{"cik":"0000855182","entityType":"operating","sic":"3674","sicDescription":"Semiconductors & Related Devices","ownerOrg":null,"insiderTransactionForOwnerExists":0,"insiderTransactionForIssuerExists":1,"name":"IBIS TECHNOLOGY CORP","tickers":[],"exchanges":[],"ein":"042987600","lei":null,"description":"","website":"","investorWebsite":"","category":"","fiscalYearEnd":"1231","stateOfIncorporation":"MA","stateOfIncorporationDescription":"MA","addresses":{"mailing":{"street1":"32 CHERRY HILL DR","street2":null,"city":"DANVERS","stateOrCountry":"MA","zipCode":"01923","stateOrCountryDescription":"MA","isForeignLocation":null,"foreignStateTerritory":null,"country":null,"countryCode":null},"business":{"street1":"32 CHERRY HILL DR","street2":null,"city":"DANVERS","stateOrCountry":"MA","zipCode":"01923","stateOrCountryDescription":"MA","isForeignLocation":null,"foreignStateTerritory":null,"country":null,"countryCode":null}},"phone":"9787774247","flags":"","formerNames":[],"filings":{"recent":{"accessionNumber":["0001072613-12-000362","0001072613-09-000678","0001072613-09-000524","0001072613-09-000523","0001072613-09-000522","0001072613-09-000521","0001072613-09-000520","0001072613-09-000519","0001072613-09-000517","0001072613-09-000516","0001072613-09-000515","0001072613-09-000514","0001072613-09-000513","0001072613-09-000512","9999999995-09-000532","9999999995-09-000535","9999999995-09-000546","9999999995-09-000541","9999999995-09-000542","0001072613-09-000498","0001072613-09-000497","0001072613-09-000496","0001072613-09-000495","0001072613-09-000494","0001072613-09-000493","0001072613-09-000492","0001072613-09-000491","0001072613-09-000490","0001072613-09-000489","0001072613-09-000488","0001072613-09-000438","0001104659-09-011442","0001104659-09-010108","0001104659-09-005478","0001104659-09-003821","0001104659-09-003232","0001104659-09-001697","0001104659-08-078147","0001157523-08-010049","9999999997-08-048455","0001047469-08-012558","0001047469-08-011985","0001354457-08-000315","0001104659-08-068197","0001104659-08-061051","0000000000-08-045961","0001104659-08-056431","0001104659-08-056155","0001104659-08-056153","0000000000-08-042788","0001104659-08-052838","0001157523-08-006699","0001157523-08-005843","0001104659-08-045307","0001157523-08-005019","0001157523-08-004819","0001104659-08-037050","0001104659-08-036012","0001157523-08-004518","0001104659-08-033756","0001157523-08-003332","0001157523-08-003118","0001104659-08-021061","0001157523-08-001782","0001157523-07-012244","0001157523-07-012106","0001157523-07-012014","0001104659-07-082581","0001157523-07-010744","0001157523-07-010181","0001104659-07-062463","0001157523-07-007229","0001255423-07-000012","0001104659-07-049118","9999999995-07-002471","0001255423-07-000011","0001255423-07-000010","0001104659-07-043090","0001104659-07-043089","0001044321-07-000174","0001044321-07-000168","0001104659-07-040050","0001255423-07-000009","0001255423-07-000008","0001255423-07-000007","0001255423-07-000006","0001255423-07-000005","0001255423-07-000004","0001157523-07-004430","0001104659-07-033040","9999999995-07-001520","9999999997-07-020066","0001104659-07-028313","0001157523-07-003428","0001104659-07-025435","0001104659-07-022818","0001104659-07-020956","0001044321-07-000136","0001044321-07-000126","0001044321-07-000118","0001157523-07-001920","0001157523-07-001803","0001255423-07-000003","0001255423-07-000002","0001255423-07-000001","0001157523-07-000435","0001157523-07-000338","0001157523-06-012256","0001157523-06-011536","0001098026-06-000010","0001104659-06-074464","0001255423-06-000012","0001157523-06-010312","0001157523-06-009588","0001157523-06-008797","0001104659-06-056557","0001104659-06-054897","0001157523-06-007376","0001104659-06-037790","0001255423-06-000011","0001255423-06-000010","0001255423-06-000009","0001255423-06-000008","0001255423-06-000007","0001255423-06-000006","0001104659-06-035030","0001157523-06-004560","0001098026-06-000009","0001157523-06-003541","0001104659-06-020538","0001104659-06-020192","0001157523-06-002590","0001255423-06-000005","0001255423-06-000004","0001255423-06-000003","0001098026-06-000008","0001157523-06-001897","0001098026-06-000006","0001098026-06-000005","0001098026-06-000004","0001098026-06-000002","0001255423-06-000002","0001098026-06-000001","0001255423-05-000028","0001255423-05-000027","0001157523-05-010534","0001104659-05-055472","0001157523-05-009224","0001255423-05-000025","0001104659-05-035364","0001255423-05-000023","0001255423-05-000022","0001157523-05-006321","0001104659-05-031620","0000000000-05-034130","0001255423-05-000020","0001255423-05-000019","0001255423-05-000018","0001255423-05-000016","0001255423-05-000014","0001255423-05-000012","0001104659-05-026131","0001255423-05-000010","0001255423-05-000009","0001255423-05-000008","0001255423-05-000007","0001255423-05-000006","0001255423-05-000005","0001104659-05-021701","0001255423-05-000004","0001255423-05-000003","0001255423-05-000002","0001157523-05-003904","9999999997-05-019451","0001047469-05-010202","0001157523-05-003324","0001104659-05-014162","0001157523-05-001786","0000919574-05-000342","0001157523-05-000107","0001255423-04-000032","0001255423-04-000031","0001104659-04-035542","0001157523-04-009553","0001157523-04-008510","0001255423-04-000027","0001255423-04-000025","0001255423-04-000024","0001255423-04-000023","0001255423-04-000022","0001255423-04-000021","0001255423-04-000019","0001104659-04-024103","0001157523-04-006661","0000919574-04-002011","0001047469-04-020901","0001157523-04-005352","0001157523-04-005160","0001255423-04-000017","0001255423-04-000015","0001255423-04-000014","0001255423-04-000013","0001255423-04-000012","0001255423-04-000011","0001255423-04-000010","0001255423-04-000009","0001255423-04-000007","0001157523-04-004531","0001104659-04-012418","0001157523-04-003564","9999999997-04-017425","0001047469-04-010270","0001157523-04-002307","0001104659-04-006151","0001255423-04-000004","0001157523-04-001785","0001157523-04-001040","0000890163-04-000047","0001157523-04-000052","0001157523-03-007311","0001104659-03-024558","0001157523-03-005699","0001104659-03-023374","0001157523-03-005508","0001047469-03-033535","0001047469-03-033483","0001047469-03-033480","0001047469-03-033306","0001047469-03-032306","0001047469-03-031806","0001255423-03-000054","0001047469-03-031050","0001255423-03-000052","0001255423-03-000051","0001255423-03-000048","0001255423-03-000046","0001255423-03-000045","0001255423-03-000041","0001255423-03-000040","0001255423-03-000039","0001255423-03-000038","0001047469-03-029505","0001255423-03-000032","0001255423-03-000031","0001255423-03-000030","0001255423-03-000029","0001255423-03-000028","0001255423-03-000027","0001255423-03-000019","0001255423-03-000017","0001255423-03-000015","0001255423-03-000013","0001157523-03-003881","0001255423-03-000011","0001255423-03-000009","0001255423-03-000007","0001255423-03-000005","0001157523-03-003212","0001047469-03-015626","0001157523-03-001259","9999999997-03-015858","0001047469-03-011657","0001104659-03-004332","0001132072-03-000016","0001104659-02-005156","0000912057-02-029640","0000912057-02-018850","9999999997-02-023509","0000315066-02-001513","0000912057-02-011064","0000912057-02-011040","0000912057-02-011007","0000912057-02-010667","0000912057-02-010076","0000912057-02-007219","0000315066-02-000712","0000912057-02-001319","0001132072-02-000009","0000922423-01-501143","0000912057-01-538081","0000912057-01-536481","0000912057-01-535817","0000912057-01-533871","0000922423-01-500759","0000912057-01-529985","0000912057-01-528698","0000912057-01-524235","0000912057-01-524058","0000912057-01-523195","0000912057-01-518711","0000912057-01-518221","0000912057-01-516691","0000912057-01-514764","0000912057-01-510705","0000912057-01-508330","0000912057-01-506663","0000912057-01-506537","0000912057-01-504517","0000912057-01-005910","0000912057-01-005628","0000922423-01-000126","0000912057-00-054988","0000912057-00-051592","0000912057-00-047826","0000912057-00-045800","0000919574-00-000806","0000912057-00-036733","0000912057-00-033411","0000912057-00-029683","0000919574-00-000583","0000912057-00-023315","0000912057-00-022980","0000912057-00-019352","0000919574-00-000499","0000912057-00-017886","0000912057-00-014145","0000912057-00-013402","0000912057-00-011005","0000912057-00-007764","0000950147-00-000193","0000922423-00-000253","0000912057-99-007981","0000922423-99-001324","0000912057-99-004471","0000912057-99-003875","0000912057-99-002729","0001047469-99-037507","0000919574-99-001030","0001047469-99-031788","0001047469-99-030581","0001047469-99-029628","0001047469-99-029582","0001047469-99-028911","0001047469-99-028765","0001047469-99-028519","0001047469-99-028482","0001047469-99-026752","0000950147-99-000726","0001047469-99-019318","0001047469-99-018465","0001047469-99-014089","0001047469-99-012916","0001047469-99-007511","0000950147-99-000111","0001047469-99-002636","0001047469-98-040667","0001047469-98-040459","0001047469-98-039245","0001047469-98-036842","0001047469-98-035048","0001047469-98-030949","0000950147-98-000584","0000950135-98-003771","0000950135-98-003272","0000950135-98-003143","0000921895-98-000382","0000950135-98-002237","0000950135-98-002217","0000950135-98-002001","0000950135-98-001605","0000950135-98-001526","0000950135-98-001468","0000950135-98-001465","0000950135-98-001405","0000950135-98-000484","0000950135-98-000431","0000950135-98-000367","0000950135-97-004549","0000950135-97-004321","0000950135-97-004237","0000950135-97-003695","0000950135-97-003576","0000950135-97-003459","0000950135-97-003240","0000950135-97-003084","0000950135-97-002926","0000950135-97-002837","0000950135-97-002641","0000950135-97-002636","0000950135-97-002522","0000950135-97-002337","0000950135-97-001407","0000950135-97-001366","0000927016-97-000350","0000912057-96-030141","0000950135-96-004705","0000912057-96-024895","0000950135-96-003965","0000950135-96-003393","0000950135-96-003263","0000950135-96-003262","0000950135-96-002489","0000950135-96-002273"],"filingDate":["2012-05-02","2009-04-06","2009-03-10","2009-03-10","2009-03-10","2009-03-10","2009-03-10","2009-03-10","2009-03-10","2009-03-10","2009-03-10","2009-03-10","2009-03-10","2009-03-10","2009-03-09","2009-03-09","2009-03-09","2009-03-09","2009-03-09","2009-03-06","2009-03-06","2009-03-06","2009-03-06","2009-03-06","2009-03-06","2009-03-06","2009-03-06","2009-03-06","2009-03-06","2009-03-06","2009-03-03","2009-02-23","2009-02-17","2009-02-02","2009-01-23","2009-01-21","2009-01-12","2008-12-23","2008-12-22","2008-12-16","2008-11-25","2008-11-12","2008-11-07","2008-11-05","2008-09-29","2008-09-11","2008-09-02","2008-08-29","2008-08-29","2008-08-25","2008-08-14","2008-08-11","2008-07-24","2008-07-11","2008-06-16","2008-06-04","2008-06-02","2008-05-28","2008-05-22","2008-05-16","2008-04-28","2008-04-22","2008-03-31","2008-02-27","2007-12-18","2007-12-12","2007-12-10","2007-11-14","2007-11-05","2007-10-24","2007-08-14","2007-07-25","2007-07-17","2007-06-21","2007-06-20","2007-06-08","2007-06-06","2007-05-25","2007-05-25","2007-05-24","2007-05-16","2007-05-15","2007-05-11","2007-05-11","2007-05-11","2007-05-11","2007-05-11","2007-05-11","2007-05-02","2007-04-30","2007-04-27","2007-04-19","2007-04-13","2007-04-10","2007-04-03","2007-03-28","2007-03-21","2007-03-12","2007-03-09","2007-03-01","2007-02-22","2007-02-21","2007-01-19","2007-01-19","2007-01-19","2007-01-19","2007-01-17","2006-12-19","2006-11-20","2006-11-16","2006-11-13","2006-10-31","2006-10-25","2006-10-02","2006-08-29","2006-08-22","2006-08-14","2006-07-26","2006-05-26","2006-05-22","2006-05-22","2006-05-22","2006-05-22","2006-05-22","2006-05-22","2006-05-15","2006-05-03","2006-04-21","2006-04-12","2006-03-30","2006-03-29","2006-03-13","2006-03-07","2006-03-07","2006-03-07","2006-02-28","2006-02-23","2006-02-09","2006-01-25","2006-01-18","2006-01-13","2006-01-03","2006-01-03","2005-12-02","2005-12-02","2005-12-01","2005-11-14","2005-10-26","2005-09-08","2005-08-01","2005-07-27","2005-07-22","2005-07-20","2005-07-08","2005-07-05","2005-06-23","2005-06-23","2005-06-20","2005-06-14","2005-06-10","2005-06-01","2005-05-31","2005-05-12","2005-05-12","2005-05-12","2005-05-12","2005-05-12","2005-05-12","2005-05-09","2005-05-05","2005-05-05","2005-05-05","2005-04-27","2005-04-15","2005-04-14","2005-04-14","2005-03-31","2005-02-23","2005-02-08","2005-01-06","2004-12-10","2004-12-10","2004-11-12","2004-10-20","2004-09-14","2004-08-27","2004-08-26","2004-08-26","2004-08-26","2004-08-26","2004-08-26","2004-08-26","2004-08-12","2004-07-22","2004-07-02","2004-06-17","2004-06-01","2004-05-25","2004-05-19","2004-05-17","2004-05-17","2004-05-17","2004-05-17","2004-05-17","2004-05-17","2004-05-17","2004-05-17","2004-05-06","2004-05-04","2004-04-21","2004-04-08","2004-03-31","2004-03-12","2004-03-02","2004-03-01","2004-02-25","2004-02-05","2004-02-03","2004-01-07","2003-12-15","2003-11-04","2003-10-22","2003-10-22","2003-10-17","2003-10-16","2003-10-16","2003-10-16","2003-10-14","2003-10-02","2003-09-26","2003-09-25","2003-09-18","2003-09-12","2003-09-12","2003-09-08","2003-09-08","2003-09-08","2003-09-04","2003-09-04","2003-09-04","2003-09-04","2003-09-02","2003-08-29","2003-08-29","2003-08-29","2003-08-29","2003-08-29","2003-08-29","2003-08-26","2003-08-25","2003-08-19","2003-08-11","2003-08-08","2003-07-31","2003-07-30","2003-07-29","2003-07-28","2003-07-23","2003-04-30","2003-04-23","2003-04-07","2003-04-02","2003-03-17","2003-02-10","2002-11-01","2002-08-02","2002-05-07","2002-04-16","2002-04-10","2002-03-22","2002-03-22","2002-03-22","2002-03-20","2002-03-15","2002-02-22","2002-02-14","2002-01-15","2002-01-07","2001-12-10","2001-11-07","2001-10-24","2001-10-18","2001-09-28","2001-09-10","2001-08-23","2001-08-14","2001-07-18","2001-07-17","2001-07-10","2001-06-06","2001-05-31","2001-05-18","2001-05-11","2001-04-26","2001-04-12","2001-04-03","2001-04-02","2001-03-21","2001-02-14","2001-02-14","2001-02-06","2000-12-28","2000-11-29","2000-11-08","2000-10-25","2000-09-27","2000-08-11","2000-07-27","2000-06-26","2000-05-16","2000-05-11","2000-05-10","2000-04-24","2000-04-14","2000-04-13","2000-03-29","2000-03-24","2000-03-10","2000-02-22","2000-02-14","2000-02-10","1999-12-02","1999-11-12","1999-11-10","1999-11-08","1999-10-29","1999-10-01","1999-09-21","1999-08-13","1999-08-10","1999-08-04","1999-08-03","1999-07-28","1999-07-27","1999-07-26","1999-07-23","1999-07-08","1999-07-08","1999-05-11","1999-05-06","1999-04-09","1999-03-31","1999-02-26","1999-02-16","1999-01-29","1998-11-13","1998-11-13","1998-11-05","1998-10-09","1998-09-21","1998-08-13","1998-08-05","1998-06-10","1998-05-14","1998-05-13","1998-05-05","1998-04-06","1998-04-03","1998-03-30","1998-03-17","1998-03-12","1998-03-10","1998-03-10","1998-03-06","1998-02-06","1998-02-04","1998-01-30","1997-11-13","1997-11-05","1997-10-24","1997-09-04","1997-08-19","1997-08-13","1997-08-06","1997-07-24","1997-07-07","1997-06-27","1997-06-09","1997-06-06","1997-05-23","1997-05-13","1997-03-28","1997-03-27","1997-02-13","1996-12-24","1996-11-07","1996-11-07","1996-09-12","1996-08-08","1996-07-31","1996-07-31","1996-06-05","1996-05-23"],"reportDate":["2012-04-30","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","2009-03-03","2009-02-17","2009-02-13","2009-01-30","","2009-01-21","","","2008-12-22","","2008-12-22","2008-12-01","","2008-10-30","2008-09-23","","","2008-06-30","2008-03-31","","2008-06-30","2008-08-11","2008-07-23","2008-03-31","2008-06-11","2008-05-29","2007-12-31","2007-12-31","2008-05-19","2008-03-31","2008-04-23","2008-04-16","2007-12-31","2008-02-27","2007-12-04","2007-12-10","2007-12-07","2007-09-30","2007-11-05","2007-10-24","2007-06-30","2007-07-25","2007-07-02","","","2007-06-07","2007-05-31","","","","2007-05-14","2007-03-31","2007-05-10","2007-05-10","2007-05-10","2007-05-10","2007-05-10","2007-05-10","2007-05-02","","","2006-12-31","","2007-04-10","2007-05-10","2006-12-31","2007-05-10","","","2007-02-20","2007-02-22","2007-02-16","2007-01-17","2007-01-17","2007-01-17","2007-01-19","2007-01-17","2006-12-19","2006-11-20","","2006-09-30","2006-10-31","2006-10-25","2006-10-02","2006-08-29","2006-08-17","2006-06-30","2006-07-26","","2006-05-11","2006-05-11","2006-05-11","2006-05-11","2006-05-11","2006-05-11","2006-03-31","2006-05-03","","2006-04-12","2006-05-11","2005-12-31","2006-03-13","2006-03-07","2006-03-07","2005-12-31","","2006-02-22","","","","","2005-12-28","","2005-11-30","2005-11-30","2005-12-01","2005-09-30","2005-10-26","2005-09-08","2005-06-30","2005-07-27","2005-07-20","2005-07-20","","","2005-06-23","2005-06-22","2005-06-17","2005-06-14","2005-06-10","2005-05-25","","2005-05-12","2005-05-12","2005-05-12","2005-05-12","2005-05-12","2005-05-12","2005-03-31","2005-05-02","2005-05-02","2005-05-02","2005-04-27","2004-12-31","2005-05-12","2005-04-13","2004-12-31","2005-02-23","","2005-01-06","2004-11-30","2004-12-08","2004-09-30","2004-10-20","2004-09-14","2003-08-26","2004-08-24","2004-08-24","2004-08-24","2004-08-24","2004-08-24","2004-08-24","2004-06-30","2004-07-21","","","2004-06-01","2004-05-25","2004-05-10","2004-05-13","2004-05-13","2004-05-13","2004-05-13","2004-05-13","2004-05-13","2004-05-13","2004-05-13","2004-05-05","2004-03-31","2004-04-21","2003-12-31","2004-05-13","2004-03-12","2003-12-31","2004-02-27","2004-02-25","2004-02-05","","2004-01-07","2003-12-15","2003-09-30","2003-10-22","2003-10-16","2003-10-17","","","","","","","2003-09-23","","2003-09-10","2003-09-10","2003-09-05","2003-09-04","2003-09-03","2003-09-01","2003-09-01","2003-09-01","2003-09-01","","2003-08-26","2003-08-26","2003-08-26","2003-08-26","2003-08-26","2003-08-26","2003-08-26","2003-08-20","2003-08-14","2003-08-11","2003-06-30","2003-07-31","2003-07-30","2003-07-29","2003-07-28","2003-07-23","2003-03-31","2003-04-23","2002-12-31","2003-05-08","2002-12-31","","2002-09-30","2002-06-30","2002-03-31","2001-12-31","","2002-03-22","","2002-05-09","2002-03-20","2001-12-31","2002-02-20","","2002-01-14","","","2001-09-30","2001-10-24","2001-10-17","2001-09-27","","2001-08-22","2001-06-30","2001-07-18","2001-07-16","2001-07-09","2001-06-05","2001-05-31","","2001-03-31","2001-04-26","2001-04-12","2001-05-03","2001-03-27","2000-12-31","2001-02-14","2001-02-13","","2000-12-28","2000-11-28","2000-09-30","2000-10-25","","2000-06-30","2000-07-25","2000-06-21","","2000-03-31","","2000-04-19","","2000-04-12","2000-05-04","1999-12-31","2000-05-04","2000-02-16","","","1999-11-30","","1999-11-08","1999-09-30","1999-10-27","1999-09-29","","1999-06-30","1999-08-06","1999-08-03","","","1999-07-27","","1999-07-23","","","1999-03-31","1999-05-04","1999-05-13","1998-12-31","1999-02-24","","1999-01-27","1998-11-12","1998-09-30","1998-11-04","1998-10-07","1998-09-14","1998-06-30","","1998-06-09","1998-03-31","1998-05-11","","1998-05-14","1998-04-02","1997-12-31","1998-03-16","1998-03-11","","1998-05-14","1998-03-05","","1998-02-03","","1997-09-30","1997-11-04","1997-10-24","1997-09-02","1997-08-15","1997-06-30","1997-07-30","1997-07-24","","1997-06-24","1997-06-06","1997-05-28","1997-05-31","1997-03-31","1996-12-31","1997-05-15","","","1996-09-30","","1996-05-22","1996-06-30","","","1996-05-22",""],"acceptanceDateTime":["2012-05-02T18:36:48.000Z","2009-04-06T21:13:50.000Z","2009-03-10T21:13:42.000Z","2009-03-10T21:13:22.000Z","2009-03-10T21:13:04.000Z","2009-03-10T21:12:44.000Z","2009-03-10T21:12:24.000Z","2009-03-10T21:11:04.000Z","2009-03-10T21:06:30.000Z","2009-03-10T21:04:18.000Z","2009-03-10T21:03:36.000Z","2009-03-10T21:02:53.000Z","2009-03-10T21:02:08.000Z","2009-03-10T21:00:52.000Z","2009-03-10T04:18:48.000Z","2009-03-10T04:18:47.000Z","2009-03-10T04:18:46.000Z","2009-03-10T04:18:05.000Z","2009-03-10T04:18:02.000Z","2009-03-06T22:27:08.000Z","2009-03-06T22:26:23.000Z","2009-03-06T22:25:44.000Z","2009-03-06T22:25:06.000Z","2009-03-06T22:24:21.000Z","2009-03-06T22:23:45.000Z","2009-03-06T22:23:04.000Z","2009-03-06T22:22:23.000Z","2009-03-06T22:21:43.000Z","2009-03-06T22:20:59.000Z","2009-03-06T22:19:32.000Z","2009-03-03T22:26:45.000Z","2009-02-23T20:19:03.000Z","2009-02-17T19:58:43.000Z","2009-02-02T14:46:11.000Z","2009-01-23T18:49:28.000Z","2009-01-21T17:55:23.000Z","2009-01-12T12:41:59.000Z","2008-12-23T19:08:19.000Z","2008-12-22T20:00:30.000Z","2008-12-16T16:17:27.000Z","2008-11-25T21:05:45.000Z","2008-11-12T12:21:08.000Z","2008-11-07T16:08:51.000Z","2008-11-05T21:02:52.000Z","2008-09-29T21:30:55.000Z","2008-09-11T22:01:22.000Z","2008-09-02T21:11:30.000Z","2008-08-29T20:04:20.000Z","2008-08-29T20:03:50.000Z","2008-08-25T18:12:44.000Z","2008-08-14T14:52:07.000Z","2008-08-11T20:05:43.000Z","2008-07-24T20:05:16.000Z","2008-07-11T20:01:07.000Z","2008-06-16T15:08:35.000Z","2008-06-04T16:05:30.000Z","2008-06-02T10:47:23.000Z","2008-05-28T10:02:01.000Z","2008-05-22T16:05:47.000Z","2008-05-15T21:42:49.000Z","2008-04-28T16:06:05.000Z","2008-04-22T18:41:16.000Z","2008-03-31T16:10:03.000Z","2008-02-27T18:00:39.000Z","2007-12-18T14:27:55.000Z","2007-12-12T21:05:22.000Z","2007-12-10T16:56:16.000Z","2007-11-13T23:10:03.000Z","2007-11-05T21:31:05.000Z","2007-10-24T20:46:23.000Z","2007-08-14T20:08:00.000Z","2007-07-25T21:08:21.000Z","2007-07-17T20:38:09.000Z","2007-06-21T20:01:34.000Z","2007-06-21T04:15:18.000Z","2007-06-08T20:55:50.000Z","2007-06-06T19:29:09.000Z","2007-05-25T20:07:35.000Z","2007-05-25T20:07:02.000Z","2007-05-24T19:55:58.000Z","2007-05-16T21:01:21.000Z","2007-05-15T20:01:48.000Z","2007-05-11T17:44:48.000Z","2007-05-11T17:44:05.000Z","2007-05-11T17:43:26.000Z","2007-05-11T17:42:37.000Z","2007-05-11T17:41:56.000Z","2007-05-11T17:40:28.000Z","2007-05-02T20:15:31.000Z","2007-04-30T14:49:36.000Z","2007-04-30T04:15:58.000Z","2007-04-23T20:45:26.000Z","2007-04-13T20:58:27.000Z","2007-04-10T21:25:18.000Z","2007-04-03T20:05:10.000Z","2007-03-28T00:12:24.000Z","2007-03-21T12:21:30.000Z","2007-03-12T19:48:13.000Z","2007-03-09T20:24:26.000Z","2007-03-01T19:21:37.000Z","2007-02-22T21:00:13.000Z","2007-02-20T22:34:25.000Z","2007-01-19T21:34:49.000Z","2007-01-19T21:33:55.000Z","2007-01-19T21:32:53.000Z","2007-01-19T21:29:51.000Z","2007-01-17T22:06:49.000Z","2006-12-19T20:14:26.000Z","2006-11-20T21:15:20.000Z","2006-11-16T19:43:03.000Z","2006-11-13T21:02:45.000Z","2006-10-31T21:19:28.000Z","2006-10-25T20:31:33.000Z","2006-10-02T18:46:28.000Z","2006-08-29T13:00:18.000Z","2006-08-22T20:40:11.000Z","2006-08-14T21:22:32.000Z","2006-07-26T20:01:29.000Z","2006-05-26T15:48:52.000Z","2006-05-22T20:55:11.000Z","2006-05-22T20:54:16.000Z","2006-05-22T20:53:27.000Z","2006-05-22T20:52:39.000Z","2006-05-22T20:51:46.000Z","2006-05-22T20:50:53.000Z","2006-05-15T20:19:17.000Z","2006-05-03T20:47:07.000Z","2006-04-21T13:53:41.000Z","2006-04-12T15:20:25.000Z","2006-03-30T18:32:00.000Z","2006-03-29T21:13:31.000Z","2006-03-13T16:16:23.000Z","2006-03-07T21:17:11.000Z","2006-03-07T21:16:07.000Z","2006-03-07T14:35:41.000Z","2006-02-28T22:09:02.000Z","2006-02-23T13:35:58.000Z","2006-02-09T21:35:51.000Z","2006-01-25T15:08:22.000Z","2006-01-18T21:48:32.000Z","2006-01-13T14:54:21.000Z","2006-01-03T20:21:09.000Z","2006-01-03T16:25:34.000Z","2005-12-02T14:33:14.000Z","2005-12-02T14:26:27.000Z","2005-12-01T21:32:44.000Z","2005-11-14T21:17:34.000Z","2005-10-26T20:15:19.000Z","2005-09-08T17:07:26.000Z","2005-08-01T19:44:33.000Z","2005-07-27T19:36:10.000Z","2005-07-22T20:01:06.000Z","2005-07-20T20:21:20.000Z","2005-07-08T13:53:24.000Z","2005-07-05T20:42:51.000Z","2005-06-23T19:11:58.000Z","2005-06-23T13:40:34.000Z","2005-06-20T16:50:57.000Z","2005-06-14T20:33:03.000Z","2005-06-10T14:49:51.000Z","2005-06-01T20:04:21.000Z","2005-05-31T20:06:30.000Z","2005-05-12T20:14:17.000Z","2005-05-12T20:13:15.000Z","2005-05-12T20:12:06.000Z","2005-05-12T20:10:33.000Z","2005-05-12T20:08:04.000Z","2005-05-12T20:06:37.000Z","2005-05-09T20:31:52.000Z","2005-05-05T21:25:10.000Z","2005-05-05T21:20:16.000Z","2005-05-05T21:17:08.000Z","2005-04-27T20:19:53.000Z","2005-04-20T14:12:12.000Z","2005-04-14T20:29:50.000Z","2005-04-14T12:34:25.000Z","2005-03-31T17:30:10.000Z","2005-02-23T21:42:51.000Z","2005-02-08T17:00:28.000Z","2005-01-06T18:09:16.000Z","2004-12-10T22:12:19.000Z","2004-12-10T22:08:24.000Z","2004-11-12T19:54:25.000Z","2004-10-20T21:22:19.000Z","2004-09-14T18:38:10.000Z","2004-08-27T19:56:21.000Z","2004-08-26T20:24:07.000Z","2004-08-26T20:20:12.000Z","2004-08-26T20:19:20.000Z","2004-08-26T20:18:40.000Z","2004-08-26T20:17:55.000Z","2004-08-26T20:15:53.000Z","2004-08-12T19:43:24.000Z","2004-07-22T12:05:25.000Z","2004-07-02T16:48:28.000Z","2004-06-17T18:16:56.000Z","2004-06-01T21:09:24.000Z","2004-05-25T15:00:44.000Z","2004-05-19T20:14:57.000Z","2004-05-17T20:53:07.000Z","2004-05-17T20:34:12.000Z","2004-05-17T20:25:13.000Z","2004-05-17T20:11:13.000Z","2004-05-17T19:54:21.000Z","2004-05-17T19:41:39.000Z","2004-05-17T19:29:32.000Z","2004-05-17T18:59:56.000Z","2004-05-06T20:04:53.000Z","2004-05-04T17:58:48.000Z","2004-04-21T20:14:19.000Z","2004-04-09T13:32:15.000Z","2004-03-31T21:52:52.000Z","2004-03-12T21:03:58.000Z","2004-03-02T15:10:06.000Z","2004-03-01T19:33:26.000Z","2004-02-25T21:01:40.000Z","2004-02-05T17:03:09.000Z","2004-02-03T21:21:08.000Z","2004-01-07T14:42:11.000Z","2003-12-15T21:38:17.000Z","2003-11-04T15:09:21.000Z","2003-10-22T20:00:52.000Z","2003-10-22T13:50:11.000Z","2003-10-17T17:27:03.000Z","2003-10-16T21:27:10.000Z","2003-10-16T17:10:43.000Z","2003-10-16T16:27:46.000Z","2003-10-14T21:25:00.000Z","2003-10-02T18:09:41.000Z","2003-09-26T16:16:12.000Z","2003-09-25T21:17:25.000Z","2003-09-18T16:38:26.000Z","2003-09-12T20:20:29.000Z","2003-09-12T20:19:54.000Z","2003-09-08T21:41:41.000Z","2003-09-08T21:04:09.000Z","2003-09-08T21:03:01.000Z","2003-09-04T21:29:37.000Z","2003-09-04T21:29:07.000Z","2003-09-04T21:28:08.000Z","2003-09-04T21:27:37.000Z","2003-09-02T21:11:39.000Z","2003-08-29T19:04:40.000Z","2003-08-29T19:04:11.000Z","2003-08-29T19:03:41.000Z","2003-08-29T19:03:07.000Z","2003-08-29T19:02:40.000Z","2003-08-29T19:01:58.000Z","2003-08-26T21:29:19.000Z","2003-08-25T20:32:13.000Z","2003-08-19T20:29:39.000Z","2003-08-11T19:20:56.000Z","2003-08-08T19:38:41.000Z","2003-07-31T20:31:06.000Z","2003-07-30T14:33:23.000Z","2003-07-29T19:32:28.000Z","2003-07-28T20:10:05.000Z","2003-07-23T20:06:31.000Z","2003-04-30T19:17:37.000Z","2003-04-23T20:00:04.000Z","2003-04-08T15:35:57.000Z","2003-04-02T19:45:10.000Z","2003-03-17T14:54:42.000Z","2003-02-10T22:22:09.000Z","2002-11-01T19:21:19.000Z","2002-08-02T18:06:43.000Z","2002-05-07T13:59:43.000Z","2002-04-16T04:00:00.000Z","2002-04-10T04:00:00.000Z","2002-03-22T05:00:00.000Z","2002-03-22T05:00:00.000Z","2002-03-22T05:00:00.000Z","2002-03-20T05:00:00.000Z","2002-03-15T05:00:00.000Z","2002-02-22T05:00:00.000Z","2002-02-14T05:00:00.000Z","2002-01-15T05:00:00.000Z","2002-01-07T05:00:00.000Z","2001-12-10T05:00:00.000Z","2001-11-07T05:00:00.000Z","2001-10-24T04:00:00.000Z","2001-10-18T04:00:00.000Z","2001-09-28T04:00:00.000Z","2001-09-10T04:00:00.000Z","2001-08-23T04:00:00.000Z","2001-08-14T04:00:00.000Z","2001-07-18T04:00:00.000Z","2001-07-17T04:00:00.000Z","2001-07-10T04:00:00.000Z","2001-06-06T04:00:00.000Z","2001-05-31T04:00:00.000Z","2001-05-18T04:00:00.000Z","2001-05-11T04:00:00.000Z","2001-04-26T04:00:00.000Z","2001-04-12T04:00:00.000Z","2001-04-03T04:00:00.000Z","2001-04-02T04:00:00.000Z","2001-03-21T05:00:00.000Z","2001-02-14T05:00:00.000Z","2001-02-14T05:00:00.000Z","2001-02-06T05:00:00.000Z","2000-12-28T05:00:00.000Z","2000-11-29T05:00:00.000Z","2000-11-08T05:00:00.000Z","2000-10-25T04:00:00.000Z","2000-09-27T04:00:00.000Z","2000-08-11T04:00:00.000Z","2000-07-27T04:00:00.000Z","2000-06-26T04:00:00.000Z","2000-05-16T04:00:00.000Z","2000-05-11T04:00:00.000Z","2000-05-10T04:00:00.000Z","2000-04-24T04:00:00.000Z","2000-04-14T04:00:00.000Z","2000-04-13T04:00:00.000Z","2000-03-29T05:00:00.000Z","2000-03-24T05:00:00.000Z","2000-03-10T05:00:00.000Z","2000-02-22T05:00:00.000Z","2000-02-14T05:00:00.000Z","2000-02-10T05:00:00.000Z","1999-12-02T05:00:00.000Z","1999-11-12T05:00:00.000Z","1999-11-10T05:00:00.000Z","1999-11-08T05:00:00.000Z","1999-10-29T04:00:00.000Z","1999-10-01T04:00:00.000Z","1999-09-21T04:00:00.000Z","1999-08-13T04:00:00.000Z","1999-08-10T04:00:00.000Z","1999-08-04T04:00:00.000Z","1999-08-03T04:00:00.000Z","1999-07-28T04:00:00.000Z","1999-07-27T04:00:00.000Z","1999-07-26T04:00:00.000Z","1999-07-23T04:00:00.000Z","1999-07-08T04:00:00.000Z","1999-07-08T04:00:00.000Z","1999-05-11T04:00:00.000Z","1999-05-06T04:00:00.000Z","1999-04-09T04:00:00.000Z","1999-03-31T05:00:00.000Z","1999-02-26T05:00:00.000Z","1999-02-16T05:00:00.000Z","1999-01-29T05:00:00.000Z","1998-11-13T05:00:00.000Z","1998-11-13T05:00:00.000Z","1998-11-05T05:00:00.000Z","1998-10-09T04:00:00.000Z","1998-09-21T04:00:00.000Z","1998-08-13T04:00:00.000Z","1998-08-05T04:00:00.000Z","1998-06-10T04:00:00.000Z","1998-05-14T04:00:00.000Z","1998-05-13T04:00:00.000Z","1998-05-05T04:00:00.000Z","1998-04-06T04:00:00.000Z","1998-04-03T05:00:00.000Z","1998-03-30T05:00:00.000Z","1998-03-17T05:00:00.000Z","1998-03-12T05:00:00.000Z","1998-03-10T05:00:00.000Z","1998-03-10T05:00:00.000Z","1998-03-06T05:00:00.000Z","1998-02-06T05:00:00.000Z","1998-02-04T05:00:00.000Z","1998-01-30T05:00:00.000Z","1997-11-13T05:00:00.000Z","1997-11-05T05:00:00.000Z","1997-10-24T04:00:00.000Z","1997-09-04T04:00:00.000Z","1997-08-19T04:00:00.000Z","1997-08-13T04:00:00.000Z","1997-08-06T04:00:00.000Z","1997-07-24T04:00:00.000Z","1997-07-07T04:00:00.000Z","1997-06-27T04:00:00.000Z","1997-06-09T04:00:00.000Z","1997-06-06T04:00:00.000Z","1997-05-23T04:00:00.000Z","1997-05-13T04:00:00.000Z","1997-03-28T05:00:00.000Z","1997-03-27T05:00:00.000Z","1997-02-13T05:00:00.000Z","1996-12-24T05:00:00.000Z","1996-11-07T05:00:00.000Z","1996-11-07T05:00:00.000Z","1996-09-12T04:00:00.000Z","1996-08-08T04:00:00.000Z","1996-07-31T04:00:00.000Z","1996-07-31T04:00:00.000Z","1996-06-05T04:00:00.000Z","1996-05-23T04:00:00.000Z"],"act":["34","34","33","33","33","33","33","33","NE","NE","NE","NE","NE","NE","33","33","33","33","33","33","33","33","33","33","33","33","33","33","33","33","34","34","34","34","34","34","34","34","34","34","34","34","34","34","34","","","34","34","","34","34","34","34","34","34","34","34","34","34","34","34","34","34","34","34","34","34","34","34","34","34","","33","33","","","33","33","34","","34","","","","","","","34","33","33","34","33","34","34","34","34","34","34","","34","34","","","","34","34","34","34","34","34","","34","34","34","34","34","34","33","","","","","","","34","34","34","34","34","34","34","","","","34","34","34","34","34","34","","34","","","34","34","34","","34","","","34","","","","","","","","","33","","","","","","","34","","","","34","34","34","34","34","34","34","34","","","34","34","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","",""],"form":["8-K","15-12G","S-8 POS","S-8 POS","S-8 POS","S-8 POS","S-8 POS","S-8 POS","AW","AW","AW","AW","AW","AW","EFFECT","EFFECT","EFFECT","EFFECT","EFFECT","POS AM","POS AM","POS AM","POS AM","POS AM","POS AM","POS AM","POS AM","POS AM","POS AM","POS AM","8-K","8-K","8-K","8-K","DEFA14A","8-K","DEFA14A","DEFA14A","8-K","CT ORDER","DEF 14A","PRE 14A","25-NSE","8-K","8-K","UPLOAD","CORRESP","10-Q/A","10-Q/A","UPLOAD","10-Q","8-K","8-K","10-Q","8-K","8-K","10-K/A","10-K","8-K","NT 10-Q","8-K","8-K","NT 10-K","8-K","8-K/A","8-K","8-K","10-Q","8-K","8-K","10-Q","8-K","4","424B3","EFFECT","4","4","S-8","S-3","SC 13D","4","10-Q","4","4","4","4","4","4","8-K","424B3","EFFECT","ARS","S-3","8-K","DEF 14A","10-K","PRE 14A","SC 13G","SC 13G","3","8-K","8-K","4","4","4","8-K","8-K","8-K","8-K","SC 13G/A","10-Q","4","8-K","8-K","8-K","8-K","10-Q","8-K","S-8 POS","4","4","4","4","4","4","10-Q","8-K","SC 13G/A","8-K","DEF 14A","10-K","8-K","4","4","5","SC 13G/A","8-K","SC 13G/A","SC 13G/A","SC 13G/A","SC 13G/A","4","SC 13G","4","4","8-K","10-Q","8-K","4","10-Q","4","4","8-K","CORRESP","UPLOAD","4","4","4","4","4","3","S-8 POS","4","4","4","4","4","4","10-Q","4","4","4","8-K","ARS","DEF 14A","8-K","10-K","8-K","SC 13G/A","8-K","4","4","10-Q","8-K","8-K","3/A","4","4","4","4","4","4","10-Q","8-K","SC 13G","S-8","8-K","8-K","3","4","4/A","4","4","4","4","4","4","8-K","10-Q","8-K","ARS","DEF 14A","8-K","10-K","4","8-K","8-K","SC 13G/A","8-K","8-K","10-Q","8-K","8-K","8-K","424B5","424B5","424B1","424B1","S-3/A","S-3/A","4","S-3/A","4","4","4","4","4","4","4","4","4","S-3","4","4","4","4","4","4","3","4","4","4","10-Q","4","4","4","4","8-K","10-Q","8-K","ARS","DEF 14A","10-K","SC 13G/A","10-Q","10-Q","10-Q","ARS","SC 13G/A","8-K","424B5","DEF 14A","8-K","10-K","8-K","SC 13G","8-K","SC 13G","SC 13G/A","10-Q","8-K","8-K","8-K","SC 13G/A","8-K","10-Q","8-K","8-K","8-K","8-K","8-K","S-8","10-Q","8-K","8-K","DEF 14A","8-K","10-K","8-K","8-K","SC 13G","8-K","8-K","10-Q","8-K","SC 13G/A","10-Q","8-K","8-K","SC 13G","10-Q","S-8","8-K","SC 13G/A","8-K","DEF 14A","10-K","PRE 14A","8-K","SC 13G/A","SC 13G","8-K","SC 13G","8-K","10-Q","8-K","8-K","SC 13G","10-Q","8-K","8-K","424B5","424B5","8-K","S-3/A","8-K","S-3","SC 13G/A","10-Q","8-K","DEF 14A","10-K405","8-K","SC 13G/A","8-K","8-K","10-Q","8-K","8-K","8-K","10-Q","SC 13G","8-K","10-Q","8-K","SC 13D/A","DEF 14A","8-K","10-K405","8-K","8-K","424B3","PRE 14A","8-K","POS AM","8-K","S-8","10-Q","8-K","8-K","8-K","8-K","10-Q","8-K","8-K","424B3","8-K","8-K","8-K","8-K","10-Q","10-K","DEF 14A","SC 13G/A","SC 13D/A","10-Q","SC 13D","8-K/A","10-Q","S-8","S-3","8-K","POS AM"],"fileNumber":["000-23150","000-23150","333-143290","333-116568","333-61184","333-45247","333-36706","333-09239","333-143290","333-116568","333-61184","333-45247","333-36706","333-09239","333-09237","333-108438","333-82497","333-142115","333-143288","333-143290","333-143288","333-142115","333-116568","333-108438","333-82497","333-61184","333-45247","333-36706","333-09239","333-09237","000-23150","000-23150","000-23150","000-23150","000-23150","000-23150","000-23150","000-23150","000-23150","000-23150","000-23150","000-23150","000-23150","000-23150","000-23150","","","000-23150","000-23150","","000-23150","000-23150","000-23150","000-23150","000-23150","000-23150","000-23150","000-23150","000-23150","000-23150","000-23150","000-23150","000-23150","000-23150","000-23150","000-23150","000-23150","000-23150","000-23150","000-23150","000-23150","000-23150","","333-143288","333-143288","","","333-143290","333-143288","005-47263","","000-23150","","","","","","","000-23150","333-142115","333-142115","000-23150","333-142115","000-23150","000-23150","000-23150","000-23150","005-47263","005-47263","","000-23150","000-23150","","","","000-23150","000-23150","000-23150","000-23150","005-47263","000-23150","","000-23150","000-23150","000-23150","000-23150","000-23150","000-23150","333-45247","","","","","","","000-23150","000-23150","005-47263","000-23150","000-23150","000-23150","000-23150","","","","005-47263","000-23150","005-47263","005-47263","005-47263","005-47263","","005-47263","","","000-23150","000-23150","000-23150","","000-23150","","","000-23150","","","","","","","","","333-36706","","","","","","","000-23150","","","","000-23150","000-23150","000-23150","000-23150","000-23150","000-23150","005-47263","000-23150","","","000-23150","000-23150","000-23150","","","","","","","","000-23150","000-23150","005-47263","333-116568","000-23150","000-23150","","","","","","","","","","000-23150","000-23150","000-23150","000-23150","000-23150","000-23150","000-23150","","000-23150","000-23150","005-47263","000-23150","000-23150","000-23150","000-23150","000-23150","000-23150","333-108438","333-108438","333-108438","333-108438","333-108438","333-108438","","333-108438","","","","","","","","","","333-108438","","","","","","","","","","","000-23150","","","","","000-23150","000-23150","000-23150","000-23150","000-23150","000-23150","005-47428","000-23150","000-23150","000-23150","000-23150","005-47428","000-23150","333-82497","000-23150","000-23150","000-23150","000-23150","005-47428","000-23150","005-47263","005-47263","000-23150","000-23150","000-23150","000-23150","005-47263","000-23150","000-23150","000-23150","000-23150","000-23150","000-23150","000-23150","333-61184","000-23150","000-23150","000-23150","000-23150","000-23150","000-23150","000-23150","000-23150","005-47263","000-23150","000-23150","000-23150","000-23150","005-47263","000-23150","000-23150","000-23150","005-47263","000-23150","333-36706","000-23150","005-47263","000-23150","000-23150","000-23150","000-23150","000-23150","005-47263","005-47263","000-23150","005-47263","000-23150","000-23150","000-23150","000-23150","005-47263","000-23150","000-23150","000-23150","333-82497","333-82497","000-23150","333-82497","000-23150","333-82497","005-47263","000-23150","000-23150","000-23150","000-23150","000-23150","005-47263","000-23150","000-23150","000-23150","000-23150","000-23150","000-23150","000-23150","005-47263","000-23150","000-23150","000-23150","005-47263","000-23150","000-23150","000-23150","000-23150","000-23150","033-78440","000-23150","000-23150","033-78440","000-23150","333-45247","000-23150","000-23150","000-23150","000-23150","000-23150","000-23150","000-23150","000-23150","033-78440","000-23150","000-23150","000-23150","000-23150","000-23150","000-23150","000-23150","005-47263","005-47263","000-23150","005-47263","000-23150","000-23150","333-09239","333-09237","000-23150","033-78440"],"filmNumber":["12804427","09735717","09670366","09670363","09670362","09670359","09670356","09670347","09670321","09670298","09670279","09670259","09670253","09670244","09667695","09667697","09667696","09667686","09667687","09664120","09664111","09664099","09664084","09664070","09664055","09664037","09664024","09664013","09663993","09663970","09652776","09627882","09611110","09560132","09541533","09536301","09520253","081266759","081263616","081251502","081213922","081178088","","081163804","081095636","","","081049220","081049216","","081016091","081006286","08968324","08949101","08899694","08879651","08872312","08862285","08853858","08839689","08779973","08769051","08722591","08645585","071311693","071301897","071294594","071240045","071214447","071188550","071055216","07999925","","07933926","07932515","","","07880827","07880819","07876980","","07853160","","","","","","","07810884","07798317","07797718","07051193","07766420","07759620","07744381","07722567","07707824","07687614","07684272","","07642274","07636636","","","","07541144","07535684","061286335","061230057","061222734","061208971","","061163183","061120200","061060407","061049085","061032174","06981667","06869418","","","","","","","06841385","06804506","06771395","06755070","06722090","06719013","06681170","","","","06651997","06637686","06593505","06548164","06535988","06528442","","06500660","","","051238032","051201761","051157286","","05988279","","","05964073","","","","","","","","","05867485","","","","","","","05812194","","","","05776671","05050847","05751139","05749464","05717933","05634777","05582758","05515107","","","041138577","041088052","041029411","","","","","","","","04970338","04925501","04898510","04868502","04842044","04828864","","","","","","","","","","04785302","04776839","04745690","04025560","04706586","04666219","04641220","","04627748","04569151","04563270","04511789","031054991","03974701","03951986","03950949","03945446","03944475","03943380","03943321","03940311","03923459","03911587","","03900950","","","","","","","","","","03876900","","","","","","","","","","","03831832","","","","","03798423","03672654","03660148","03019893","03636415","03605124","03548043","02806508","02718235","02635883","02030993","02606501","02582175","02582031","02581872","02579675","02575883","02555699","02543485","2509138","2503053","1810214","1777503","1765239","1761250","1748146","1734035","1721709","1713147","1683530","1682640","1677241","1654720","1651951","1642960","1630826","1611849","1601120","1592750","1592061","1573263","1546251","1542954","1525920","797348","779964","755655","745247","730046","695273","679988","660488","638196","626071","624903","607273","602429","600352","581779","577978","566725","549897","537964","531380","99767655","99746545","99745875","99743035","99737028","99721661","99714472","99687881","99682267","99677191","99676859","99672202","99671271","99669809","99669659","99661099","99660878","99616981","99612206","99590106","99582491","99551127","99538865","99516176","98747612","98746284","98738218","98723128","98712448","98684738","98677908","98645896","98620008","98617332","98610507","98588255","98587140","98578325","98567374","98564667","98561593","98561466","98559161","98523006","98521050","98517394","97716916","97708351","97700341","97675042","97666214","97659726","97652020","97644814","97636693","97630932","97620672","97620456","97613773","97601930","97566656","97564488","97529371","96685943","96655667","96655603","96629019","96605702","96601517","96601499","96576905","96571618"],"items":["8.01","","","","","","","","","","","","","","POS AM,0001072613-09-000488,2009-03-09","POS AM,0001072613-09-000494,2009-03-09","POS AM,0001072613-09-000493,2009-03-09","POS AM,0001072613-09-000496,2009-03-09","POS AM,0001072613-09-000497,2009-03-09","","","","","","","","","","","","8.01,9.01","1.01,5.02,9.01","3.03,5.03,9.01","8.01,9.01","","8.01,9.01","","","8.01,9.01","20081216,20081216","","","","1.01,9.01","4.01,9.01","","","","","","","3.01,9.01","3.01,9.01","","3.01,9.01","3.01,9.01","","","3.01,9.01","","3.01,9.01","3.01,9.01","","8.01,9.01","5.02,9.01","3.01,9.01","5.02,9.01","","8.01,9.01","2.02,9.01","","2.02,9.01","","","S-3,,2007-06-20 16:00:00","","","","","","","","","","","","","","2.02,9.01","","S-3,,2007-04-27 16:00:00","","","8.01,9.01","","","","","","","2.02,9.01","1.01,3.02,9.01","","","","5.02","2.02,9.01","8.01,9.01","5.02,9.01","","","","2.02,9.01","8.01,9.01","8.01,9.01","1.01,9.01","","2.02,9.01","","","","","","","","","2.02,9.01","","1.01,9.01","","","8.01,9.01","","","","","2.02,9.01","","","","","","","","","8.01,9.01","","2.02,8.01,9.01","","","","","2.02,5.02,9.01","","","","","","","","","","","","","","","","","","","","2.02,9.01","","","5.02,9.01","","2.02,9.01","","8.01,9.01","","","","2.02,9.01","8.01","","","","","","","","","12,5","","","5","5","","","","","","","","","","9","","12,7,9","","","5,7","","","12,9","5,7","","7,9","7,9","","12,7,9","5,7","5,7","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","7,9","","7,9","","","","","","","","","","5,7","","","5,7","","5,7","","5,7","","","","5,7","5,7","5,7","","5,7","","5,7","5,7","5,7","5,7","5,7","","","5,7","5,7","","5,7","","5,7","5,7","","5,7","5,7","","5,7","","","5,7","5,7","","","","5,7","","5,7","","","","5,7","","","5,7","","5,7","","5,7","5,7","","","5,7","5,7","","","5,7","","5,7","","","","5,7","","","5,7","","5,7","5,7","","5,7","5,7","5,7","","","5,7","","5,7","","","5,7","","5,7","5,7","","","5,7","","5,7","","","5,7","5,7","5,7","5,7","","5,7","5,7","","5,7","5,7","5,7","5,7","","","","","","","","5,7","","","","5,7",""],"core_type":["8-K","15-12G","S-8 POS","S-8 POS","S-8 POS","S-8 POS","S-8 POS","S-8 POS","AW","AW","AW","AW","AW","AW","EFFECT","EFFECT","EFFECT","EFFECT","EFFECT","POS AM","POS AM","POS AM","POS AM","POS AM","POS AM","POS AM","POS AM","POS AM","POS AM","POS AM","8-K","8-K","8-K","8-K","DEFA14A","8-K","DEFA14A","DEFA14A","8-K","CT ORDER","DEF 14A","PRE 14A","25-NSE","8-K","8-K","LETTER","CORRESP","10-Q/A","10-Q/A","LETTER","10-Q","8-K","8-K","10-Q","8-K","8-K","10-K/A","10-K","8-K","NT 10-Q","8-K","8-K","NT 10-K","8-K","8-K/A","8-K","8-K","10-Q","8-K","8-K","10-Q","8-K","4","424B3","EFFECT","4","4","S-8","S-3","SC 13D","4","10-Q","4","4","4","4","4","4","8-K","424B3","EFFECT","ARS","S-3","8-K","DEF 14A","10-K","PRE 14A","SC 13G","SC 13G","3","8-K","8-K","4","4","4","8-K","8-K","8-K","8-K","SC 13G/A","10-Q","4","8-K","8-K","8-K","8-K","10-Q","8-K","S-8 POS","4","4","4","4","4","4","10-Q","8-K","SC 13G/A","8-K","DEF 14A","10-K","8-K","4","4","5","SC 13G/A","8-K","SC 13G/A","SC 13G/A","SC 13G/A","SC 13G/A","4","SC 13G","4","4","8-K","10-Q","8-K","4","10-Q","4","4","8-K","CORRESP","LETTER","4","4","4","4","4","3","S-8 POS","4","4","4","4","4","4","10-Q","4","4","4","8-K","ARS","DEF 14A","8-K","10-K","8-K","SC 13G/A","8-K","4","4","10-Q","8-K","8-K","3/A","4","4","4","4","4","4","10-Q","8-K","SC 13G","S-8","8-K","8-K","3","4","4/A","4","4","4","4","4","4","8-K","10-Q","8-K","ARS","DEF 14A","8-K","10-K","4","8-K","8-K","SC 13G/A","8-K","8-K","10-Q","8-K","8-K","8-K","424B5","424B5","424B1","424B1","S-3/A","S-3/A","4","S-3/A","4","4","4","4","4","4","4","4","4","S-3","4","4","4","4","4","4","3","4","4","4","10-Q","4","4","4","4","8-K","10-Q","8-K","ARS","DEF 14A","10-K","SC 13G/A","10-Q","10-Q","10-Q","ARS","SC 13G/A","8-K","424B5","DEF 14A","8-K","10-K","8-K","SC 13G","8-K","SC 13G","SC 13G/A","10-Q","8-K","8-K","8-K","SC 13G/A","8-K","10-Q","8-K","8-K","8-K","8-K","8-K","S-8","10-Q","8-K","8-K","DEF 14A","8-K","10-K","8-K","8-K","SC 13G","8-K","8-K","10-Q","8-K","SC 13G/A","10-Q","8-K","8-K","SC 13G","10-Q","S-8","8-K","SC 13G/A","8-K","DEF 14A","10-K","PRE 14A","8-K","SC 13G/A","SC 13G","8-K","SC 13G","8-K","10-Q","8-K","8-K","SC 13G","10-Q","8-K","8-K","424B5","424B5","8-K","S-3/A","8-K","S-3","SC 13G/A","10-Q","8-K","DEF 14A","10-K405","8-K","SC 13G/A","8-K","8-K","10-Q","8-K","8-K","8-K","10-Q","SC 13G","8-K","10-Q","8-K","SC 13D/A","DEF 14A","8-K","10-K405","8-K","8-K","424B3","PRE 14A","8-K","POS AM","8-K","S-8","10-Q","8-K","8-K","8-K","8-K","10-Q","8-K","8-K","424B3","8-K","8-K","8-K","8-K","10-Q","10-K","DEF 14A","SC 13G/A","SC 13D/A","10-Q","SC 13D","8-K/A","10-Q","S-8","S-3","8-K","POS AM"],"size":[26124,23670,35484,33277,35004,33890,33148,33243,41492,41492,41491,41491,41491,41491,2079,2081,2079,2081,2081,35451,35996,35940,33244,34936,35133,34971,33857,33115,33210,35509,38821,89052,93343,30218,37455,32869,38292,38306,15652,15842,280677,279897,4463,182667,45164,41206,29537,63086,63225,62264,749513,26837,26398,636423,26075,29971,117030,2141370,28136,58368,34237,30059,64468,20513,12177,12596,12097,764952,6602,17194,869473,17572,5575,182911,2068,10598,4910,117953,492372,11317,8794,598925,5602,5536,5585,5609,5594,5534,17257,167566,2068,1704,293266,10466,800731,1600048,649502,11186,10849,6628,20039,221153,5602,5665,5591,5578,14369,10988,11604,19546,816511,16489,19662,9540,12576,28049,812422,19051,105721,5521,5570,5613,5579,5520,5587,664284,19576,19659,62676,837987,1610880,14718,5688,5666,4831,8479,21767,8457,8457,8457,8460,7895,8448,4989,4921,10788,668312,29848,4728,627941,4729,5631,29950,31509,7973,4733,4667,4760,4760,8693,7739,101914,9522,9464,9543,9564,9531,9481,513265,9558,9576,9549,20185,1704,264552,10085,1740359,22596,13530,13142,4989,6483,687568,19242,11142,8988,5623,5690,5747,5735,5635,5630,597840,27816,13605,95569,7149,10036,4814,5739,5898,5749,5685,5730,5873,5681,5681,7146,455049,16130,1675,227609,9530,1427837,4808,18598,11401,14865,7771,10931,574903,14985,53014,103221,196999,298363,298398,241277,144950,145772,6675,205273,4116,7445,18613,4924,6204,4607,4496,4482,4490,162175,4553,4657,4541,4667,4541,4548,7770,9360,3976,4921,88746,6141,6141,7908,4783,14947,165044,14325,1675,176346,1670689,13990,504988,67677,53960,1640,8434,94561,72456,67151,18176,213070,17133,9719,9647,13822,10889,136477,17412,12533,9031,11236,8704,70403,16850,10212,8051,10198,8737,68468,54957,17184,9140,131771,9427,356320,17857,12873,11406,10297,11126,100378,17867,8315,175106,16426,10103,7815,55922,50681,15977,7960,13789,106398,243923,106551,16803,10435,11103,9766,10543,9959,69872,16468,8838,7796,68630,6515,89377,99037,99514,8119,140707,17278,78751,10711,63421,16636,65201,174278,15317,10704,9790,11693,76289,17347,15915,9843,164660,10576,10196,48589,13354,49500,126542,9717,231156,9677,12610,72157,126341,18648,120127,12699,71340,62116,10067,11897,7537,7400,61648,13507,15051,3039,12212,8323,8897,10474,64024,166241,52809,8595,49203,51928,43210,86476,111333,25650,92449,87557,100507],"isXBRL":[0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0],"isInlineXBRL":[0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0],"isXBRLNumeric":[null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null],"primaryDocument":["form8-k_17324.htm","form15_16354.htm","posam333-143290_16342.htm","posam333-116568_16342.htm","posam333-61184_16342.htm","posam333-45247_16342.htm","posam333-36706_16342.htm","posam333-09239_16342.htm","wd-request_16342.htm","wd-request_16342.htm","wd-request_16342.htm","wd-request_16342.htm","wd-request_16342.htm","wd-request_16342.htm","xslEFFECTX01/primary_doc.xml","xslEFFECTX01/primary_doc.xml","xslEFFECTX01/primary_doc.xml","xslEFFECTX01/primary_doc.xml","xslEFFECTX01/primary_doc.xml","posam333-143290_16342.htm","posam333-143288_16342.htm","posam333-142115_16342.htm","posam333-116568_16342.htm","posam333-108438_16342.htm","posam333-82497_16342.htm","posam333-61184_16342.htm","posam333-45247_16342.htm","posam333-36706_16342.htm","posam333-09239_16342.htm","posam333-09237_16342.htm","form8-k_16338.htm","a09-6056_18k.htm","a09-5798_18k.htm","a09-4366_18k.htm","a09-3730_1defa14a.htm","a09-3605_18k.htm","a09-2839_1defa14a.htm","a08-31054_1defa14a.htm","a5859555.htm","filename1.pdf","a2189341zdef14a.htm","a2189066zpre14a.htm","xslF25X02/primary_doc.xml","a08-27721_18k.htm","a08-24573_18k.htm","filename1.pdf","filename1.htm","a08-22582_210qa.htm","a08-22582_110qa.htm","filename1.pdf","a08-21392_110q.htm","a5753481.htm","a5739895.htm","a08-18325_110q.htm","a5709279.htm","a5701343.htm","a08-2649_210ka.htm","a08-2649_110k.htm","a5692558.htm","a08-11356_1nt10q.htm","a5669835.htm","a5664963.htm","a08-9596_1nt10k.htm","a5621220.htm","a5570316.txt","a5566724.txt","a5563450.txt","a07-25607_110q.htm","a5537991.txt","a5527336.txt","a07-18917_110q.htm","a5456406.txt","xslF345X02/edgar.xml","a07-15302_1424b3.htm","xslEFFECTX01/primary_doc.xml","xslF345X02/edgar.xml","xslF345X02/edgar.xml","a07-15302_2s8.htm","a07-15302_1s3.htm","ibis13dt.txt","xslF345X02/primary_doc.xml","a07-10885_110q.htm","xslF345X02/edgar.xml","xslF345X02/edgar.xml","xslF345X02/edgar.xml","xslF345X02/edgar.xml","xslF345X02/edgar.xml","xslF345X02/edgar.xml","a5393054.txt","a07-10605_1424b3.htm","xslEFFECTX01/primary_doc.xml","9999999997-07-020066.paper","a07-10605_1s3.htm","a5374329.txt","a07-6333_2def14a.htm","a07-5663_110k.htm","a07-6333_1pre14a.htm","ibis13gt.txt","amtech13gt.txt","xslF345X02/primary_doc.xml","a5340579.txt","a5338559.txt","xslF345X02/edgar.xml","xslF345X02/edgar.xml","xslF345X02/edgar.xml","a5314501.txt","a5313003.txt","a5297718.txt","a5278846.txt","ibis_sc13ga7-11162006.txt","a06-21748_110q.htm","xslF345X02/edgar.xml","a5258508.txt","a5239931.txt","a5217450.txt","a06-18438_18k.htm","a06-15413_110q.htm","a5196605.txt","a06-12686_1s8pos.htm","xslF345X02/edgar.xml","xslF345X02/edgar.xml","xslF345X02/edgar.xml","xslF345X02/edgar.xml","xslF345X02/edgar.xml","xslF345X02/edgar.xml","a06-9515_110q.htm","a5139878.txt","ibis_sc13ga6-04212006.txt","a5123166.txt","a06-7667_1def14a.htm","a06-2219_110k.htm","a5100625.txt","xslF345X02/edgar.xml","xslF345X02/edgar.xml","xslF345X02/edgar.xml","ibis_sc13ga5-02282006.txt","a5086986.txt","ibis_sc13ga4-02092006.txt","ibis_sc13ga3-01252006.txt","ibis_sc13ga2-01182006.txt","ibis_sc13ga1-01132006.txt","xslF345X02/edgar.xml","ibis_sc13g-01032006.txt","xslF345X02/edgar.xml","xslF345X02/edgar.xml","a5031572.txt","a05-18241_110q.htm","a5005030.txt","xslF345X02/edgar.xml","a05-12921_110q.htm","xslF345X02/edgar.xml","xslF345X02/edgar.xml","a4934905.txt","filename1.htm","filename1.txt","xslF345X02/edgar.xml","xslF345X02/edgar.xml","xslF345X02/edgar.xml","xslF345X02/edgar.xml","xslF345X02/edgar.xml","xslF345X02/edgar.xml","a05-10107_1s8pos.htm","xslF345X02/edgar.xml","xslF345X02/edgar.xml","xslF345X02/edgar.xml","xslF345X02/edgar.xml","xslF345X02/edgar.xml","xslF345X02/edgar.xml","a05-8342_110q.htm","xslF345X02/edgar.xml","xslF345X02/edgar.xml","xslF345X02/edgar.xml","a4874909.txt","9999999997-05-019451.paper","a2154661zdef14a.htm","a4863641.txt","a05-1759_110k.htm","a4829179.txt","d544763_13g-a.txt","a4795054.txt","xslF345X02/edgar.xml","xslF345X02/edgar.xml","a04-13474_110q.htm","a4746646.txt","a4720057.txt","xslF345X02/edgar.xml","xslF345X02/edgar.xml","xslF345X02/edgar.xml","xslF345X02/edgar.xml","xslF345X02/edgar.xml","xslF345X02/edgar.xml","xslF345X02/edgar.xml","a04-9412_110q.htm","a4685478.txt","d496780_13-g.txt","a2138778zs-8.htm","a4653207.txt","a4648273.txt","xslF345X02/edgar.xml","xslF345X02/edgar.xml","xslF345X02/edgar.xml","xslF345X02/edgar.xml","xslF345X02/edgar.xml","xslF345X02/edgar.xml","xslF345X02/edgar.xml","xslF345X02/edgar.xml","xslF345X02/edgar.xml","a4633961.txt","a04-5279_110q.htm","a4621523.txt","9999999997-04-017425.paper","a2131872zdef14a.htm","a4593194.txt","a04-2917_110k.htm","xslF345X02/edgar.xml","a4581047.txt","a4566322.txt","s11-4229_13g.txt","a4544613.txt","a4535003.txt","a03-4694_110q.htm","a4498894.txt","a03-4187_18k.htm","a4491891.txt","a2120506z424b5.htm","a2120506z424b5.htm","a2120483z424b1.htm","a2120351z424b1.htm","a2118808zs-3a.htm","a2118808zs-3a.htm","xslF345X02/edgar.xml","a2118808zs-3a.htm","xslF345X02/edgar.xml","xslF345X02/edgar.xml","xslF345X02/edgar.xml","xslF345X02/edgar.xml","xslF345X02/edgar.xml","xslF345X02/edgar.xml","xslF345X02/edgar.xml","xslF345X02/edgar.xml","xslF345X02/edgar.xml","a2118111zs-3.htm","xslF345X02/edgar.xml","xslF345X02/edgar.xml","xslF345X02/edgar.xml","xslF345X02/edgar.xml","xslF345X02/edgar.xml","xslF345X02/edgar.xml","xslF345X02/edgar.xml","xslF345X02/edgar.xml","xslF345X02/edgar.xml","xslF345X02/edgar.xml","a4451099.txt","xslF345X02/edgar.xml","xslF345X02/edgar.xml","xslF345X02/edgar.xml","xslF345X02/edgar.xml","a4439322.txt","a2109790z10-q.htm","a4380872.txt","9999999997-03-015858.paper","a2105282zdef14a.htm","j8225_10k.htm","s15-3332_13ga.txt","j5744_10q.htm","a2085856z10-q.txt","a2078949z10-q.txt","9999999997-02-023509.paper","filing.txt","a2074363z8-k.txt","a2074155z424b5.txt","a2073245zdef14a.txt","a2074022z8-k.txt","a2073424z10-k.txt","a2071532z8-k.txt","filing.txt","a2067852z8-k.txt","s15-2633_sc13g.txt","kl12009_sc13g-a.txt","a2062702z10-q.txt","a2061803z8-k.txt","a2061353z8-k.txt","a2060242z8-k.txt","sc13g.txt","a2057918z8-k.txt","a2057088z10-q.txt","a2054517z8-k.txt","a2054388z8-k.txt","a2053897z8-k.txt","a2051245z8-k.txt","a2050925z8-k.txt","a2047968zs-8.txt","a2048933z10-q.txt","a2046901z8-k.txt","a2045368z8-k.txt","a2041464zdef14a.txt","a2043367z8-k.txt","a2041418z10-k.txt","a2038877z8-k.txt","a2039009z8-k.txt","0001.txt","a2034218z8-k.txt","a2032144z8-k.txt","a2029618z10-q.txt","a2028574z8-k.txt","0001.txt","a10-q.txt","a8-k.txt","a8-k.txt","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","",""],"primaryDocDescription":["FORM 8K DATED 4/30/12","FORM 15","IBIS TECHNOLOGY CORP. 333-143290","IBIS TECHNOLOGY CORP. 333-116568","IBIS TECHNOLOGY CORP. 333-61184","IBIS TECHNOLOGY CORP. 333-45247","IBIS TECHNOLOGY CORP. 333-36706","IBIS TECHNOLOGY CORP. 333-09239","WITHDRAWAL REQUEST","WITHDRAWAL REQUEST","WITHDRAWAL REQUEST","WITHDRAWAL REQUEST","WITHDRAWAL REQUEST","WITHDRAWAL REQUEST","","","","","","IBIS TECHNOLOGY CORP. 333-143290","IBIS TECHNOLOGY CORP. 333-143288","IBIS TECHNOLOGY CORP. 333-142115","IBIS TECHNOLOGY CORP. 333-116568","IBIS TECHNOLOGY CORP. 333-108438","IBIS TECHNOLOGY CORP. 333-82497","IBIS TECHNOLOGY CORP. 333-61184","IBIS TECHNOLOGY CORP. 333-45247","IBIS TECHNOLOGY CORP. 333-36706","IBIS TECHNOLOGY CORP. 333-09239","IBIS TECHNOLOGY CORP. 333-09237","FORM 8-K DATED MARCH 3, 2009","8-K","8-K","8-K","DEFA14A","8-K","DEFA14A","8-K","IBIS TECHNOLOGY CORPORATION 8-K","","DEF 14A","PRE 14A","","8-K","8-K","","","10-Q/A","10-Q/A","","10-Q","IBIS TECHNOLOGY CORPORATION 8-K","IBIS TECHNOLOGY CORP. 8-K","10-Q","IBIS TECHNOLOGY CORPORATION 8-K","IBIS TECHNOLOGY CORPORATION 8-K","10-K/A","10-K","IBIS TECHNOLOGY CORPORATION","NT 10-Q","IBIS TECHNOLOGY CORPORATION 8-K","IBIS TECHNOLOGY CORPORATION 8-K","NT 10-K","IBIS TECHNOLOGY CORPORATION 8-K","IBIS TECHNOLOGY CORPORATION 8-K/A","IBIS TECHNOLOGY CORPORATION 8-K","IBIS TECHNOLOGY CORPORATION 8-K","10-Q","IBIS TECHNOLOGY CORPORATION 8-K","IBIS TECHNOLGOY CORPORATION 8-K","10-Q","IBIS TECHNOLOGY CORPORATION, 8-K","PRIMARY DOCUMENT","424B3","","PRIMARY DOCUMENT","PRIMARY DOCUMENT","S-8","S-3","","PRIMARY DOCUMENT","10-Q","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","IBIS TECHNOLOGY CORPORATION 8-K","424B3","","AUTO-GENERATED PAPER DOCUMENT","S-3","IBIS TECHNOLOGY CORPORATION 8-K","DEF 14A","10-K","PRE 14A","","","PRIMARY DOCUMENT","IBIS TECHNOLOGY 8-K","IBIS TECHNOLOGY CORP. 8-K","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","IBIS TECHNOLOGY 8-K","IBIS TECHNOLOGY CORPORATION 8-K","IBIS TECHNOLOGY CORPORATION 8K","IBIS TECHNOLOGY CORPORATION 8-K","","QUARTERLY REPORT PURSUANT TO SECTIONS 13 OR 15(D)","PRIMARY DOCUMENT","IBIS TECHNOLOGY CORPORATION 8-K","IBIS TECHNOLOGY CORPORATION 8-K","IBIS TECHNOLOGY CORPORATION 8-K","CURRENT REPORT OF MATERIAL EVENTS OR CORPORATE CHANGES","QUARTERLY REPORT PURSUANT TO SECTIONS 13 OR 15(D)","IBIS TECHNOLOGY CORPORATION 8K","POST-EFFECTIVE AMENDMENT TO A S-8 REGISTRATION STATEMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","QUARTERLY REPORT PURSUANT TO SECTIONS 13 OR 15(D)","IBIS TECHNOLOGY CORPORATION 8-K","","IBIS TECHNOLOGY CORPORATION 8-K","DEFINITIVE PROXY STATEMENT","ANNUAL REPORT PURSUANT TO SECTION 13 AND 15(D)","IBIS TECHNOLOGY CORPORATION 8-K","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","","IBIS TECHNOLOGY CORPORATION 8-K","","","","","PRIMARY DOCUMENT","","PRIMARY DOCUMENT","PRIMARY DOCUMENT","IBIS TECHNOLOGY CORPORATION, 8-K","QUARTERLY REPORT PURSUANT TO SECTIONS 13 OR 15(D)","IBIS TECHNOLOGY CORPORATION","PRIMARY DOCUMENT","10-Q","PRIMARY DOCUMENT","PRIMARY DOCUMENT","IBIS TECHNOLOGY CORPORATION 8-K","","","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","S-8 POS","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","10-Q","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","IBIS TECHNOLOGY CORPORATION 8-K","AUTO-GENERATED PAPER DOCUMENT","DEF 14A","IBIS TECHNOLOGY 8-K","10-K","IBIS TECHNOLOGY 8-K","","IBIS TECHNOLOGY CORPORATION 8-K","PRIMARY DOCUMENT","PRIMARY DOCUMENT","10-Q","IBIS TECHNOLOGY CORPORATION 8-K","IBIS TECHNOLOGY CORPORATION 8-K","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","10-Q","IBIS","","FORM S-8","IBIS TECHNOLOGY CORPORATION 8-K DOCUMENT","IBIS TECHNOLOGY 8-K","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","IBIS TECHNOLOGY CORPORATION 8-K","10-Q","IBIS TECHNOLOGY CORPORATION","AUTO-GENERATED PAPER DOCUMENT","DEF 14A","IBIS TECHNOLOGY CORP. 8-K","10-K","PRIMARY DOCUMENT","IBIS TECHNOLOGY 8-K","IBIS 8-K","SCHEDULE 13G/A","IBIS TECHNOLOGY 8-K","IBIS TECHNOLOGY 8-K","10-Q","IBIS TECHNOLOGY 8-K","8-K","IBIS TECHNOLOGY CORPORATION 8-K","FORM 424(B)(5)","FORM 424(B)(5)","FORM 424(B)(1)","424B1","S-3/A","S-3/A","PRIMARY DOCUMENT","S-3/A","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","S-3","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","IBIS    10-Q","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","IBIS TECHNOLOGY 8-K","FORM 10-Q","IBIS TECHNOLOGY 8-K","AUTO-GENERATED PAPER DOCUMENT","DEF 14A","10-K","AMENDMENT NO. 1 TO SCHEDULE 13G","10-Q","FORM 10-Q","10-Q","AUTO-GENERATED PAPER DOCUMENT","DOC ONE","FORM 8-K","424(B)5","DEF 14A","8-K","FORM 10-K","8-K","DOC ONE","8-K","","SCHEDULE 13G FINAL AMENDMENT","FORM 10-Q","8-K","FORM 8-K","8-K","AMENDMENT NO. 5","FORM 8-K","FORM 10-Q","FORM 8-K","8-K","8-K","8-K","8-K","S-8","FORM 10-Q","FORM 8-K","8-K","DEF 14A","FORM 8-K","FORM 10-K","FORM 8-K","8-K","SCHEDULE 13G","8-K","FORM 8-K","FORM 10-Q","8-K","","FORM 10Q","8-K","8-K","","10-Q","FORM S-8","8-K","","FORM 8-K","DEF 14A","10-K","PRELIMINARY 14A","8-K","AMENDMENT NO. 3 TO SCHEDULE 13G","SCHEDULE 13G AMENDMENT NO. 3","FORM 8-K","SCHEDULE 13G","8-K","FORM 10-Q","FORM 8-K","FORM 8-K","","FORM 10-Q","8-K","8-K","424B5","424B5","FORM8-K","FORM S-3/A","8-K","FORM S-3","AMENDMENT NO. 2 TO SCHEDULE 13G","10-Q","8-K","DEF 14A","FORM 10-K405","FORM 8-K","AMENDMENT NO. 1 TO SCHEDULE 13G","FORM 8-K","FORM 8-K","FORM 10-Q","FORM 8-K","FORM 8-K","8-K","10-Q","SCHEDULE 13G OF JEFFREY J. PUGLISI","IBIS TECHNOLOGY CORPORATION","IBIS TECHNOLOGY CORPORATION","IBIS TECHNOLOGY CORPORATION","AMENDMENT NO. 5 SCHEDULE 13D","IBIS TECHNOLOGY","IBIS TECHNOLOGY","IBIS TECHNOLOGY CORPORATION","IBIS TECHNOLOGY CORPORATION","IBIS TECHNOLOGY CORPORATION","IBIS TECHNOLOGY CORPORATION","IBIS TECHNOLOGY CORPORATION","IBIS TECHNOLOGY CORPORATION","IBIS TECHNOLOGY CORPORATION POST-EFFECTIVE NO. 3","IBIS TECHNOLOGY CORPORATION","IBIS TECH CORP","IBIS TECHNOLOGY CORP.","IBIS TECHNOLOGY CORPORATION FORM 8-K (11/4/97)","IBIS TECHNOLOGY CORPORATION","IBIS TECHNOLOGY CORPORATION CURRENT REPORT","IBIS TECHNOLOGY CORPORATION","IBIS TECHNOLOGY, INC.","IBIS TECHNOLOGY CORPORATION","IBIS TECHNOLOGY CORPORATION","IBIS TECHNOLOGY CORPORATION","IBIS FORM 8-K","IBIS TECHNOLOGY CORPORATION","IBIS TECHNOLOGY CORPORATION","IBIS TECHNOLOGY FORM 8-K CURRENT REPORT","IBIS TECHNOLOGY CORPORATION","IBIS TECHNOLOGY ANNUAL REPORT ON FORM 10-K","IBIS TECHNOLOGY NOTICE AND PROXY STATEMENT","SCHEDULE 13G/A","SC 13D/A","IBIS TECHNOLOGY              FORM 10-Q","SC 13D","IBIS TECHNOLOGY FORM 8-K/A","IBIS TECHNOLOGY FORM 10-Q QUARTERLY REPORT","IBIS TECHNOLOGY CORPORATION FORM S-8","IBIS TECHNOLOGY CORPORATION","FORM 8-K CURRENT REPORT","IBIS TECHNOLOGY CORPORATION"]},"files":[]}}