{"cik":1113232,"taxonomy":"us-gaap","tag":"ProfitLoss","label":"Net Income (Loss), Including Portion Attributable to Noncontrolling Interest","description":"The consolidated profit or loss for the period, net of income taxes, including the portion attributable to the noncontrolling interest.","entityName":"AXCELIS TECHNOLOGIES INC","units":{"USD":[{"start":"2010-01-01","end":"2010-06-30","val":-15630000,"accn":"0001104659-11-044192","fy":2011,"fp":"Q2","form":"10-Q","filed":"2011-08-05"},{"start":"2010-04-01","end":"2010-06-30","val":-4529000,"accn":"0001104659-11-044192","fy":2011,"fp":"Q2","form":"10-Q","filed":"2011-08-05","frame":"CY2010Q2"},{"start":"2011-01-01","end":"2011-06-30","val":6039000,"accn":"0001104659-11-044192","fy":2011,"fp":"Q2","form":"10-Q","filed":"2011-08-05"},{"start":"2011-04-01","end":"2011-06-30","val":4227000,"accn":"0001104659-11-044192","fy":2011,"fp":"Q2","form":"10-Q","filed":"2011-08-05","frame":"CY2011Q2"},{"start":"2015-01-01","end":"2015-12-31","val":14678000,"accn":"0001558370-18-002060","fy":2017,"fp":"FY","form":"10-K","filed":"2018-03-14","frame":"CY2015"},{"start":"2016-01-01","end":"2016-06-30","val":4885000,"accn":"0001558370-17-005928","fy":2017,"fp":"Q2","form":"10-Q","filed":"2017-08-04"},{"start":"2016-01-01","end":"2016-09-30","val":7036000,"accn":"0001558370-17-008078","fy":2017,"fp":"Q3","form":"10-Q","filed":"2017-11-03"},{"start":"2016-01-01","end":"2016-12-31","val":11001000,"accn":"0001558370-18-002060","fy":2017,"fp":"FY","form":"10-K","filed":"2018-03-14"},{"start":"2016-01-01","end":"2016-12-31","val":11001000,"accn":"0001558370-19-001791","fy":2018,"fp":"FY","form":"10-K","filed":"2019-03-11","frame":"CY2016"},{"start":"2017-01-01","end":"2017-03-31","val":9506000,"accn":"0001558370-18-003997","fy":2018,"fp":"Q1","form":"10-Q","filed":"2018-05-04","frame":"CY2017Q1"},{"start":"2017-01-01","end":"2017-06-30","val":23438000,"accn":"0001558370-17-005928","fy":2017,"fp":"Q2","form":"10-Q","filed":"2017-08-04"},{"start":"2017-01-01","end":"2017-06-30","val":23438000,"accn":"0001558370-18-006300","fy":2018,"fp":"Q2","form":"10-Q","filed":"2018-08-03"},{"start":"2017-01-01","end":"2017-09-30","val":35279000,"accn":"0001558370-17-008078","fy":2017,"fp":"Q3","form":"10-Q","filed":"2017-11-03"},{"start":"2017-01-01","end":"2017-09-30","val":35279000,"accn":"0001558370-18-008325","fy":2018,"fp":"Q3","form":"10-Q","filed":"2018-11-02"},{"start":"2017-01-01","end":"2017-12-31","val":126959000,"accn":"0001558370-18-002060","fy":2017,"fp":"FY","form":"10-K","filed":"2018-03-14"},{"start":"2017-01-01","end":"2017-12-31","val":126959000,"accn":"0001558370-19-001791","fy":2018,"fp":"FY","form":"10-K","filed":"2019-03-11"},{"start":"2017-01-01","end":"2017-12-31","val":126959000,"accn":"0001558370-20-001858","fy":2019,"fp":"FY","form":"10-K","filed":"2020-03-02","frame":"CY2017"},{"start":"2018-01-01","end":"2018-03-31","val":13915000,"accn":"0001558370-18-003997","fy":2018,"fp":"Q1","form":"10-Q","filed":"2018-05-04"},{"start":"2018-01-01","end":"2018-03-31","val":13915000,"accn":"0001558370-19-004413","fy":2019,"fp":"Q1","form":"10-Q","filed":"2019-05-08","frame":"CY2018Q1"},{"start":"2018-01-01","end":"2018-06-30","val":28584000,"accn":"0001558370-18-006300","fy":2018,"fp":"Q2","form":"10-Q","filed":"2018-08-03"},{"start":"2018-01-01","end":"2018-06-30","val":28584000,"accn":"0001558370-19-007396","fy":2019,"fp":"Q2","form":"10-Q","filed":"2019-08-07"},{"start":"2018-01-01","end":"2018-09-30","val":37422000,"accn":"0001558370-18-008325","fy":2018,"fp":"Q3","form":"10-Q","filed":"2018-11-02"},{"start":"2018-01-01","end":"2018-09-30","val":37422000,"accn":"0001558370-19-010306","fy":2019,"fp":"Q3","form":"10-Q","filed":"2019-11-07"},{"start":"2018-01-01","end":"2018-12-31","val":45885000,"accn":"0001558370-19-001791","fy":2018,"fp":"FY","form":"10-K","filed":"2019-03-11"},{"start":"2018-01-01","end":"2018-12-31","val":45885000,"accn":"0001558370-20-001858","fy":2019,"fp":"FY","form":"10-K","filed":"2020-03-02"},{"start":"2018-01-01","end":"2018-12-31","val":45885000,"accn":"0001558370-21-001972","fy":2020,"fp":"FY","form":"10-K","filed":"2021-02-26","frame":"CY2018"},{"start":"2019-01-01","end":"2019-03-31","val":6062000,"accn":"0001558370-19-004413","fy":2019,"fp":"Q1","form":"10-Q","filed":"2019-05-08"},{"start":"2019-01-01","end":"2019-03-31","val":6062000,"accn":"0001558370-20-005335","fy":2020,"fp":"Q1","form":"10-Q","filed":"2020-05-06","frame":"CY2019Q1"},{"start":"2019-01-01","end":"2019-06-30","val":6618000,"accn":"0001558370-19-007396","fy":2019,"fp":"Q2","form":"10-Q","filed":"2019-08-07"},{"start":"2019-01-01","end":"2019-06-30","val":6618000,"accn":"0001558370-20-009324","fy":2020,"fp":"Q2","form":"10-Q","filed":"2020-08-05"},{"start":"2019-01-01","end":"2019-09-30","val":7322000,"accn":"0001558370-19-010306","fy":2019,"fp":"Q3","form":"10-Q","filed":"2019-11-07"},{"start":"2019-01-01","end":"2019-09-30","val":7322000,"accn":"0001558370-20-013115","fy":2020,"fp":"Q3","form":"10-Q","filed":"2020-11-06"},{"start":"2019-01-01","end":"2019-12-31","val":17034000,"accn":"0001558370-20-001858","fy":2019,"fp":"FY","form":"10-K","filed":"2020-03-02"},{"start":"2019-01-01","end":"2019-12-31","val":17034000,"accn":"0001558370-21-001972","fy":2020,"fp":"FY","form":"10-K","filed":"2021-02-26"},{"start":"2019-01-01","end":"2019-12-31","val":17034000,"accn":"0001558370-22-002096","fy":2021,"fp":"FY","form":"10-K","filed":"2022-02-25","frame":"CY2019"},{"start":"2020-01-01","end":"2020-03-31","val":11221000,"accn":"0001558370-20-005335","fy":2020,"fp":"Q1","form":"10-Q","filed":"2020-05-06"},{"start":"2020-01-01","end":"2020-03-31","val":11221000,"accn":"0001558370-21-006110","fy":2021,"fp":"Q1","form":"10-Q","filed":"2021-05-06","frame":"CY2020Q1"},{"start":"2020-01-01","end":"2020-06-30","val":24523000,"accn":"0001558370-20-009324","fy":2020,"fp":"Q2","form":"10-Q","filed":"2020-08-05"},{"start":"2020-01-01","end":"2020-06-30","val":24523000,"accn":"0001558370-21-010725","fy":2021,"fp":"Q2","form":"10-Q","filed":"2021-08-06"},{"start":"2020-01-01","end":"2020-09-30","val":35308000,"accn":"0001558370-20-013115","fy":2020,"fp":"Q3","form":"10-Q","filed":"2020-11-06"},{"start":"2020-01-01","end":"2020-09-30","val":35308000,"accn":"0001558370-21-014801","fy":2021,"fp":"Q3","form":"10-Q","filed":"2021-11-05"},{"start":"2020-01-01","end":"2020-12-31","val":49982000,"accn":"0001558370-21-001972","fy":2020,"fp":"FY","form":"10-K","filed":"2021-02-26"},{"start":"2020-01-01","end":"2020-12-31","val":49982000,"accn":"0001558370-22-002096","fy":2021,"fp":"FY","form":"10-K","filed":"2022-02-25"},{"start":"2020-01-01","end":"2020-12-31","val":49982000,"accn":"0001558370-23-002006","fy":2022,"fp":"FY","form":"10-K","filed":"2023-02-24","frame":"CY2020"},{"start":"2021-01-01","end":"2021-03-31","val":16480000,"accn":"0001558370-21-006110","fy":2021,"fp":"Q1","form":"10-Q","filed":"2021-05-06"},{"start":"2021-01-01","end":"2021-03-31","val":16480000,"accn":"0001558370-22-007307","fy":2022,"fp":"Q1","form":"10-Q","filed":"2022-05-05","frame":"CY2021Q1"},{"start":"2021-01-01","end":"2021-06-30","val":35386000,"accn":"0001558370-21-010725","fy":2021,"fp":"Q2","form":"10-Q","filed":"2021-08-06"},{"start":"2021-01-01","end":"2021-06-30","val":35386000,"accn":"0001558370-22-012118","fy":2022,"fp":"Q2","form":"10-Q","filed":"2022-08-04"},{"start":"2021-01-01","end":"2021-09-30","val":62901000,"accn":"0001558370-21-014801","fy":2021,"fp":"Q3","form":"10-Q","filed":"2021-11-05"},{"start":"2021-01-01","end":"2021-09-30","val":62901000,"accn":"0001558370-22-016292","fy":2022,"fp":"Q3","form":"10-Q","filed":"2022-11-03"},{"start":"2021-01-01","end":"2021-12-31","val":98650000,"accn":"0001558370-22-002096","fy":2021,"fp":"FY","form":"10-K","filed":"2022-02-25"},{"start":"2021-01-01","end":"2021-12-31","val":98650000,"accn":"0001558370-23-002006","fy":2022,"fp":"FY","form":"10-K","filed":"2023-02-24"},{"start":"2021-01-01","end":"2021-12-31","val":98650000,"accn":"0001558370-24-001628","fy":2023,"fp":"FY","form":"10-K","filed":"2024-02-23"},{"start":"2021-01-01","end":"2021-12-31","val":98650000,"accn":"0001558370-24-001969","fy":2023,"fp":"FY","form":"10-K/A","filed":"2024-02-28","frame":"CY2021"},{"start":"2022-01-01","end":"2022-03-31","val":41614000,"accn":"0001558370-22-007307","fy":2022,"fp":"Q1","form":"10-Q","filed":"2022-05-05"},{"start":"2022-01-01","end":"2022-03-31","val":41614000,"accn":"0001558370-23-008317","fy":2023,"fp":"Q1","form":"10-Q","filed":"2023-05-05","frame":"CY2022Q1"},{"start":"2022-01-01","end":"2022-06-30","val":85804000,"accn":"0001558370-22-012118","fy":2022,"fp":"Q2","form":"10-Q","filed":"2022-08-04"},{"start":"2022-01-01","end":"2022-06-30","val":85804000,"accn":"0001558370-23-013134","fy":2023,"fp":"Q2","form":"10-Q","filed":"2023-08-03"},{"start":"2022-01-01","end":"2022-09-30","val":126087000,"accn":"0001558370-22-016292","fy":2022,"fp":"Q3","form":"10-Q","filed":"2022-11-03"},{"start":"2022-01-01","end":"2022-09-30","val":126087000,"accn":"0001558370-23-017452","fy":2023,"fp":"Q3","form":"10-Q","filed":"2023-11-02"},{"start":"2022-01-01","end":"2022-12-31","val":183079000,"accn":"0001558370-23-002006","fy":2022,"fp":"FY","form":"10-K","filed":"2023-02-24"},{"start":"2022-01-01","end":"2022-12-31","val":183079000,"accn":"0001558370-24-001628","fy":2023,"fp":"FY","form":"10-K","filed":"2024-02-23"},{"start":"2022-01-01","end":"2022-12-31","val":183079000,"accn":"0001558370-24-001969","fy":2023,"fp":"FY","form":"10-K/A","filed":"2024-02-28"},{"start":"2022-01-01","end":"2022-12-31","val":183079000,"accn":"0001558370-25-001855","fy":2024,"fp":"FY","form":"10-K","filed":"2025-02-28","frame":"CY2022"},{"start":"2023-01-01","end":"2023-03-31","val":47697000,"accn":"0001558370-23-008317","fy":2023,"fp":"Q1","form":"10-Q","filed":"2023-05-05"},{"start":"2023-01-01","end":"2023-03-31","val":47697000,"accn":"0001558370-24-006510","fy":2024,"fp":"Q1","form":"10-Q","filed":"2024-05-02","frame":"CY2023Q1"},{"start":"2023-01-01","end":"2023-06-30","val":109276000,"accn":"0001558370-23-013134","fy":2023,"fp":"Q2","form":"10-Q","filed":"2023-08-03"},{"start":"2023-01-01","end":"2023-06-30","val":109276000,"accn":"0001558370-24-010589","fy":2024,"fp":"Q2","form":"10-Q","filed":"2024-08-01"},{"start":"2023-01-01","end":"2023-09-30","val":175207000,"accn":"0001558370-23-017452","fy":2023,"fp":"Q3","form":"10-Q","filed":"2023-11-02"},{"start":"2023-01-01","end":"2023-09-30","val":175207000,"accn":"0001558370-24-014856","fy":2024,"fp":"Q3","form":"10-Q","filed":"2024-11-07"},{"start":"2023-01-01","end":"2023-12-31","val":246263000,"accn":"0001558370-24-001628","fy":2023,"fp":"FY","form":"10-K","filed":"2024-02-23"},{"start":"2023-01-01","end":"2023-12-31","val":246263000,"accn":"0001558370-24-001969","fy":2023,"fp":"FY","form":"10-K/A","filed":"2024-02-28"},{"start":"2023-01-01","end":"2023-12-31","val":246263000,"accn":"0001558370-25-001855","fy":2024,"fp":"FY","form":"10-K","filed":"2025-02-28"},{"start":"2023-01-01","end":"2023-12-31","val":246263000,"accn":"0001104659-26-020461","fy":2025,"fp":"FY","form":"10-K","filed":"2026-02-26","frame":"CY2023"},{"start":"2024-01-01","end":"2024-03-31","val":51595000,"accn":"0001558370-24-006510","fy":2024,"fp":"Q1","form":"10-Q","filed":"2024-05-02"},{"start":"2024-01-01","end":"2024-03-31","val":51595000,"accn":"0001558370-25-006534","fy":2025,"fp":"Q1","form":"10-Q","filed":"2025-05-06","frame":"CY2024Q1"},{"start":"2024-01-01","end":"2024-06-30","val":102460000,"accn":"0001558370-24-010589","fy":2024,"fp":"Q2","form":"10-Q","filed":"2024-08-01"},{"start":"2024-01-01","end":"2024-06-30","val":102460000,"accn":"0001558370-25-010325","fy":2025,"fp":"Q2","form":"10-Q","filed":"2025-08-05"},{"start":"2024-01-01","end":"2024-09-30","val":151036000,"accn":"0001558370-24-014856","fy":2024,"fp":"Q3","form":"10-Q","filed":"2024-11-07"},{"start":"2024-01-01","end":"2024-09-30","val":151036000,"accn":"0001104659-25-107689","fy":2025,"fp":"Q3","form":"10-Q","filed":"2025-11-06"},{"start":"2024-01-01","end":"2024-12-31","val":200992000,"accn":"0001558370-25-001855","fy":2024,"fp":"FY","form":"10-K","filed":"2025-02-28"},{"start":"2024-01-01","end":"2024-12-31","val":200992000,"accn":"0001104659-26-020461","fy":2025,"fp":"FY","form":"10-K","filed":"2026-02-26","frame":"CY2024"},{"start":"2025-01-01","end":"2025-03-31","val":28579000,"accn":"0001558370-25-006534","fy":2025,"fp":"Q1","form":"10-Q","filed":"2025-05-06"},{"start":"2025-01-01","end":"2025-03-31","val":28579000,"accn":"0001104659-26-057725","fy":2026,"fp":"Q1","form":"10-Q","filed":"2026-05-08","frame":"CY2025Q1"},{"start":"2025-01-01","end":"2025-06-30","val":59955000,"accn":"0001558370-25-010325","fy":2025,"fp":"Q2","form":"10-Q","filed":"2025-08-05"},{"start":"2025-01-01","end":"2025-06-30","val":59955000,"accn":"0001104659-26-091999","fy":2026,"fp":"Q2","form":"10-Q","filed":"2026-08-06"},{"start":"2025-01-01","end":"2025-09-30","val":85941000,"accn":"0001104659-25-107689","fy":2025,"fp":"Q3","form":"10-Q","filed":"2025-11-06"},{"start":"2025-01-01","end":"2025-12-31","val":120238000,"accn":"0001104659-26-020461","fy":2025,"fp":"FY","form":"10-K","filed":"2026-02-26","frame":"CY2025"},{"start":"2026-01-01","end":"2026-03-31","val":9214000,"accn":"0001104659-26-057725","fy":2026,"fp":"Q1","form":"10-Q","filed":"2026-05-08","frame":"CY2026Q1"},{"start":"2026-01-01","end":"2026-06-30","val":32505000,"accn":"0001104659-26-091999","fy":2026,"fp":"Q2","form":"10-Q","filed":"2026-08-06"}]}}