-01-01","end":"2017-03-31","val":300000,"accn":"0000720500-18-000026","fy":2018,"fp":"Q2","form":"10-Q","filed":"2018-05-10","frame":"CY2017Q1"},{"start":"2016-10-01","end":"2017-06-30","val":978000,"accn":"0000720500-17-000045","fy":2017,"fp":"Q3","form":"10-Q","filed":"2017-08-09"},{"start":"2016-10-01","end":"2017-06-30","val":978000,"accn":"0000720500-18-000041","fy":2018,"fp":"Q3","form":"10-Q","filed":"2018-08-09"},{"start":"2017-04-01","end":"2017-06-30","val":400000,"accn":"0000720500-17-000045","fy":2017,"fp":"Q3","form":"10-Q","filed":"2017-08-09"},{"start":"2017-04-01","end":"2017-06-30","val":400000,"accn":"0000720500-18-000041","fy":2018,"fp":"Q3","form":"10-Q","filed":"2018-08-09","frame":"CY2017Q2"},{"start":"2016-10-01","end":"2017-09-30","val":1328000,"accn":"0000720500-17-000054","fy":2017,"fp":"FY","form":"10-K","filed":"2017-11-20"},{"start":"2016-10-01","end":"2017-09-30","val":1328000,"accn":"0000720500-18-000051","fy":2018,"fp":"FY","form":"10-K","filed":"2018-12-07"},{"start":"2016-10-01","end":"2017-09-30","val":1328000,"accn":"0001564590-19-044022","fy":2019,"fp":"FY","form":"10-K","filed":"2019-11-21","frame":"CY2017"},{"start":"2017-10-01","end":"2017-12-31","val":253000,"accn":"0000720500-18-000016","fy":2018,"fp":"Q1","form":"10-Q","filed":"2018-02-08"},{"start":"2017-10-01","end":"2017-12-31","val":253000,"accn":"0000720500-19-000006","fy":2019,"fp":"Q1","form":"10-Q","filed":"2019-02-07","frame":"CY2017Q4"},{"start":"2017-10-01","end":"2018-03-31","val":463000,"accn":"0000720500-18-000026","fy":2018,"fp":"Q2","form":"10-Q","filed":"2018-05-10"},{"start":"2017-10-01","end":"2018-03-31","val":463000,"accn":"0000720500-19-000019","fy":2019,"fp":"Q2","form":"10-Q","filed":"2019-05-09"},{"start":"2018-01-01","end":"2018-03-31","val":200000,"accn":"0000720500-18-000026","fy":2018,"fp":"Q2","form":"10-Q","filed":"2018-05-10"},{"start":"2018-01-01","end":"2018-03-31","val":200000,"accn":"0000720500-19-000019","fy":2019,"fp":"Q2","form":"10-Q","filed":"2019-05-09","frame":"CY2018Q1"},{"start":"2017-10-01","end":"2018-06-30","val":632000,"accn":"0000720500-18-000041","fy":2018,"fp":"Q3","form":"10-Q","filed":"2018-08-09"},{"start":"2017-10-01","end":"2018-06-30","val":632000,"accn":"0000720500-19-000026","fy":2019,"fp":"Q3","form":"10-Q","filed":"2019-08-08"},{"start":"2018-04-01","end":"2018-06-30","val":200000,"accn":"0000720500-18-000041","fy":2018,"fp":"Q3","form":"10-Q","filed":"2018-08-09"},{"start":"2018-04-01","end":"2018-06-30","val":200000,"accn":"0000720500-19-000026","fy":2019,"fp":"Q3","form":"10-Q","filed":"2019-08-08","frame":"CY2018Q2"},{"start":"2017-10-01","end":"2018-09-30","val":855000,"accn":"0000720500-18-000051","fy":2018,"fp":"FY","form":"10-K","filed":"2018-12-07"},{"start":"2017-10-01","end":"2018-09-30","val":855000,"accn":"0001564590-19-044022","fy":2019,"fp":"FY","form":"10-K","filed":"2019-11-21"},{"start":"2017-10-01","end":"2018-09-30","val":855000,"accn":"0001564590-20-054663","fy":2020,"fp":"FY","form":"10-K","filed":"2020-11-19","frame":"CY2018"},{"start":"2018-10-01","end":"2018-12-31","val":169000,"accn":"0000720500-19-000006","fy":2019,"fp":"Q1","form":"10-Q","filed":"2019-02-07"},{"start":"2018-10-01","end":"2018-12-31","val":169000,"accn":"0001564590-20-003702","fy":2020,"fp":"Q1","form":"10-Q","filed":"2020-02-06","frame":"CY2018Q4"},{"start":"2018-10-01","end":"2019-03-31","val":363000,"accn":"0000720500-19-000019","fy":2019,"fp":"Q2","form":"10-Q","filed":"2019-05-09"},{"start":"2018-10-01","end":"2019-03-31","val":363000,"accn":"0001564590-20-022931","fy":2020,"fp":"Q2","form":"10-Q","filed":"2020-05-07"},{"start":"2019-01-01","end":"2019-03-31","val":200000,"accn":"0000720500-19-000019","fy":2019,"fp":"Q2","form":"10-Q","filed":"2019-05-09"},{"start":"2019-01-01","end":"2019-03-31","val":200000,"accn":"0001564590-20-022931","fy":2020,"fp":"Q2","form":"10-Q","filed":"2020-05-07","frame":"CY2019Q1"},{"start":"2018-10-01","end":"2019-06-30","val":474000,"accn":"0000720500-19-000026","fy":2019,"fp":"Q3","form":"10-Q","filed":"2019-08-08"},{"start":"2018-10-01","end":"2019-06-30","val":474000,"accn":"0001564590-20-037822","fy":2020,"fp":"Q3","form":"10-Q","filed":"2020-08-06"},{"start":"2019-04-01","end":"2019-06-30","val":100000,"accn":"0000720500-19-000026","fy":2019,"fp":"Q3","form":"10-Q","filed":"2019-08-08"},{"start":"2019-04-01","end":"2019-06-30","val":100000,"accn":"0001564590-20-037822","fy":2020,"fp":"Q3","form":"10-Q","filed":"2020-08-06","frame":"CY2019Q2"},{"start":"2018-10-01","end":"2019-09-30","val":573000,"accn":"0001564590-19-044022","fy":2019,"fp":"FY","form":"10-K","filed":"2019-11-21"},{"start":"2018-10-01","end":"2019-09-30","val":573000,"accn":"0001564590-20-054663","fy":2020,"fp":"FY","form":"10-K","filed":"2020-11-19"},{"start":"2018-10-01","end":"2019-09-30","val":573000,"accn":"0000950170-21-004729","fy":2021,"fp":"FY","form":"10-K","filed":"2021-11-17","frame":"CY2019"},{"start":"2019-10-01","end":"2019-12-31","val":68000,"accn":"0001564590-20-003702","fy":2020,"fp":"Q1","form":"10-Q","filed":"2020-02-06"},{"start":"2019-10-01","end":"2019-12-31","val":68000,"accn":"0001564590-21-005560","fy":2021,"fp":"Q1","form":"10-Q","filed":"2021-02-11","frame":"CY2019Q4"},{"start":"2019-10-01","end":"2020-03-31","val":133000,"accn":"0001564590-20-022931","fy":2020,"fp":"Q2","form":"10-Q","filed":"2020-05-07"},{"start":"2019-10-01","end":"2020-03-31","val":133000,"accn":"0001564590-21-024118","fy":2021,"fp":"Q2","form":"10-Q","filed":"2021-05-05"},{"start":"2020-01-01","end":"2020-03-31","val":100000,"accn":"0001564590-20-022931","fy":2020,"fp":"Q2","form":"10-Q","filed":"2020-05-07","frame":"CY2020Q1"},{"start":"2019-10-01","end":"2020-06-30","val":257000,"accn":"0001564590-20-037822","fy":2020,"fp":"Q3","form":"10-Q","filed":"2020-08-06"},{"start":"2019-10-01","end":"2020-06-30","val":257000,"accn":"0001564590-21-040852","fy":2021,"fp":"Q3","form":"10-Q","filed":"2021-08-04"},{"start":"2020-04-01","end":"2020-06-30","val":100000,"accn":"0001564590-20-037822","fy":2020,"fp":"Q3","form":"10-Q","filed":"2020-08-06"},{"start":"2020-04-01","end":"2020-06-30","val":100000,"accn":"0001564590-21-040852","fy":2021,"fp":"Q3","form":"10-Q","filed":"2021-08-04","frame":"CY2020Q2"},{"start":"2019-10-01","end":"2020-09-30","val":326000,"accn":"0001564590-20-054663","fy":2020,"fp":"FY","form":"10-K","filed":"2020-11-19"},{"start":"2019-10-01","end":"2020-09-30","val":326000,"accn":"0000950170-21-004729","fy":2021,"fp":"FY","form":"10-K","filed":"2021-11-17"},{"start":"2019-10-01","end":"2020-09-30","val":326000,"accn":"0000950170-22-025872","fy":2022,"fp":"FY","form":"10-K","filed":"2022-11-30","frame":"CY2020"},{"start":"2020-10-01","end":"2020-12-31","val":65000,"accn":"0001564590-21-005560","fy":2021,"fp":"Q1","form":"10-Q","filed":"2021-02-11"},{"start":"2020-10-01","end":"2020-12-31","val":65000,"accn":"0000950170-22-001222","fy":2022,"fp":"Q1","form":"10-Q","filed":"2022-02-14","frame":"CY2020Q4"},{"start":"2020-10-01","end":"2021-03-31","val":149000,"accn":"0001564590-21-024118","fy":2021,"fp":"Q2","form":"10-Q","filed":"2021-05-05"},{"start":"2020-10-01","end":"2021-03-31","val":149000,"accn":"0000950170-22-009352","fy":2022,"fp":"Q2","form":"10-Q","filed":"2022-05-11"},{"start":"2020-10-01","end":"2021-06-30","val":277000,"accn":"0001564590-21-040852","fy":2021,"fp":"Q3","form":"10-Q","filed":"2021-08-04"},{"start":"2020-10-01","end":"2021-06-30","val":277000,"accn":"0000950170-22-017419","fy":2022,"fp":"Q3","form":"10-Q","filed":"2022-08-15"},{"start":"2021-04-01","end":"2021-06-30","val":100000,"accn":"0001564590-21-040852","fy":2021,"fp":"Q3","form":"10-Q","filed":"2021-08-04","frame":"CY2021Q2"},{"start":"2020-10-01","end":"2021-09-30","val":401000,"accn":"0000950170-21-004729","fy":2021,"fp":"FY","form":"10-K","filed":"2021-11-17"},{"start":"2020-10-01","end":"2021-09-30","val":401000,"accn":"0000950170-22-025872","fy":2022,"fp":"FY","form":"10-K","filed":"2022-11-30"},{"start":"2020-10-01","end":"2021-09-30","val":401000,"accn":"0000950170-23-070422","fy":2023,"fp":"FY","form":"10-K","filed":"2023-12-14","frame":"CY2021"},{"start":"2021-10-01","end":"2021-12-31","val":103000,"accn":"0000950170-22-001222","fy":2022,"fp":"Q1","form":"10-Q","filed":"2022-02-14"},{"start":"2021-10-01","end":"2021-12-31","val":103000,"accn":"0000950170-23-002163","fy":2023,"fp":"Q1","form":"10-Q","filed":"2023-02-08","frame":"CY2021Q4"},{"start":"2021-10-01","end":"2022-03-31","val":240000,"accn":"0000950170-22-009352","fy":2022,"fp":"Q2","form":"10-Q","filed":"2022-05-11"},{"start":"2021-10-01","end":"2022-03-31","val":240000,"accn":"0000950170-23-020556","fy":2023,"fp":"Q2","form":"10-Q","filed":"2023-05-10"},{"start":"2022-01-01","end":"2022-03-31","val":100000,"accn":"0000950170-23-020556","fy":2023,"fp":"Q2","form":"10-Q","filed":"2023-05-10","frame":"CY2022Q1"},{"start":"2021-10-01","end":"2022-06-30","val":386000,"accn":"0000950170-22-017419","fy":2022,"fp":"Q3","form":"10-Q","filed":"2022-08-15"},{"start":"2021-10-01","end":"2022-06-30","val":386000,"accn":"0000950170-23-040599","fy":2023,"fp":"Q3","form":"10-Q","filed":"2023-08-09"},{"start":"2022-04-01","end":"2022-06-30","val":100000,"accn":"0000950170-23-040599","fy":2023,"fp":"Q3","form":"10-Q","filed":"2023-08-09","frame":"CY2022Q2"},{"start":"2021-10-01","end":"2022-09-30","val":543000,"accn":"0000950170-22-025872","fy":2022,"fp":"FY","form":"10-K","filed":"2022-11-30"},{"start":"2021-10-01","end":"2022-09-30","val":543000,"accn":"0000950170-23-070422","fy":2023,"fp":"FY","form":"10-K","filed":"2023-12-14"},{"start":"2021-10-01","end":"2022-09-30","val":543000,"accn":"0000950170-24-135825","fy":2024,"fp":"FY","form":"10-K","filed":"2024-12-12","frame":"CY2022"},{"start":"2022-10-01","end":"2022-12-31","val":164000,"accn":"0000950170-23-002163","fy":2023,"fp":"Q1","form":"10-Q","filed":"2023-02-08"},{"start":"2022-10-01","end":"2022-12-31","val":164000,"accn":"0000950170-24-013277","fy":2024,"fp":"Q1","form":"10-Q","filed":"2024-02-09","frame":"CY2022Q4"},{"start":"2022-10-01","end":"2023-03-31","val":338000,"accn":"0000950170-23-020556","fy":2023,"fp":"Q2","form":"10-Q","filed":"2023-05-10"},{"start":"2022-10-01","end":"2023-03-31","val":338000,"accn":"0000950170-24-055725","fy":2024,"fp":"Q2","form":"10-Q","filed":"2024-05-08"},{"start":"2023-01-01","end":"2023-03-31","val":200000,"accn":"0000950170-23-020556","fy":2023,"fp":"Q2","form":"10-Q","filed":"2023-05-10"},{"start":"2023-01-01","end":"2023-03-31","val":200000,"accn":"0000950170-24-055725","fy":2024,"fp":"Q2","form":"10-Q","filed":"2024-05-08","frame":"CY2023Q1"},{"start":"2022-10-01","end":"2023-06-30","val":528000,"accn":"0000950170-23-040599","fy":2023,"fp":"Q3","form":"10-Q","filed":"2023-08-09"},{"start":"2022-10-01","end":"2023-06-30","val":528000,"accn":"0000950170-24-092822","fy":2024,"fp":"Q3","form":"10-Q","filed":"2024-08-07"},{"start":"2023-04-01","end":"2023-06-30","val":200000,"accn":"0000950170-23-040599","fy":2023,"fp":"Q3","form":"10-Q","filed":"2023-08-09"},{"start":"2023-04-01","end":"2023-06-30","val":200000,"accn":"0000950170-24-092822","fy":2024,"fp":"Q3","form":"10-Q","filed":"2024-08-07","frame":"CY2023Q2"},{"start":"2022-10-01","end":"2023-09-30","val":1272000,"accn":"0000950170-23-070422","fy":2023,"fp":"FY","form":"10-K","filed":"2023-12-14"},{"start":"2022-10-01","end":"2023-09-30","val":1272000,"accn":"0000950170-24-135825","fy":2024,"fp":"FY","form":"10-K","filed":"2024-12-12","frame":"CY2023"},{"start":"2023-10-01","end":"2023-12-31","val":317000,"accn":"0000950170-24-013277","fy":2024,"fp":"Q1","form":"10-Q","filed":"2024-02-09"},{"start":"2023-10-01","end":"2023-12-31","val":317000,"accn":"0000950170-25-014465","fy":2025,"fp":"Q1","form":"10-Q","filed":"2025-02-05","frame":"CY2023Q4"},{"start":"2023-10-01","end":"2024-03-31","val":667000,"accn":"0000950170-24-055725","fy":2024,"fp":"Q2","form":"10-Q","filed":"2024-05-08"},{"start":"2023-10-01","end":"2024-03-31","val":667000,"accn":"0000950170-25-069135","fy":2025,"fp":"Q2","form":"10-Q","filed":"2025-05-12"},{"start":"2024-01-01","end":"2024-03-31","val":300000,"accn":"0000950170-24-055725","fy":2024,"fp":"Q2","form":"10-Q","filed":"2024-05-08"},{"start":"2024-01-01","end":"2024-03-31","val":300000,"accn":"0000950170-25-069135","fy":2025,"fp":"Q2","form":"10-Q","filed":"2025-05-12","frame":"CY2024Q1"},{"start":"2023-10-01","end":"2024-06-30","val":1155000,"accn":"0000950170-24-092822","fy":2024,"fp":"Q3","form":"10-Q","filed":"2024-08-07"},{"start":"2023-10-01","end":"2024-06-30","val":1155000,"accn":"0000950170-25-104002","fy":2025,"fp":"Q3","form":"10-Q","filed":"2025-08-06"},{"start":"2024-04-01","end":"2024-06-30","val":500000,"accn":"0000950170-24-092822","fy":2024,"fp":"Q3","form":"10-Q","filed":"2024-08-07"},{"start":"2024-04-01","end":"2024-06-30","val":500000,"accn":"0000950170-25-104002","fy":2025,"fp":"Q3","form":"10-Q","filed":"2025-08-06","frame":"CY2024Q2"},{"start":"2023-10-01","end":"2024-09-30","val":1530000,"accn":"0000950170-24-135825","fy":2024,"fp":"FY","form":"10-K","filed":"2024-12-12"},{"start":"2023-10-01","end":"2024-09-30","val":1530000,"accn":"0001193125-25-314147","fy":2025,"fp":"FY","form":"10-K","filed":"2025-12-10","frame":"CY2024"},{"start":"2024-10-01","end":"2024-12-31","val":333000,"accn":"0000950170-25-014465","fy":2025,"fp":"Q1","form":"10-Q","filed":"2025-02-05"},{"start":"2024-10-01","end":"2024-12-31","val":333000,"accn":"0001193125-26-039360","fy":2026,"fp":"Q1","form":"10-Q","filed":"2026-02-05","frame":"CY2024Q4"},{"start":"2024-10-01","end":"2025-03-31","val":623000,"accn":"0000950170-25-069135","fy":2025,"fp":"Q2","form":"10-Q","filed":"2025-05-12"},{"start":"2025-01-01","end":"2025-03-31","val":300000,"accn":"0000950170-25-069135","fy":2025,"fp":"Q2","form":"10-Q","filed":"2025-05-12","frame":"CY2025Q1"},{"start":"2024-10-01","end":"2025-06-30","val":961000,"accn":"0000950170-25-104002","fy":2025,"fp":"Q3","form":"10-Q","filed":"2025-08-06"},{"start":"2025-04-01","end":"2025-06-30","val":300000,"accn":"0000950170-25-104002","fy":2025,"fp":"Q3","form":"10-Q","filed":"2025-08-06","frame":"CY2025Q2"},{"start":"2024-10-01","end":"2025-09-30","val":1229000,"accn":"0001193125-25-314147","fy":2025,"fp":"FY","form":"10-K","filed":"2025-12-10","frame":"CY2025"},{"start":"2025-10-01","end":"2025-12-31","val":249000,"accn":"0001193125-26-039360","fy":2026,"fp":"Q1","form":"10-Q","filed":"2026-02-05","frame":"CY2025Q4"}]}}