{"cik":"0001101302","entityType":"operating","sic":"3089","sicDescription":"Plastics Products, NEC","ownerOrg":"08 Industrial Applications and Services","insiderTransactionForOwnerExists":1,"insiderTransactionForIssuerExists":1,"name":"ENTEGRIS INC","tickers":["ENTG"],"exchanges":["Nasdaq"],"ein":"411941551","lei":null,"description":"","website":"","investorWebsite":"","category":"Large accelerated filer","fiscalYearEnd":"1231","stateOfIncorporation":"DE","stateOfIncorporationDescription":"DE","addresses":{"mailing":{"street1":"129 CONCORD ROAD","street2":null,"city":"BILLERICA","stateOrCountry":"MA","zipCode":"01821","stateOrCountryDescription":"MA","isForeignLocation":0,"foreignStateTerritory":null,"country":null,"countryCode":null},"business":{"street1":"129 CONCORD ROAD","street2":null,"city":"BILLERICA","stateOrCountry":"MA","zipCode":"01821","stateOrCountryDescription":"MA","isForeignLocation":null,"foreignStateTerritory":null,"country":null,"countryCode":null}},"phone":"9784366500","flags":"","formerNames":[],"filings":{"recent":{"accessionNumber":["0001959173-26-004579","0001101302-26-000137","0001101302-26-000136","0001959173-26-004284","0001101302-26-000133","0001101302-26-000131","0001959173-26-004024","0001959173-26-003983","0001959173-26-003902","0001101302-26-000129","0001101302-26-000127","0001101302-26-000124","0001101302-26-000122","0001101302-26-000121","0001101302-26-000120","0001959173-26-003645","0000080255-26-000399","0001959173-26-003611","0001959173-26-003595","0001959173-26-003587","0001422848-26-000055","0001101302-26-000116","0001140361-26-020041","0001101302-26-000114","0001101302-26-000113","0001101302-26-000112","0001101302-26-000111","0001101302-26-000110","0001101302-26-000109","0001959173-26-003312","0001101302-26-000102","0001140361-26-018008","0001101302-26-000099","0002100119-26-000448","0001104659-26-051610","0002100121-26-000258","0001197452-26-000002","0001959173-26-002977","0001101302-26-000097","0001101302-26-000095","0001959173-26-002905","0001101302-26-000093","0001101302-26-000092","0001959173-26-002806","0001959173-26-002805","0001101302-26-000089","0001101302-26-000088","0001101302-26-000087","0001101302-26-000086","0001101302-26-000085","0001101302-26-000084","0001101302-26-000083","0001101302-26-000075","0001101302-26-000074","0001101302-26-000073","0001101302-26-000072","0001101302-26-000071","0001101302-26-000070","0001101302-26-000069","0001101302-26-000068","0000102909-26-001254","0001101302-26-000059","0001101302-26-000056","0001101302-26-000055","0001101302-26-000054","0001101302-26-000049","0001101302-26-000046","0001101302-26-000044","0001958244-26-000101","0001958244-26-000099","0001959173-26-001426","0001101302-26-000042","0001101302-26-000041","0001101302-26-000040","0001101302-26-000039","0001101302-26-000038","0001101302-26-000037","0001101302-26-000036","0001101302-26-000035","0001959173-26-001267","0001959173-26-001255","0001959173-26-001253","0001101302-26-000026","0001101302-26-000025","0001101302-26-000024","0001101302-26-000023","0001101302-26-000022","0001101302-26-000021","0001101302-26-000020","0001959173-26-000930","0001101302-26-000012","0001101302-26-000009","0001101302-26-000007","0001959173-26-000540","0001101302-26-000005","0001959173-26-000383","0001140361-26-001577","0001101302-26-000003","0001101302-25-000109","0001959173-25-007620","0001101302-25-000107","0001959173-25-007369","0001891661-25-000011","0001959173-25-007025","0001101302-25-000105","0001959173-25-006772","0001101302-25-000103","0001101302-25-000099","0001101302-25-000095","0001959173-25-006097","0001101302-25-000089","0001932852-25-000008","0001101302-25-000087","0001101302-25-000085","0001101302-25-000083","0001101302-25-000081","0001959173-25-005166","0001101302-25-000079","0001101302-25-000075","0001483553-25-000012","0001959173-25-004620","0001101302-25-000070","0001101302-25-000068","0001140361-25-024795","0001846252-25-000004","0000080255-25-000401","0001101302-25-000062","0001891661-25-000008","0001959173-25-003413","0001977397-25-000006","0000080255-25-000351","0001140361-25-018384","0001101302-25-000060","0001101302-25-000056","0001158015-25-000006","0001434807-25-000002","0001846252-25-000002","0001597133-25-000004","0001217378-25-000002","0001101302-25-000050","0001101302-25-000049","0001101302-25-000048","0002052113-25-001492","0001101302-25-000044","0001101302-25-000042","0001483553-25-000008","0001891661-25-000006","0001630039-25-000006","0001977397-25-000004","0001932852-25-000006","0001197452-25-000006","0001811061-25-000006","0001786291-25-000006","0001552780-25-000007","0001932881-25-000006","0001716139-25-000006","0001630039-25-000004","0001977397-25-000002","0001483553-25-000006","0001197452-25-000004","0001811061-25-000004","0001786291-25-000004","0001932881-25-000004","0001716139-25-000004","0001891661-25-000004","0001932852-25-000004","0001552780-25-000005","0001101302-25-000039","0001101302-25-000037","0001932852-25-000002","0001483553-25-000004","0001552780-25-000003","0001786291-25-000002","0001932881-25-000002","0001197452-25-000002","0001811061-25-000002","0001716139-25-000002","0001630039-25-000002","0001891661-25-000002","0001101302-25-000032","0001101302-25-000031","0001101302-25-000029","0001101302-25-000028","0001101302-25-000027","0001101302-25-000026","0001101302-25-000025","0001101302-25-000024","0001959173-25-001222","0000080255-25-000179","0001101302-25-000015","0001483553-25-000002","0001020066-25-000011","0001959173-25-000853","0001101302-25-000010","0001101302-25-000004","0001485428-24-000008","0001891661-24-000008","0001959173-24-007918","0000080255-24-001386","0001101302-24-000074","0001101302-24-000071","0001101302-24-000067","0001101302-24-000065","0001630039-24-000013","0001104659-24-098440","0001101302-24-000063","0001101302-24-000061","0001101302-24-000057","0001630039-24-000011","0001101302-24-000053","0001101302-24-000049","0001101302-24-000047","0001630039-24-000008","0001959173-24-004854","0001197452-24-000006","0001101302-24-000044","0001630039-24-000006","0001140361-24-032558","0001959173-24-004776","0001959173-24-004775","0001086364-24-007781","0001483553-24-000006","0001786291-24-000009","0001959173-24-004024","0001846252-24-000004","0001786291-24-000007","0001101302-24-000042","0001959173-24-003826","0001977397-24-000004","0001891661-24-000006","0001811061-24-000007","0001959173-24-003610","0001140361-24-024108","0001101302-24-000040","0001101302-24-000037","0001217378-24-000004","0001101302-24-000035","0001101302-24-000034","0001846252-24-000002","0001434807-24-000004","0001101302-24-000033","0001597133-24-000002","0001101302-24-000029","0001101302-24-000027","0001786291-24-000005","0001197452-24-000004","0001716139-24-000004","0001811061-24-000004","0001485428-24-000004","0001932881-24-000007","0001977397-24-000002","0001932852-24-000004","0001891661-24-000004","0001483553-24-000004","0001630039-24-000004","0001552780-24-000006","0001140361-24-016112","0001140361-24-015044","0001101302-24-000024","0001101302-24-000022","0001434807-24-000002","0001101302-24-000016","0001217378-24-000002","0001101302-24-000014","0001959173-24-002110","0001101302-24-000012","0001969223-24-000225","0001140361-24-010926","0001552780-24-000004","0001932881-24-000003","0001716139-24-000002","0001197452-24-000002","0001811061-24-000002","0001552780-24-000002","0001485428-24-000002","0001630039-24-000002","0001932852-24-000002","0001786291-24-000003","0001891661-24-000002","0001483553-24-000002","0001959173-24-001229","0001959173-24-001185","0001959173-24-001135","0001959173-24-001095","0001959173-24-001077","0001101302-24-000009","0000899140-24-000240","0000080255-24-000677","0001104659-24-020854","0001101302-24-000005","0000908834-24-000065","0001086364-24-002282","0001101302-24-000002","0001811061-23-000010","0001959173-23-005687","0001959173-23-005682","0001485428-23-000010","0001959173-23-005127","0001811061-23-000008","0001959173-23-004970","0001891661-23-000006","0001959173-23-004672","0001959173-23-004556","0001101302-23-000089","0001101302-23-000086","0001101302-23-000084","0001630039-23-000010","0001140361-23-046139","0001140361-23-043716","0001786291-23-000014","0001959173-23-003399","0001630039-23-000008","0001197452-23-000008","0001932852-23-000008","0001101302-23-000082","0001101302-23-000077","0001101302-23-000074","0001959173-23-001583","0001959173-23-001580","0001140361-23-028232","0001101302-23-000071","0001485428-23-000008","0001811061-23-000006","0001977397-23-000004","0001786291-23-000010","0001977397-23-000002","0001959173-23-001068","0000000000-23-005065","0001101302-23-000069","0001959173-23-001004","0001101302-23-000065","0001140361-23-023773","0001140361-23-022864","0001226867-23-000002","0001198621-23-000002","0001101302-23-000062","0001846252-23-000002","0001434807-23-000002","0001217378-23-000002","0001101302-23-000061","0001101302-23-000060","0001101302-23-000056","0000000000-23-004102","0001101302-23-000054","0001140361-23-017946","0001140361-23-017816","0000000000-23-003204","0001101302-23-000050","0001101302-23-000045","0001140361-23-011406","0001140361-23-009419","0001101302-23-000027","0001101302-23-000026","0001786291-23-000008","0001101302-23-000023","0001208109-23-000008","0001101302-23-000021","0001485428-23-000006","0001716139-23-000008","0001678021-23-000006","0001891661-23-000004","0001932852-23-000006","0001552780-23-000004","0001932881-23-000006","0001811061-23-000004","0001786291-23-000006","0001208109-23-000006","0001483553-23-000006","0001731462-23-000006","0001197452-23-000006","0001485428-23-000004","0001716139-23-000006","0001678021-23-000004","0001932852-23-000004","0001932881-23-000004","0001786291-23-000004","0001208109-23-000004","0001483553-23-000004","0001731462-23-000004","0001197452-23-000004","0000899140-23-000344","0000080255-23-002554","0001101302-23-000016","0001140361-23-006145","0001104659-23-015879","0001716139-23-000004","0001485428-23-000002","0001678021-23-000002","0001891661-23-000002","0001932852-23-000002","0001552780-23-000002","0001932881-23-000002","0001811061-23-000002","0001786291-23-000002","0001208109-23-000002","0001630039-23-000002","0001607953-23-000002","0001483553-23-000002","0001731462-23-000002","0001197452-23-000002","0001306550-23-004070","0001101302-23-000010","0001306550-23-001234","0001101302-23-000008","0001101302-23-000005","0001101302-22-000052","0001891661-22-000004","0001101302-22-000050","0001101302-22-000047","0001101302-22-000044","0001140361-22-036742","0001630039-22-000002","0001140361-22-033627","0001485429-22-000014","0001197452-22-000010","0001932852-22-000004","0000080255-22-002481","0001101302-22-000042","0001101302-22-000038","0001101302-22-000036","0001932881-22-000002","0001932852-22-000002","0001209191-22-041708","0001209191-22-041707","0001197452-22-000008","0001140361-22-025295","0001140361-22-025293","0001140361-22-025275","0001140361-22-024602","0001140361-22-024601","0001140361-22-024068","0001140361-22-024066","0001140361-22-024028","0001140361-22-023344","0001140361-22-023343","0001140361-22-023176","0001140361-22-023175","0001786291-22-000006","0001101302-22-000034","0001811061-22-000006","0001101302-22-000030","0001434807-22-000002","0001198621-22-000002","0001217378-22-000002","0001226867-22-000006","0001101302-22-000029","0001846252-22-000002","0001101302-22-000026","0001140361-22-015992","0001101302-22-000024","0001101302-22-000021","0001101302-22-000018","0001140361-22-014649","0001140361-22-014648","0001101302-22-000016","0001140361-22-013229","0001140361-22-013228","0001140361-22-012803","0001140361-22-012788","0001485429-22-000012","0001208109-22-000014","0001607953-22-000011","0001731462-22-000010","0001101302-22-000014","0001226867-22-000004","0001716139-22-000008","0001485429-22-000010","0001678021-22-000008","0001485429-22-000008","0001607953-22-000009","0001731462-22-000008","0001208109-22-000008","0001552780-22-000007","0001731462-22-000006","0001607953-22-000006","0001208109-22-000006","0001552780-22-000005","0001197452-22-000006","0001483553-22-000006","0001786291-22-000004","0001811061-22-000004","0001716139-22-000006","0001485429-22-000006","0001485428-22-000006","0001678021-22-000006","0001197452-22-000004","0001731462-22-000004","0001483553-22-000004","0001607953-22-000004","0001208109-22-000004","0001678021-22-000004","0001716139-22-000004","0001485429-22-000004","0001485428-22-000004","0000080255-22-002000","0000899140-22-000254","0001104659-22-017473","0001101302-22-000010","0001678021-22-000002","0001731462-22-000002","0001483553-22-000002","0001607953-22-000002","0001891661-22-000002","0001197452-22-000002","0001786291-22-000002","0001552780-22-000002","0001716139-22-000002","0001208109-22-000002","0001485429-22-000002","0001811061-22-000002","0001485428-22-000002","0001140361-22-003525","0001140361-22-003498","0001101302-22-000006","0001140361-22-003193","0001140361-22-003191","9999999995-22-000271","0001140361-22-003103","0000834237-22-003308","0001140361-22-002772","0001140361-22-002746","0000000000-22-000802","0001226867-22-000002","0001101302-22-000002","0001140361-22-001732","0001140361-22-001730","0001101302-21-000085","0001226867-21-000012","0001140361-21-042094","0001140361-21-042086","0001140361-21-041833","0001140361-21-041831","0001140361-21-041829","0001140361-21-041827","0001140361-21-041825","0001140361-21-041818","0001140361-21-041799","0001140361-21-041795","0001140361-21-041793","0001140361-21-041791","0001140361-21-041788","0001140361-21-041691","0001140361-21-041690","0001786291-21-000012","0001607953-21-000010","0001101302-21-000083","0001716139-21-000006","0001678021-21-000008","0001198621-21-000005","0001891661-21-000006","0001891661-21-000004","0001891661-21-000003","0001731462-21-000010","0001485429-21-000008","0001101302-21-000081","0001101302-21-000078","0001101302-21-000075","0001786291-21-000010","0001217378-21-000004","0001101302-21-000069","0001485428-21-000008","0001731462-21-000008","0001226867-21-000010","0001811061-21-000010","0001786291-21-000008","0001197452-21-000020","0001208109-21-000010","0001197452-21-000017","0001197452-21-000015","0001197452-21-000013","0001434807-21-000006","0001485428-21-000006","0001101302-21-000066","0001101302-21-000064","0001101302-21-000061","0001731462-21-000006","0001226867-21-000008","0001607953-21-000008","0001226867-21-000006","0001101302-21-000056","0000940454-21-000010","0001101302-21-000051","0001811061-21-000008","0000940454-21-000008","0000834237-21-008208","0001485429-21-000006","0001101302-21-000048","0001226867-21-000004","0001520367-21-000002","0001434807-21-000004","0001846252-21-000007","0001198621-21-000003","0000940454-21-000006","0001217378-21-000002","0001101302-21-000047","0001193125-21-145231","0001101302-21-000044","0001101302-21-000042","0001101302-21-000039","0001101302-21-000036","0001101302-21-000034","0001197452-21-000010","0001101302-21-000030","0001208109-21-000008","0001434807-21-000002","0001607953-21-000006","0001786291-21-000006","0001811061-21-000006","0001197452-21-000008","0001226867-21-000002","0001101302-21-000025","0000940454-21-000004","0001208109-21-000006","0001552780-21-000007","0001552780-21-000005","0001716139-21-000004","0001607953-21-000004","0001197452-21-000005","0001786291-21-000004","0001811061-21-000004","0001208109-21-000004","0001731462-21-000004","0001485428-21-000004","0001485429-21-000004","0001678021-21-000006","0001483553-21-000004","0001101302-21-000021","0001846252-21-000005","0000940454-21-000002","0001846252-21-000004","0001101302-21-000020","0001101302-21-000017","0001678021-21-000004","0000080255-21-001100","0001104659-21-018000","0001101302-21-000011","0001811061-21-000002","0001197452-21-000002","0001483553-21-000002","0001731462-21-000002","0001607953-21-000002","0001485428-21-000002","0001786291-21-000002","0001678021-21-000002","0001208109-21-000002","0001552780-21-000002","0001485429-21-000002","0001716139-21-000002","0001101302-21-000004","0000834237-21-003948","0001101302-21-000002","0001226867-20-000013","0001226867-20-000010","0001485428-20-000014","0000940454-20-000010","0001716139-20-000007","0001485428-20-000012","0001678021-20-000012","0001101302-20-000057","0001101302-20-000055","0001101302-20-000052","0001226867-20-000008","0001127602-20-024881","0000940454-20-000008","0001485429-20-000012","0001678021-20-000010","0001483553-20-000008","0001485428-20-000010","0001197452-20-000014","0001197452-20-000012","0001197452-20-000010","0001101302-20-000048","0001101302-20-000046","0001101302-20-000042","0001226867-20-000006","0001520367-20-000006","0001485429-20-000010","0001198621-20-000006","0001101302-20-000036","0001607953-20-000014","0000940454-20-000006","0001198621-20-000004","0001811061-20-000002","0001485428-20-000008","0001520367-20-000004","0001226867-20-000004","0000940454-20-000004","0001434807-20-000002","0001198621-20-000002","0001101302-20-000034","0001217378-20-000004","0001193125-20-128946","0001101302-20-000032","0001101302-20-000029","0001193125-20-117930","0001193125-20-116093","0001101302-20-000025","0001101302-20-000024","0001101302-20-000016","0001193125-20-077116","0001217378-20-000002","0001520367-20-000002","0001197452-20-000008","0001607953-20-000012","0001208109-20-000008","0001552780-20-000006","0001485429-20-000008","0001485428-20-000006","0001786291-20-000004","0001552780-20-000004","0001607953-20-000010","0001483553-20-000006","0001208109-20-000006","0001731462-20-000006","0001716139-20-000004","0001678021-20-000008","0001197452-20-000006","0001208109-20-000004","0001678021-20-000006","0001483553-20-000004","0001197452-20-000004","0001485429-20-000006","0001607953-20-000008","0001485428-20-000004","0001731462-20-000004","0000940454-20-000002","0001607953-20-000006","0000080255-20-001120","0001226867-20-000002","0001104659-20-017910","0001678021-20-000004","0001607953-20-000004","0001485429-20-000004","0001101302-20-000013","0000834237-20-008134","0001607953-20-000002","0001197452-20-000002","0001552780-20-000002","0001483553-20-000002","0001678021-20-000002","0001731462-20-000002","0001716139-20-000002","0001485428-20-000002","0001786291-20-000002","0001208109-20-000002","0001485429-20-000002","0001101302-20-000009","0001101302-20-000006","0001101302-20-000003","0000940454-19-000012","0001716139-19-000006","0001483553-19-000010","0001101302-19-000044","0001101302-19-000041","0001101302-19-000038","0001607961-19-000014","0001101302-19-000036","0001485428-19-000014","0001786291-19-000004","0001607961-19-000012","0000940454-19-000010","0001678021-19-000009","0001607961-19-000010","0001483553-19-000007","0001485429-19-000009","0001485428-19-000012","0001208109-19-000011","0001101302-19-000032","0001101302-19-000030","0001101302-19-000028","0001101302-19-000026","0000215457-19-008353","0001101302-19-000023","0000940454-19-000007","0001731462-19-000007","0001607961-19-000008","0001208109-19-000009","0001226867-19-000003","0001217378-19-000002","0001198621-19-000002","0001434807-19-000002","0001520367-19-000002","0001101302-19-000021","0000940454-19-000004","0001485428-19-000010","0001607953-19-000010","0001101302-19-000019","0001101302-19-000017","0001101302-19-000015","0001101302-19-000012","0001193125-19-104777","0001193125-19-104652","0000080255-19-002791","0001193125-19-100693","0001193125-19-100696","0001193125-19-092696","0001193125-19-081582","0001193125-19-081583","9999999995-19-000478","0001193125-19-080982","0001193125-19-080136","0001193125-19-079413","0001193125-19-077526","0001193125-19-077511","0000000000-19-004852","0001193125-19-070502","0001193125-19-068764","0001193125-19-055184","0001193125-19-055180","0001678021-19-000007","0001193125-19-054289","0001607953-19-000006","0001208109-19-000006","0001607961-19-000006","0001485429-19-000007","0001485428-19-000007","0001197452-19-000007","0001193125-19-047798","0001485429-19-000005","0001552780-19-000007","0000940454-19-000002","0001483553-19-000005","0001208109-19-000004","0001731462-19-000005","0001485428-19-000005","0001716139-19-000004","0001607961-19-000004","0001607953-19-000004","0001197452-19-000004","0001678021-19-000005","0000080255-19-002505","0001106191-19-000010","0001193125-19-037096","0001101302-19-000010","0000932471-19-004603","0001193125-19-031694","0001678021-19-000002","0001485428-19-000003","0001552780-19-000005","0001716139-19-000002","0001607953-19-000002","0001607961-19-000002","0001197452-19-000002","0001483553-19-000002","0001208109-19-000002","0001485429-19-000003","0001731462-19-000002","0001193125-19-030381","0001193125-19-029102","0001193125-19-028434","0001101302-19-000007","0001193125-19-027073","0000215457-19-003959","0001193125-19-019677","0001193125-19-019680","0001193125-19-019270","0001193125-19-019092","0001193125-19-019065","0001193125-19-019049","0001193125-19-019038","0001193125-19-019033","0001193125-19-019027","0001193125-19-017783","0001193125-19-017776","0001193125-19-017777","0001101302-19-000002","0000940454-18-000010","0001101302-18-000055","0001483553-18-000009","0001716139-18-000006","0001193125-18-319668","0001101302-18-000053","0001101302-18-000051","0001101302-18-000048","0001217378-18-000006","0000940454-18-000008","0001607961-18-000008","0001678021-18-000009","0001485429-18-000008","0001483553-18-000007","0000940454-18-000006","0001226867-18-000005","0001678021-18-000007","0001101302-18-000045","0001101302-18-000043","0001101302-18-000039","0001101302-18-000036","0001101302-18-000034","0001208109-18-000008","0001101302-18-000032","0001101302-18-000028","0001671302-18-000010","0001731462-18-000009","0001217378-18-000004","0001101302-18-000026","0000940454-18-000004","0001520367-18-000003","0001226867-18-000002","0001198621-18-000004","0001434807-18-000003","0001199143-18-000003","0001101302-18-000024","0001101302-18-000022","0001101302-18-000020","0001101302-18-000017","0001193125-18-098511","0001101302-18-000015","0001607953-18-000008","0001485429-18-000006","0001198621-18-000002","0001101302-18-000011","0001485428-18-000007","0001607953-18-000006","0001607961-18-000006","0001197452-18-000008","0001208109-18-000006","0000940454-18-000002","0001208109-18-000004","0001552780-18-000006","0001671302-18-000005","0001485428-18-000005","0001678021-18-000005","0001731462-18-000007","0001607953-18-000004","0001607961-18-000004","0001197452-18-000006","0001483553-18-000004","0001485429-18-000004","0001101302-18-000008","0001731462-18-000005","0001731462-18-000004","0001607953-18-000002","0001217378-18-000002","0001483553-18-000002","0001552780-18-000003","0001552780-18-000002","0001607961-18-000002","0001208109-18-000002","0001485429-18-000002","0001671302-18-000002","0001678021-18-000002","0001485428-18-000002","0001197452-18-000003","0001106191-18-000028","0000932471-18-003557","0001101302-18-000005","0000215457-18-003559","0001101302-18-000003","0001226867-17-000011","0001198621-17-000009","0000940454-17-000007","0001226867-17-000009","0001483553-17-000008","0001101302-17-000045","0001678021-17-000010","0001607953-17-000011","0001485429-17-000011","0001101302-17-000043","0001101302-17-000041","0001678021-17-000008","0001101302-17-000039","0001101302-17-000036","0001101302-17-000033","0000909012-17-000157","0001607953-17-000008","0001226867-17-000006","0001716139-17-000004","0001716139-17-000003","0001520367-17-000008","0001485429-17-000008","0001483553-17-000006","0001607961-17-000011","0001678021-17-000006","0001101302-17-000030","0001101302-17-000028","0001226867-17-000004","0001101302-17-000024","0001208109-17-000008","0001101302-17-000022","0001101302-17-000020","0001208109-17-000006","0001343148-17-000009","0000940454-17-000004","0001101302-17-000017","0001198621-17-000007","0000940454-17-000002","0001226867-17-000002","0001434807-17-000004","0001217378-17-000002","0001199143-17-000004","0001520367-17-000006","0001198621-17-000005","0001343148-17-000007","0001101302-17-000015","0001199143-17-000002","0001434807-17-000002","0001671302-17-000004","0001607961-17-000009","0001485429-17-000006","0001101302-17-000013","0001101302-17-000011"],"filingDate":["2026-06-11","2026-06-04","2026-06-04","2026-06-03","2026-05-29","2026-05-28","2026-05-27","2026-05-26","2026-05-22","2026-05-19","2026-05-19","2026-05-18","2026-05-18","2026-05-18","2026-05-18","2026-05-15","2026-05-15","2026-05-14","2026-05-14","2026-05-14","2026-05-14","2026-05-11","2026-05-08","2026-05-08","2026-05-08","2026-05-08","2026-05-08","2026-05-08","2026-05-08","2026-05-06","2026-04-30","2026-04-30","2026-04-30","2026-04-29","2026-04-29","2026-04-29","2026-04-20","2026-04-17","2026-04-16","2026-04-15","2026-04-14","2026-04-08","2026-04-08","2026-04-07","2026-04-07","2026-04-06","2026-04-06","2026-04-06","2026-04-06","2026-04-06","2026-04-06","2026-04-06","2026-04-02","2026-04-02","2026-04-02","2026-04-02","2026-04-02","2026-04-02","2026-04-02","2026-04-02","2026-03-26","2026-03-26","2026-03-23","2026-03-23","2026-03-23","2026-03-06","2026-03-05","2026-02-26","2026-02-25","2026-02-25","2026-02-24","2026-02-23","2026-02-23","2026-02-23","2026-02-23","2026-02-23","2026-02-23","2026-02-23","2026-02-23","2026-02-20","2026-02-20","2026-02-20","2026-02-17","2026-02-17","2026-02-17","2026-02-17","2026-02-17","2026-02-17","2026-02-17","2026-02-12","2026-02-11","2026-02-10","2026-02-04","2026-02-02","2026-01-22","2026-01-21","2026-01-20","2026-01-14","2025-12-11","2025-12-10","2025-12-03","2025-12-01","2025-11-18","2025-11-17","2025-11-07","2025-11-06","2025-10-30","2025-10-30","2025-10-15","2025-09-18","2025-08-27","2025-08-27","2025-08-21","2025-08-20","2025-08-20","2025-08-14","2025-08-13","2025-07-30","2025-07-30","2025-07-21","2025-07-17","2025-07-16","2025-07-16","2025-07-03","2025-06-13","2025-06-06","2025-05-30","2025-05-23","2025-05-22","2025-05-19","2025-05-14","2025-05-12","2025-05-07","2025-05-07","2025-04-25","2025-04-25","2025-04-25","2025-04-25","2025-04-25","2025-04-25","2025-04-25","2025-04-25","2025-04-23","2025-04-23","2025-04-16","2025-04-08","2025-04-08","2025-04-08","2025-04-08","2025-04-08","2025-04-08","2025-04-08","2025-04-08","2025-04-08","2025-04-08","2025-04-08","2025-04-03","2025-04-03","2025-04-03","2025-04-03","2025-04-03","2025-04-03","2025-04-03","2025-04-03","2025-04-03","2025-04-03","2025-04-03","2025-03-17","2025-03-17","2025-02-24","2025-02-24","2025-02-24","2025-02-24","2025-02-24","2025-02-24","2025-02-24","2025-02-24","2025-02-24","2025-02-24","2025-02-21","2025-02-21","2025-02-21","2025-02-21","2025-02-21","2025-02-21","2025-02-21","2025-02-21","2025-02-21","2025-02-14","2025-02-12","2025-02-12","2025-02-12","2025-02-10","2025-02-06","2025-01-15","2024-12-03","2024-11-19","2024-11-18","2024-11-14","2024-11-04","2024-11-04","2024-10-18","2024-10-16","2024-10-02","2024-09-10","2024-09-06","2024-09-06","2024-09-05","2024-08-20","2024-07-31","2024-07-31","2024-07-17","2024-07-15","2024-07-11","2024-07-08","2024-07-08","2024-07-08","2024-07-08","2024-07-03","2024-07-03","2024-06-07","2024-06-04","2024-06-04","2024-05-31","2024-05-29","2024-05-28","2024-05-28","2024-05-23","2024-05-17","2024-05-17","2024-05-17","2024-05-16","2024-05-02","2024-05-01","2024-05-01","2024-04-25","2024-04-25","2024-04-25","2024-04-25","2024-04-25","2024-04-25","2024-04-25","2024-04-24","2024-04-17","2024-04-03","2024-04-03","2024-04-03","2024-04-03","2024-04-03","2024-04-03","2024-04-03","2024-04-03","2024-04-03","2024-04-03","2024-04-03","2024-04-03","2024-03-28","2024-03-25","2024-03-18","2024-03-18","2024-03-12","2024-03-11","2024-03-11","2024-03-11","2024-03-08","2024-03-07","2024-03-07","2024-03-04","2024-02-22","2024-02-21","2024-02-21","2024-02-21","2024-02-21","2024-02-21","2024-02-21","2024-02-21","2024-02-21","2024-02-21","2024-02-21","2024-02-21","2024-02-21","2024-02-20","2024-02-16","2024-02-16","2024-02-16","2024-02-15","2024-02-14","2024-02-14","2024-02-13","2024-02-13","2024-02-13","2024-01-24","2024-01-17","2023-12-27","2023-12-22","2023-12-22","2023-12-14","2023-12-01","2023-11-28","2023-11-24","2023-11-17","2023-11-13","2023-11-06","2023-11-02","2023-11-02","2023-10-18","2023-10-03","2023-10-02","2023-09-13","2023-08-24","2023-08-21","2023-08-17","2023-08-17","2023-08-17","2023-08-03","2023-08-03","2023-07-19","2023-06-06","2023-06-06","2023-06-05","2023-05-17","2023-05-17","2023-05-17","2023-05-17","2023-05-15","2023-05-15","2023-05-15","2023-05-12","2023-05-11","2023-05-11","2023-05-11","2023-05-10","2023-05-04","2023-04-28","2023-04-28","2023-04-28","2023-04-28","2023-04-28","2023-04-28","2023-04-28","2023-04-28","2023-04-26","2023-04-24","2023-04-19","2023-04-12","2023-04-11","2023-03-30","2023-03-17","2023-03-17","2023-03-13","2023-03-01","2023-03-01","2023-03-01","2023-02-28","2023-02-27","2023-02-23","2023-02-23","2023-02-21","2023-02-21","2023-02-21","2023-02-21","2023-02-21","2023-02-21","2023-02-21","2023-02-21","2023-02-21","2023-02-21","2023-02-21","2023-02-21","2023-02-21","2023-02-15","2023-02-15","2023-02-15","2023-02-15","2023-02-15","2023-02-15","2023-02-15","2023-02-15","2023-02-15","2023-02-15","2023-02-14","2023-02-14","2023-02-14","2023-02-13","2023-02-09","2023-02-02","2023-02-02","2023-02-02","2023-02-02","2023-02-02","2023-02-02","2023-02-02","2023-02-02","2023-02-02","2023-02-02","2023-02-02","2023-02-02","2023-02-02","2023-02-02","2023-02-02","2023-01-26","2023-01-23","2023-01-20","2023-01-20","2023-01-18","2022-12-09","2022-11-17","2022-11-02","2022-11-02","2022-10-19","2022-10-11","2022-10-04","2022-09-16","2022-09-06","2022-08-17","2022-08-17","2022-08-10","2022-08-02","2022-08-02","2022-07-20","2022-07-14","2022-07-14","2022-07-08","2022-07-08","2022-07-08","2022-07-07","2022-07-07","2022-07-06","2022-06-30","2022-06-30","2022-06-27","2022-06-27","2022-06-24","2022-06-17","2022-06-17","2022-06-16","2022-06-16","2022-06-06","2022-05-24","2022-05-17","2022-04-29","2022-04-29","2022-04-29","2022-04-29","2022-04-29","2022-04-29","2022-04-29","2022-04-27","2022-04-26","2022-04-26","2022-04-26","2022-04-20","2022-04-15","2022-04-15","2022-04-08","2022-04-06","2022-04-06","2022-04-04","2022-04-04","2022-04-01","2022-04-01","2022-03-31","2022-03-31","2022-03-17","2022-03-16","2022-03-08","2022-03-01","2022-02-24","2022-02-24","2022-02-24","2022-02-24","2022-02-24","2022-02-24","2022-02-23","2022-02-23","2022-02-23","2022-02-23","2022-02-23","2022-02-23","2022-02-23","2022-02-23","2022-02-23","2022-02-23","2022-02-23","2022-02-23","2022-02-15","2022-02-15","2022-02-15","2022-02-15","2022-02-15","2022-02-15","2022-02-15","2022-02-15","2022-02-15","2022-02-14","2022-02-14","2022-02-10","2022-02-04","2022-02-03","2022-02-03","2022-02-03","2022-02-03","2022-02-03","2022-02-03","2022-02-03","2022-02-03","2022-02-03","2022-02-03","2022-02-03","2022-02-03","2022-02-03","2022-02-01","2022-02-01","2022-02-01","2022-01-31","2022-01-31","2022-01-28","2022-01-28","2022-01-28","2022-01-26","2022-01-26","2022-01-21","2022-01-20","2022-01-19","2022-01-14","2022-01-14","2021-12-22","2021-12-17","2021-12-16","2021-12-16","2021-12-15","2021-12-15","2021-12-15","2021-12-15","2021-12-15","2021-12-15","2021-12-15","2021-12-15","2021-12-15","2021-12-15","2021-12-15","2021-12-15","2021-12-15","2021-12-03","2021-12-01","2021-12-01","2021-11-17","2021-11-12","2021-11-12","2021-11-03","2021-11-02","2021-11-02","2021-11-02","2021-11-01","2021-10-27","2021-10-26","2021-10-26","2021-10-20","2021-10-19","2021-10-13","2021-09-20","2021-09-17","2021-09-17","2021-09-14","2021-09-01","2021-08-27","2021-08-24","2021-08-13","2021-08-11","2021-08-06","2021-08-06","2021-08-05","2021-07-27","2021-07-27","2021-07-14","2021-06-30","2021-06-17","2021-06-16","2021-06-03","2021-05-28","2021-05-21","2021-05-21","2021-05-18","2021-05-11","2021-05-07","2021-05-05","2021-05-03","2021-05-03","2021-05-03","2021-05-03","2021-05-03","2021-05-03","2021-05-03","2021-05-03","2021-05-03","2021-04-30","2021-04-29","2021-04-29","2021-04-27","2021-04-27","2021-04-19","2021-04-14","2021-04-14","2021-04-13","2021-04-13","2021-04-13","2021-04-09","2021-04-07","2021-04-07","2021-03-17","2021-03-17","2021-03-05","2021-02-25","2021-02-24","2021-02-23","2021-02-23","2021-02-23","2021-02-23","2021-02-23","2021-02-23","2021-02-23","2021-02-23","2021-02-23","2021-02-23","2021-02-23","2021-02-23","2021-02-19","2021-02-19","2021-02-19","2021-02-19","2021-02-19","2021-02-17","2021-02-16","2021-02-16","2021-02-10","2021-02-05","2021-02-04","2021-02-04","2021-02-04","2021-02-04","2021-02-04","2021-02-04","2021-02-04","2021-02-04","2021-02-04","2021-02-04","2021-02-04","2021-02-04","2021-02-02","2021-01-29","2021-01-13","2020-12-21","2020-12-17","2020-12-10","2020-11-20","2020-11-17","2020-11-05","2020-11-02","2020-10-22","2020-10-22","2020-10-14","2020-09-17","2020-09-10","2020-08-21","2020-08-18","2020-08-18","2020-08-18","2020-08-14","2020-08-03","2020-07-31","2020-07-28","2020-07-23","2020-07-23","2020-07-15","2020-06-17","2020-06-09","2020-06-04","2020-06-04","2020-05-29","2020-05-22","2020-05-21","2020-05-15","2020-05-08","2020-05-01","2020-05-01","2020-05-01","2020-05-01","2020-05-01","2020-05-01","2020-05-01","2020-05-01","2020-04-30","2020-04-29","2020-04-29","2020-04-24","2020-04-23","2020-04-21","2020-04-21","2020-04-15","2020-03-18","2020-03-16","2020-03-09","2020-03-05","2020-02-27","2020-02-26","2020-02-26","2020-02-21","2020-02-21","2020-02-21","2020-02-21","2020-02-21","2020-02-21","2020-02-21","2020-02-21","2020-02-21","2020-02-21","2020-02-21","2020-02-20","2020-02-20","2020-02-20","2020-02-20","2020-02-20","2020-02-20","2020-02-20","2020-02-20","2020-02-20","2020-02-14","2020-02-14","2020-02-12","2020-02-12","2020-02-10","2020-02-10","2020-02-10","2020-02-07","2020-02-07","2020-02-06","2020-02-06","2020-02-06","2020-02-06","2020-02-06","2020-02-06","2020-02-06","2020-02-06","2020-02-06","2020-02-06","2020-02-06","2020-02-04","2020-01-15","2020-01-10","2019-11-21","2019-11-19","2019-11-08","2019-10-24","2019-10-24","2019-10-16","2019-09-30","2019-09-18","2019-09-09","2019-09-05","2019-09-04","2019-08-23","2019-08-19","2019-08-19","2019-08-19","2019-08-19","2019-08-02","2019-07-31","2019-07-25","2019-07-25","2019-07-17","2019-07-15","2019-07-10","2019-05-31","2019-05-24","2019-05-17","2019-05-16","2019-05-08","2019-05-03","2019-05-03","2019-05-03","2019-05-03","2019-05-03","2019-05-03","2019-05-03","2019-05-01","2019-05-01","2019-05-01","2019-04-25","2019-04-25","2019-04-17","2019-04-12","2019-04-12","2019-04-10","2019-04-08","2019-04-08","2019-03-29","2019-03-21","2019-03-21","2019-03-20","2019-03-20","2019-03-20","2019-03-19","2019-03-18","2019-03-18","2019-03-15","2019-03-11","2019-03-08","2019-02-28","2019-02-28","2019-02-27","2019-02-27","2019-02-26","2019-02-26","2019-02-26","2019-02-26","2019-02-26","2019-02-26","2019-02-22","2019-02-21","2019-02-21","2019-02-21","2019-02-21","2019-02-21","2019-02-21","2019-02-21","2019-02-21","2019-02-21","2019-02-21","2019-02-21","2019-02-21","2019-02-14","2019-02-13","2019-02-13","2019-02-11","2019-02-11","2019-02-08","2019-02-07","2019-02-07","2019-02-07","2019-02-07","2019-02-07","2019-02-07","2019-02-07","2019-02-07","2019-02-07","2019-02-07","2019-02-07","2019-02-07","2019-02-06","2019-02-05","2019-02-05","2019-02-04","2019-02-04","2019-01-29","2019-01-29","2019-01-29","2019-01-28","2019-01-28","2019-01-28","2019-01-28","2019-01-28","2019-01-28","2019-01-28","2019-01-28","2019-01-28","2019-01-16","2018-11-26","2018-11-19","2018-11-19","2018-11-19","2018-11-06","2018-10-25","2018-10-25","2018-10-17","2018-09-05","2018-08-23","2018-08-17","2018-08-17","2018-08-17","2018-08-17","2018-08-08","2018-08-07","2018-08-07","2018-07-26","2018-07-26","2018-07-18","2018-06-25","2018-06-08","2018-06-07","2018-06-07","2018-05-31","2018-05-16","2018-05-16","2018-05-10","2018-05-10","2018-05-10","2018-05-10","2018-05-10","2018-05-10","2018-05-10","2018-05-10","2018-05-09","2018-04-26","2018-04-26","2018-04-18","2018-03-28","2018-03-20","2018-03-13","2018-03-12","2018-03-08","2018-03-01","2018-03-01","2018-02-28","2018-02-26","2018-02-22","2018-02-22","2018-02-22","2018-02-21","2018-02-21","2018-02-21","2018-02-21","2018-02-21","2018-02-21","2018-02-21","2018-02-21","2018-02-21","2018-02-21","2018-02-21","2018-02-15","2018-02-14","2018-02-14","2018-02-14","2018-02-14","2018-02-14","2018-02-14","2018-02-14","2018-02-14","2018-02-14","2018-02-14","2018-02-14","2018-02-14","2018-02-14","2018-02-14","2018-02-14","2018-02-09","2018-02-06","2018-01-29","2018-01-17","2017-12-18","2017-12-11","2017-11-27","2017-11-21","2017-11-17","2017-11-13","2017-11-13","2017-11-09","2017-11-07","2017-11-03","2017-11-01","2017-11-01","2017-10-26","2017-10-26","2017-10-18","2017-10-10","2017-09-07","2017-09-07","2017-09-07","2017-09-07","2017-08-16","2017-08-16","2017-08-16","2017-08-16","2017-08-16","2017-08-15","2017-08-15","2017-08-15","2017-08-15","2017-07-28","2017-07-27","2017-07-27","2017-07-21","2017-07-18","2017-06-06","2017-05-31","2017-05-26","2017-05-26","2017-05-26","2017-05-26","2017-05-26","2017-05-26","2017-05-26","2017-05-26","2017-05-26","2017-05-24","2017-05-19","2017-05-17","2017-05-17","2017-05-03","2017-05-03","2017-04-27","2017-04-27"],"reportDate":["","2026-06-01","2026-06-03","","","2026-05-27","","","","2026-05-18","2026-05-18","2026-05-15","2026-05-14","2026-05-14","2026-05-14","","","","","","","2026-05-09","2026-05-06","2026-05-06","2026-05-06","2026-05-06","2026-05-06","2026-05-06","2026-05-06","","2026-03-28","2026-04-29","2026-04-30","","2026-04-29","","2026-04-17","","2026-04-14","2026-04-15","","2026-04-07","2026-04-07","","","2026-04-05","2026-04-05","2026-04-05","2026-04-05","2026-04-05","2026-04-05","2026-04-05","2026-04-01","2026-04-01","2026-04-01","2026-04-01","2026-04-01","2026-04-01","2026-04-01","2026-04-01","","","","2025-12-31","2026-03-23","2026-03-06","2026-03-01","2026-02-24","","","","2026-02-19","2026-02-19","2026-02-19","2026-02-19","2026-02-19","2026-02-19","2026-02-19","2026-02-19","","","","2026-02-05","2026-02-12","2026-02-12","2026-02-12","2026-02-12","2026-02-12","2026-02-12","","2025-12-31","2026-02-10","2026-02-02","","2026-01-21","","2026-01-20","2026-01-14","2025-12-10","","2025-12-01","","2025-11-14","","2025-11-06","","2025-09-27","2025-10-30","2025-10-15","","2025-08-27","2025-08-27","2025-08-21","2025-08-18","2025-08-15","2025-08-13","","2025-06-28","2025-07-30","2025-07-17","","2025-07-16","2025-07-16","","2025-06-12","","","2025-05-22","","2025-05-15","","2025-05-11","2025-03-29","2025-05-07","2025-04-23","2025-04-23","2025-04-23","2025-04-23","2025-04-23","2025-04-23","2025-04-23","2025-04-23","","2025-04-23","2025-04-16","2025-04-05","2025-04-05","2025-04-05","2025-04-05","2025-04-05","2025-04-05","2025-04-05","2025-04-05","2025-04-05","2025-04-05","2025-04-05","2025-04-01","2025-04-01","2025-04-01","2025-04-01","2025-04-01","2025-04-01","2025-04-01","2025-04-01","2025-04-01","2025-04-01","2025-04-01","2024-12-31","2025-03-14","2025-02-20","2025-02-20","2025-02-20","2025-02-20","2025-02-20","2025-02-20","2025-02-20","2025-02-20","2025-02-20","2025-02-20","2025-02-19","2025-02-19","2025-02-19","2025-02-19","2025-02-19","2025-02-19","2025-02-19","2025-02-19","","","2024-12-31","2025-02-10","","","2025-02-06","2025-01-15","2024-02-16","2024-11-15","","","2024-09-28","2024-11-04","2024-09-05","2024-10-16","2024-09-30","","2024-09-05","2024-09-05","2024-09-05","2024-08-16","2024-06-29","2024-07-31","2024-07-17","2024-07-11","","2024-07-03","2024-07-07","2024-07-03","2024-07-07","","","","2024-05-31","2024-05-31","","2024-05-24","2024-05-23","","","2024-05-15","2024-05-16","2024-05-15","","","2024-03-30","2024-05-01","2024-04-24","2024-04-24","2024-04-24","2024-04-24","2024-04-24","2024-04-24","2024-04-24","2024-04-24","2024-04-17","2024-04-01","2024-04-01","2024-04-01","2024-04-01","2024-04-01","2024-04-01","2024-04-01","2024-04-01","2024-04-01","2024-04-01","2024-04-01","2024-04-01","2024-03-28","","2023-12-31","2024-03-18","2024-03-08","2024-03-07","2024-03-07","2024-03-07","","2024-03-07","","2024-03-04","2024-02-21","2024-02-16","2024-02-16","2024-02-16","2024-02-16","2024-02-16","2024-02-16","2024-02-16","2024-02-16","2024-02-16","2024-02-16","2024-02-16","","","","","","2023-12-31","","","","2024-02-13","","","2024-01-17","2023-12-22","","","2023-12-12","","2023-11-24","","2023-11-15","","","2023-09-30","2023-11-02","2023-10-18","2023-09-29","2023-10-02","2023-09-11","2023-08-21","","2023-08-15","2023-08-15","2023-08-15","2023-07-01","2023-08-03","2023-07-19","","","2023-06-05","","2023-05-15","2023-05-15","2023-05-15","2023-05-11","2023-05-15","","","2023-04-01","","2023-05-11","2023-05-10","","2023-04-28","2023-04-28","2023-04-26","2023-04-26","2023-04-26","2023-04-26","2023-04-26","2023-04-26","2023-04-26","","2023-04-19","","2023-04-11","","","2023-03-17","2023-03-10","2023-03-01","2023-02-27","2023-02-27","2023-02-24","2023-02-27","2023-02-21","2022-12-31","2023-02-17","2023-02-17","2023-02-17","2023-02-17","2023-02-17","2023-02-17","2023-02-17","2023-02-17","2023-02-17","2023-02-17","2023-02-16","2023-02-17","2023-02-17","2023-02-13","2023-02-13","2023-02-13","2023-02-13","2023-02-13","2023-02-13","2023-02-13","2023-02-13","2023-02-13","2023-02-13","","","2023-02-14","2023-02-10","","2023-01-31","2023-01-31","2023-01-31","2023-01-31","2023-01-31","2023-01-31","2023-01-31","2023-01-31","2023-01-31","2023-01-31","2023-01-31","2023-02-02","2023-01-31","2023-01-31","2023-01-31","","2023-01-23","","2023-01-19","2023-01-18","2022-12-08","2022-11-15","2022-10-01","2022-11-02","2022-10-19","2022-10-10","2022-09-30","2022-07-06","2022-09-01","2022-08-15","2022-08-15","","2022-07-02","2022-08-02","2022-07-20","2022-07-06","2022-07-06","2022-07-06","2022-07-06","2022-07-06","","","2022-07-06","","2022-06-30","","2022-06-24","","","2022-06-16","","2022-06-16","2022-06-02","","2022-05-13","2022-04-27","2022-04-27","2022-04-27","2022-04-27","2022-04-27","2022-04-27","2022-04-27","2022-04-27","","2022-04-02","2022-04-26","2022-04-20","","2022-04-14","2022-04-06","","2022-04-05","","2022-04-04","2022-03-30","2022-03-31","2022-03-29","2022-03-29","2022-03-17","2022-03-14","2022-03-04","2022-02-23","2022-02-23","2022-02-23","2022-02-22","2022-02-22","2022-02-22","2022-02-22","2022-02-18","2022-02-18","2022-02-18","2022-02-18","2022-02-18","2022-02-18","2022-02-18","2022-02-18","2022-02-18","2022-02-18","2022-02-18","2022-02-18","2022-02-11","2022-02-11","2022-02-11","2022-02-11","2022-02-11","2022-02-11","2022-02-11","2022-02-11","2022-02-11","","","","2021-12-31","2022-02-01","2022-02-01","2022-02-01","2022-02-01","2022-02-01","2022-02-01","2022-02-01","2022-02-01","2022-02-01","2022-02-01","2022-02-01","2022-02-01","2022-02-01","","","2022-02-01","","2022-01-28","","","","","","","2022-01-18","2022-01-19","","","2021-12-18","2021-12-15","","2021-12-14","","","","","","","","","","","","","2021-12-14","2021-12-01","2021-11-29","2021-11-30","2021-11-15","2021-11-09","2021-11-04","2021-10-31","2021-10-31","2021-10-31","2021-10-29","2021-10-28","2021-10-27","2021-10-02","2021-10-26","2021-10-18","2021-10-15","2021-10-13","2021-09-16","2021-09-15","2021-09-15","2021-09-10","2021-08-30","2021-08-11","2021-08-20","2021-08-11","2021-08-09","2021-08-04","2021-08-04","2021-08-03","2021-07-03","2021-07-27","2021-07-14","2021-06-28","2021-06-15","2021-06-14","2021-06-01","","2021-05-19","2021-05-20","2021-05-14","2021-05-07","","2021-05-03","2021-04-29","2021-04-29","2021-04-29","2021-04-29","2021-04-29","2021-04-29","2021-04-29","2021-04-29","2021-04-29","2021-04-30","2021-04-29","2021-02-17","2021-04-03","2021-04-27","2021-04-16","2021-04-12","2021-04-14","2021-04-12","2021-04-09","2021-04-09","2021-04-07","2021-04-05","2021-04-05","2021-03-15","2021-03-17","2021-03-03","2021-02-23","2021-02-22","2021-02-19","2021-02-19","2021-02-19","2021-02-19","2021-02-19","2021-02-19","2021-02-19","2021-02-19","2021-02-19","2021-02-19","2021-02-19","2021-02-19","2021-02-17","2021-02-17","2021-02-17","2021-02-17","2021-02-17","2021-02-17","2021-02-11","","","2020-12-31","2021-02-02","2021-02-02","2021-02-02","2021-02-02","2021-02-02","2021-02-02","2021-02-02","2021-02-02","2021-02-02","2021-02-02","2021-02-02","2021-02-02","2021-02-02","","2021-01-13","2020-12-15","2020-12-15","2020-12-08","2020-11-18","2020-11-13","2020-11-03","2020-10-29","2020-09-26","2020-10-22","2020-10-14","2020-09-15","2020-09-08","2020-08-19","2020-08-14","2020-08-14","2020-08-14","2020-08-12","2020-07-30","2020-07-29","2020-07-24","2020-06-27","2020-07-23","2020-07-15","2020-06-15","2020-06-05","2020-06-02","2020-06-03","","2020-05-20","2020-05-20","2020-05-11","2020-04-29","2020-04-29","2020-04-29","2020-04-29","2020-04-29","2020-04-29","2020-04-29","2020-04-29","2020-04-29","2020-04-30","","2020-04-29","2020-04-23","2020-04-23","2020-03-28","2020-04-21","2020-04-15","2020-04-29","2019-12-31","2020-03-05","2020-03-04","2020-02-26","2020-02-25","2020-02-25","2020-02-19","2020-02-19","2020-02-19","2020-02-19","2020-02-19","2020-02-19","2020-02-19","2020-02-19","2020-02-19","2020-02-19","2020-02-19","2020-02-18","2020-02-18","2020-02-18","2020-02-18","2020-02-18","2020-02-18","2020-02-18","2020-02-18","2020-02-19","2020-02-12","","2020-02-10","","2020-02-06","2020-02-06","2020-02-06","2019-12-31","","2020-02-04","2020-02-04","2020-02-04","2020-02-04","2020-02-04","2020-02-04","2020-02-04","2020-02-04","2020-02-04","2020-02-04","2020-02-04","2020-02-04","2020-01-15","2020-01-10","2019-11-20","2019-11-15","2019-11-01","2019-09-28","2019-10-24","2019-10-16","2019-08-30","2019-09-18","2019-09-05","2019-09-01","2019-08-30","2019-08-21","2019-08-15","2019-08-15","2019-08-15","2019-08-15","2019-07-31","2019-07-29","2019-06-29","2019-07-25","2019-07-17","2019-07-15","","","2019-05-22","2019-05-16","2019-05-14","2019-05-06","2019-05-01","2019-05-01","2019-05-01","2019-05-01","2019-05-01","2019-05-01","2019-05-01","2019-04-29","2019-04-29","2019-04-30","2019-03-30","2019-04-25","2019-04-17","","2019-04-12","","2019-04-08","","","2019-03-19","","","","2019-04-30","","","","","","","","","2019-02-26","","2019-02-25","2019-02-25","2019-02-25","2019-02-25","2019-02-25","2019-02-25","","2019-02-19","2019-02-19","2019-02-20","2019-02-19","2019-02-19","2019-02-19","2019-02-19","2019-02-19","2019-02-19","2019-02-19","2019-02-19","2019-02-19","","","2019-02-08","2018-12-31","","","2019-02-05","2019-02-05","2019-02-05","2019-02-05","2019-02-05","2019-02-05","2019-02-05","2019-02-05","2019-02-05","2019-02-05","2019-02-05","","","","2019-02-05","","","2019-01-27","","","","","","","","","2019-01-28","2019-01-28","","2019-01-16","2018-11-21","2018-11-19","2018-11-15","2018-11-15","2018-11-06","2018-09-29","2018-10-25","2018-10-17","2018-07-31","2018-08-22","2018-08-15","2018-08-15","2018-08-15","2018-08-15","2018-05-23","2018-08-03","2018-08-03","2018-06-30","2018-07-23","2018-07-18","2018-06-25","2018-06-06","2018-06-05","2018-06-06","","2018-05-15","2018-05-15","2018-05-09","2018-05-09","2018-05-09","2018-05-09","2018-05-09","2018-05-09","2018-05-09","2018-05-09","2018-05-09","2018-03-31","2018-04-26","2018-04-18","2018-05-09","2018-03-20","2018-03-09","2018-03-08","2018-03-06","2018-03-01","2018-02-27","2018-02-26","2018-02-22","2018-02-20","2018-02-20","2018-02-21","2018-02-19","2018-02-19","2018-02-19","2018-02-19","2018-02-19","2018-02-19","2018-02-19","2018-02-19","2018-02-19","2018-02-19","2018-02-19","2017-12-31","2018-02-12","2018-02-12","2018-02-12","2018-01-03","2018-02-12","2018-02-12","2018-02-12","2018-02-12","2018-02-12","2018-02-12","2018-02-12","2018-02-12","2018-02-12","2018-02-12","","","2018-02-06","","2018-01-17","2017-12-14","2017-12-07","2017-11-22","2017-11-20","2017-11-15","2017-11-10","2017-11-09","2017-11-07","2017-11-03","2017-11-02","2017-11-01","2017-10-30","2017-09-30","2017-10-26","2017-10-18","","2017-09-06","2017-09-05","2017-09-05","2017-09-05","2017-08-15","2017-08-15","2017-08-15","2017-08-15","2017-08-15","2017-08-14","2017-08-14","2017-08-14","2017-08-14","2017-07-26","2017-07-01","2017-07-27","2017-07-19","2017-07-14","2017-06-02","","2017-05-24","2017-05-24","2017-05-24","2017-05-24","2017-05-24","2017-05-24","2017-05-24","2017-05-24","2017-05-25","2017-05-24","2017-05-18","2017-05-16","2017-05-15","2017-05-02","2017-05-01","2017-04-01","2017-04-27"],"acceptanceDateTime":["2026-06-11T21:13:46.000Z","2026-06-04T16:36:22.000Z","2026-06-04T16:36:08.000Z","2026-06-03T13:51:27.000Z","2026-05-29T18:17:36.000Z","2026-05-28T15:55:18.000Z","2026-05-27T14:28:02.000Z","2026-05-26T19:06:40.000Z","2026-05-22T15:53:47.000Z","2026-05-19T18:51:13.000Z","2026-05-19T18:48:28.000Z","2026-05-18T18:12:45.000Z","2026-05-18T18:11:52.000Z","2026-05-18T18:11:42.000Z","2026-05-18T18:11:34.000Z","2026-05-15T16:06:39.000Z","2026-05-15T14:07:47.000Z","2026-05-14T20:01:31.000Z","2026-05-14T17:21:47.000Z","2026-05-14T15:39:28.000Z","2026-05-14T14:19:20.000Z","2026-05-11T20:17:06.000Z","2026-05-08T20:15:31.000Z","2026-05-08T16:55:26.000Z","2026-05-08T16:55:18.000Z","2026-05-08T16:55:09.000Z","2026-05-08T16:54:55.000Z","2026-05-08T16:54:46.000Z","2026-05-08T16:54:32.000Z","2026-05-06T14:20:51.000Z","2026-04-30T20:48:39.000Z","2026-04-30T11:05:48.000Z","2026-04-30T11:01:50.000Z","2026-04-29T22:22:12.000Z","2026-04-29T20:39:55.000Z","2026-04-29T16:45:54.000Z","2026-04-20T15:55:38.000Z","2026-04-17T20:14:03.000Z","2026-04-16T20:16:05.000Z","2026-04-15T11:14:48.000Z","2026-04-14T20:23:45.000Z","2026-04-08T20:46:04.000Z","2026-04-08T20:45:40.000Z","2026-04-07T14:29:14.000Z","2026-04-07T14:25:10.000Z","2026-04-06T19:58:50.000Z","2026-04-06T19:58:14.000Z","2026-04-06T19:57:47.000Z","2026-04-06T19:57:20.000Z","2026-04-06T19:56:44.000Z","2026-04-06T19:56:23.000Z","2026-04-06T19:55:50.000Z","2026-04-02T20:23:38.000Z","2026-04-02T20:23:28.000Z","2026-04-02T20:23:19.000Z","2026-04-02T20:23:09.000Z","2026-04-02T20:22:55.000Z","2026-04-02T20:22:43.000Z","2026-04-02T20:22:28.000Z","2026-04-02T20:22:14.000Z","2026-03-26T22:22:35.000Z","2026-03-25T21:32:13.000Z","2026-03-23T20:55:01.000Z","2026-03-23T20:53:14.000Z","2026-03-23T20:52:02.000Z","2026-03-06T21:08:37.000Z","2026-03-05T19:23:06.000Z","2026-02-26T17:59:45.000Z","2026-02-25T21:59:14.000Z","2026-02-25T19:17:59.000Z","2026-02-24T21:00:39.000Z","2026-02-23T23:16:34.000Z","2026-02-23T23:16:24.000Z","2026-02-23T23:16:14.000Z","2026-02-23T23:16:05.000Z","2026-02-23T23:15:51.000Z","2026-02-23T23:15:34.000Z","2026-02-23T23:15:19.000Z","2026-02-23T23:14:17.000Z","2026-02-20T17:07:53.000Z","2026-02-20T15:32:15.000Z","2026-02-20T15:27:29.000Z","2026-02-17T19:00:53.000Z","2026-02-17T19:00:24.000Z","2026-02-17T19:00:14.000Z","2026-02-17T19:00:06.000Z","2026-02-17T18:59:51.000Z","2026-02-17T18:59:18.000Z","2026-02-17T18:59:09.000Z","2026-02-12T21:17:21.000Z","2026-02-10T23:48:26.000Z","2026-02-10T12:02:21.000Z","2026-02-04T20:19:49.000Z","2026-02-02T20:18:47.000Z","2026-01-22T20:32:07.000Z","2026-01-21T18:09:44.000Z","2026-01-20T12:40:28.000Z","2026-01-14T12:31:18.000Z","2025-12-11T16:09:06.000Z","2025-12-10T19:54:20.000Z","2025-12-03T16:53:17.000Z","2025-12-01T16:13:49.000Z","2025-11-18T19:54:07.000Z","2025-11-17T14:55:42.000Z","2025-11-07T14:41:54.000Z","2025-11-06T15:59:47.000Z","2025-10-30T20:13:30.000Z","2025-10-30T11:03:29.000Z","2025-10-15T11:33:08.000Z","2025-09-18T15:11:07.000Z","2025-08-27T16:58:14.000Z","2025-08-27T16:55:23.000Z","2025-08-21T20:24:58.000Z","2025-08-20T21:06:08.000Z","2025-08-20T17:48:44.000Z","2025-08-14T18:22:29.000Z","2025-08-13T20:06:06.000Z","2025-07-30T21:18:33.000Z","2025-07-30T10:03:37.000Z","2025-07-21T18:45:16.000Z","2025-07-17T19:29:10.000Z","2025-07-16T20:20:17.000Z","2025-07-16T12:27:28.000Z","2025-07-03T16:17:20.000Z","2025-06-13T19:23:18.000Z","2025-06-06T16:00:06.000Z","2025-05-30T16:16:52.000Z","2025-05-23T15:36:34.000Z","2025-05-22T14:00:39.000Z","2025-05-19T17:04:47.000Z","2025-05-14T14:45:26.000Z","2025-05-12T20:15:35.000Z","2025-05-07T20:13:39.000Z","2025-05-07T10:02:35.000Z","2025-04-25T20:58:33.000Z","2025-04-25T17:14:43.000Z","2025-04-25T17:13:53.000Z","2025-04-25T17:13:01.000Z","2025-04-25T17:12:08.000Z","2025-04-25T17:11:08.000Z","2025-04-25T17:10:12.000Z","2025-04-25T17:09:24.000Z","2025-04-24T00:39:15.000Z","2025-04-23T20:26:01.000Z","2025-04-16T11:14:25.000Z","2025-04-08T21:22:47.000Z","2025-04-08T20:12:56.000Z","2025-04-08T20:12:24.000Z","2025-04-08T20:11:46.000Z","2025-04-08T20:11:17.000Z","2025-04-08T20:10:39.000Z","2025-04-08T20:10:01.000Z","2025-04-08T20:09:31.000Z","2025-04-08T20:08:54.000Z","2025-04-08T20:08:24.000Z","2025-04-08T20:07:40.000Z","2025-04-03T19:55:43.000Z","2025-04-03T19:55:04.000Z","2025-04-03T19:54:35.000Z","2025-04-03T19:53:54.000Z","2025-04-03T19:53:15.000Z","2025-04-03T19:52:38.000Z","2025-04-03T19:51:57.000Z","2025-04-03T19:51:20.000Z","2025-04-03T19:50:30.000Z","2025-04-03T19:49:31.000Z","2025-04-03T19:48:54.000Z","2025-03-14T22:04:10.000Z","2025-03-14T21:58:03.000Z","2025-02-25T00:41:48.000Z","2025-02-25T00:41:07.000Z","2025-02-25T00:40:12.000Z","2025-02-25T00:38:04.000Z","2025-02-25T00:37:40.000Z","2025-02-25T00:37:19.000Z","2025-02-25T00:36:54.000Z","2025-02-25T00:36:20.000Z","2025-02-25T00:35:52.000Z","2025-02-25T00:35:19.000Z","2025-02-22T01:33:54.000Z","2025-02-22T01:30:16.000Z","2025-02-22T01:26:23.000Z","2025-02-22T01:25:53.000Z","2025-02-22T01:25:28.000Z","2025-02-22T01:24:58.000Z","2025-02-22T01:24:20.000Z","2025-02-22T01:23:57.000Z","2025-02-21T15:35:28.000Z","2025-02-14T14:44:09.000Z","2025-02-12T21:20:44.000Z","2025-02-12T18:18:29.000Z","2025-02-12T16:15:41.000Z","2025-02-10T21:40:35.000Z","2025-02-06T11:17:15.000Z","2025-01-15T12:08:52.000Z","2024-12-03T21:16:16.000Z","2024-11-19T19:47:14.000Z","2024-11-18T17:35:33.000Z","2024-11-14T18:22:34.000Z","2024-11-04T22:22:06.000Z","2024-11-04T11:03:42.000Z","2024-10-17T22:21:45.000Z","2024-10-16T11:13:50.000Z","2024-10-02T17:09:55.000Z","2024-09-10T14:30:07.000Z","2024-09-06T17:36:41.000Z","2024-09-06T17:33:48.000Z","2024-09-05T21:20:31.000Z","2024-08-20T20:11:06.000Z","2024-07-31T20:28:05.000Z","2024-07-31T10:01:37.000Z","2024-07-17T11:07:32.000Z","2024-07-15T13:56:19.000Z","2024-07-11T18:20:04.000Z","2024-07-08T19:28:15.000Z","2024-07-08T19:27:17.000Z","2024-07-08T19:25:29.000Z","2024-07-08T10:15:36.000Z","2024-07-03T17:23:50.000Z","2024-07-03T16:54:15.000Z","2024-06-07T17:30:03.000Z","2024-06-04T19:31:51.000Z","2024-06-04T19:30:38.000Z","2024-05-31T19:35:48.000Z","2024-05-29T14:55:57.000Z","2024-05-28T23:04:07.000Z","2024-05-28T20:18:23.000Z","2024-05-23T14:24:00.000Z","2024-05-17T19:05:04.000Z","2024-05-17T19:03:57.000Z","2024-05-17T19:02:42.000Z","2024-05-16T15:30:14.000Z","2024-05-02T21:31:12.000Z","2024-05-01T20:50:47.000Z","2024-05-01T10:03:35.000Z","2024-04-25T17:49:10.000Z","2024-04-25T17:48:24.000Z","2024-04-25T17:47:40.000Z","2024-04-25T17:46:56.000Z","2024-04-25T17:46:15.000Z","2024-04-25T17:45:20.000Z","2024-04-25T17:44:27.000Z","2024-04-24T20:57:54.000Z","2024-04-17T11:05:14.000Z","2024-04-03T19:17:43.000Z","2024-04-03T19:17:07.000Z","2024-04-03T19:16:26.000Z","2024-04-03T19:15:28.000Z","2024-04-03T19:14:49.000Z","2024-04-03T19:13:50.000Z","2024-04-03T19:13:03.000Z","2024-04-03T19:12:26.000Z","2024-04-03T19:11:47.000Z","2024-04-03T19:10:52.000Z","2024-04-03T19:10:15.000Z","2024-04-03T19:09:39.000Z","2024-03-28T20:04:05.000Z","2024-03-25T20:26:24.000Z","2024-03-18T21:01:14.000Z","2024-03-18T20:58:22.000Z","2024-03-12T20:17:34.000Z","2024-03-11T21:51:12.000Z","2024-03-11T20:19:42.000Z","2024-03-11T20:19:01.000Z","2024-03-08T16:45:19.000Z","2024-03-07T21:55:33.000Z","2024-03-07T19:43:08.000Z","2024-03-04T12:23:16.000Z","2024-02-22T22:03:20.000Z","2024-02-21T22:05:19.000Z","2024-02-21T22:01:10.000Z","2024-02-21T22:00:51.000Z","2024-02-21T21:59:26.000Z","2024-02-21T21:59:21.000Z","2024-02-21T21:58:38.000Z","2024-02-21T21:57:24.000Z","2024-02-21T21:56:57.000Z","2024-02-21T21:55:04.000Z","2024-02-21T21:55:00.000Z","2024-02-21T21:53:27.000Z","2024-02-21T20:13:15.000Z","2024-02-20T21:13:25.000Z","2024-02-16T22:11:49.000Z","2024-02-16T19:29:40.000Z","2024-02-16T16:43:18.000Z","2024-02-15T02:58:44.000Z","2024-02-14T21:16:20.000Z","2024-02-14T15:02:59.000Z","2024-02-13T22:04:40.000Z","2024-02-13T21:32:33.000Z","2024-02-13T20:45:05.000Z","2024-01-24T19:27:15.000Z","2024-01-17T12:02:47.000Z","2023-12-27T17:08:04.000Z","2023-12-22T18:24:39.000Z","2023-12-22T15:23:32.000Z","2023-12-14T16:24:00.000Z","2023-12-01T21:37:10.000Z","2023-11-28T18:43:27.000Z","2023-11-24T16:29:19.000Z","2023-11-17T21:13:07.000Z","2023-11-13T18:12:33.000Z","2023-11-06T18:45:11.000Z","2023-11-02T20:30:03.000Z","2023-11-02T10:02:15.000Z","2023-10-18T11:05:48.000Z","2023-10-03T19:43:14.000Z","2023-10-02T12:53:59.000Z","2023-09-12T22:28:25.000Z","2023-08-24T12:15:15.000Z","2023-08-21T15:20:20.000Z","2023-08-17T20:28:16.000Z","2023-08-17T20:27:10.000Z","2023-08-17T20:25:15.000Z","2023-08-03T20:44:13.000Z","2023-08-03T10:03:33.000Z","2023-07-19T11:21:41.000Z","2023-06-06T16:11:52.000Z","2023-06-06T15:43:41.000Z","2023-06-05T11:51:49.000Z","2023-05-17T20:06:30.000Z","2023-05-17T20:04:10.000Z","2023-05-17T20:02:25.000Z","2023-05-17T20:01:37.000Z","2023-05-15T20:09:33.000Z","2023-05-15T20:05:26.000Z","2023-05-15T18:58:11.000Z","2023-05-12T16:30:04.000Z","2023-05-11T16:18:54.000Z","2023-05-11T15:53:07.000Z","2023-05-11T10:40:20.000Z","2023-05-10T10:01:16.000Z","2023-05-04T13:14:27.000Z","2023-04-28T20:11:40.000Z","2023-04-28T20:10:37.000Z","2023-04-28T20:09:42.000Z","2023-04-28T20:08:49.000Z","2023-04-28T20:07:12.000Z","2023-04-28T20:05:35.000Z","2023-04-28T20:02:55.000Z","2023-04-28T20:01:44.000Z","2023-04-26T20:58:22.000Z","2023-04-24T19:30:04.000Z","2023-04-19T13:11:54.000Z","2023-04-12T17:20:37.000Z","2023-04-11T21:10:39.000Z","2023-03-30T15:30:06.000Z","2023-03-17T20:09:24.000Z","2023-03-17T15:45:00.000Z","2023-03-13T20:02:34.000Z","2023-03-01T21:18:37.000Z","2023-03-01T21:04:05.000Z","2023-03-01T21:02:27.000Z","2023-02-28T21:11:46.000Z","2023-02-27T21:51:55.000Z","2023-02-23T21:05:14.000Z","2023-02-22T23:45:52.000Z","2023-02-21T21:10:44.000Z","2023-02-21T21:09:38.000Z","2023-02-21T21:09:00.000Z","2023-02-21T21:08:04.000Z","2023-02-21T21:07:32.000Z","2023-02-21T21:06:56.000Z","2023-02-21T21:06:28.000Z","2023-02-21T21:05:39.000Z","2023-02-21T21:04:43.000Z","2023-02-21T21:04:34.000Z","2023-02-21T21:03:34.000Z","2023-02-21T21:02:53.000Z","2023-02-21T21:02:05.000Z","2023-02-15T21:11:45.000Z","2023-02-15T21:11:18.000Z","2023-02-15T21:10:35.000Z","2023-02-15T21:09:35.000Z","2023-02-15T21:08:48.000Z","2023-02-15T21:08:03.000Z","2023-02-15T21:07:19.000Z","2023-02-15T21:06:43.000Z","2023-02-15T21:06:02.000Z","2023-02-15T21:05:21.000Z","2023-02-14T18:12:01.000Z","2023-02-14T17:38:00.000Z","2023-02-14T11:09:43.000Z","2023-02-13T11:02:23.000Z","2023-02-09T16:19:19.000Z","2023-02-02T21:28:52.000Z","2023-02-02T21:22:56.000Z","2023-02-02T21:21:40.000Z","2023-02-02T21:20:45.000Z","2023-02-02T21:19:34.000Z","2023-02-02T21:18:54.000Z","2023-02-02T21:18:00.000Z","2023-02-02T21:16:57.000Z","2023-02-02T21:15:11.000Z","2023-02-02T21:12:47.000Z","2023-02-02T21:12:00.000Z","2023-02-02T21:11:17.000Z","2023-02-02T21:09:41.000Z","2023-02-02T21:08:57.000Z","2023-02-02T21:08:10.000Z","2023-01-26T13:52:13.000Z","2023-01-23T21:35:32.000Z","2023-01-20T20:00:22.000Z","2023-01-20T13:36:06.000Z","2023-01-18T13:03:28.000Z","2022-12-09T21:08:22.000Z","2022-11-17T20:56:58.000Z","2022-11-02T21:14:57.000Z","2022-11-02T10:02:03.000Z","2022-10-19T11:56:24.000Z","2022-10-11T12:11:24.000Z","2022-10-04T20:12:31.000Z","2022-09-16T20:45:43.000Z","2022-09-06T20:20:10.000Z","2022-08-17T20:08:42.000Z","2022-08-17T20:06:58.000Z","2022-08-10T18:56:01.000Z","2022-08-02T15:57:19.000Z","2022-08-02T10:07:08.000Z","2022-07-20T12:03:27.000Z","2022-07-14T12:28:55.000Z","2022-07-14T12:24:44.000Z","2022-07-08T22:22:06.000Z","2022-07-08T22:21:24.000Z","2022-07-08T20:43:08.000Z","2022-07-06T23:08:11.000Z","2022-07-06T23:04:51.000Z","2022-07-06T21:21:21.000Z","2022-06-30T20:07:19.000Z","2022-06-30T20:06:13.000Z","2022-06-27T12:21:43.000Z","2022-06-27T12:19:23.000Z","2022-06-24T21:26:39.000Z","2022-06-17T10:03:40.000Z","2022-06-17T10:02:17.000Z","2022-06-16T11:48:51.000Z","2022-06-16T11:46:02.000Z","2022-06-06T20:04:26.000Z","2022-05-24T20:23:09.000Z","2022-05-17T20:30:15.000Z","2022-04-29T20:16:36.000Z","2022-04-29T20:15:50.000Z","2022-04-29T20:14:02.000Z","2022-04-29T20:10:12.000Z","2022-04-29T20:07:44.000Z","2022-04-29T20:06:14.000Z","2022-04-29T20:04:45.000Z","2022-04-27T20:37:36.000Z","2022-04-26T21:06:56.000Z","2022-04-26T20:40:20.000Z","2022-04-26T10:04:20.000Z","2022-04-20T12:06:03.000Z","2022-04-14T23:54:55.000Z","2022-04-14T23:53:34.000Z","2022-04-08T20:24:13.000Z","2022-04-05T22:59:00.000Z","2022-04-05T22:57:50.000Z","2022-04-04T12:54:28.000Z","2022-04-04T12:09:11.000Z","2022-04-01T20:04:13.000Z","2022-04-01T20:02:58.000Z","2022-03-31T20:13:36.000Z","2022-03-31T20:08:07.000Z","2022-03-17T20:04:59.000Z","2022-03-16T20:02:03.000Z","2022-03-08T21:02:21.000Z","2022-03-01T21:09:43.000Z","2022-02-25T00:45:20.000Z","2022-02-25T00:44:06.000Z","2022-02-24T21:05:43.000Z","2022-02-24T21:03:59.000Z","2022-02-24T21:02:46.000Z","2022-02-24T21:01:19.000Z","2022-02-23T21:22:33.000Z","2022-02-23T21:21:13.000Z","2022-02-23T21:18:57.000Z","2022-02-23T21:16:57.000Z","2022-02-23T21:12:15.000Z","2022-02-23T21:11:00.000Z","2022-02-23T21:09:36.000Z","2022-02-23T21:08:27.000Z","2022-02-23T21:06:42.000Z","2022-02-23T21:05:21.000Z","2022-02-23T21:03:55.000Z","2022-02-23T21:02:25.000Z","2022-02-15T21:07:48.000Z","2022-02-15T21:07:04.000Z","2022-02-15T21:06:30.000Z","2022-02-15T21:05:51.000Z","2022-02-15T21:05:13.000Z","2022-02-15T21:04:29.000Z","2022-02-15T21:03:56.000Z","2022-02-15T21:02:55.000Z","2022-02-15T21:01:34.000Z","2022-02-14T19:34:29.000Z","2022-02-12T01:01:48.000Z","2022-02-10T13:11:40.000Z","2022-02-04T22:03:05.000Z","2022-02-03T21:26:59.000Z","2022-02-03T21:26:02.000Z","2022-02-03T21:24:45.000Z","2022-02-03T21:24:01.000Z","2022-02-03T21:22:56.000Z","2022-02-03T21:21:39.000Z","2022-02-03T21:20:37.000Z","2022-02-03T21:18:47.000Z","2022-02-03T21:17:41.000Z","2022-02-03T21:16:54.000Z","2022-02-03T21:15:05.000Z","2022-02-03T21:12:52.000Z","2022-02-03T21:10:52.000Z","2022-02-01T22:01:10.000Z","2022-02-01T21:36:02.000Z","2022-02-01T11:05:19.000Z","2022-01-31T13:54:30.000Z","2022-01-31T13:50:51.000Z","2022-01-31T05:15:12.000Z","2022-01-28T22:02:22.000Z","2022-01-28T19:07:19.000Z","2022-01-26T22:38:15.000Z","2022-01-26T21:49:29.000Z","2022-01-21T14:30:03.000Z","2022-01-20T23:07:54.000Z","2022-01-19T22:04:38.000Z","2022-01-14T21:32:42.000Z","2022-01-14T21:31:27.000Z","2021-12-22T21:02:34.000Z","2021-12-17T21:01:32.000Z","2021-12-16T22:16:58.000Z","2021-12-16T22:14:25.000Z","2021-12-15T21:35:21.000Z","2021-12-15T21:33:43.000Z","2021-12-15T21:31:54.000Z","2021-12-15T21:28:31.000Z","2021-12-15T21:26:49.000Z","2021-12-15T21:25:22.000Z","2021-12-15T21:23:55.000Z","2021-12-15T21:19:59.000Z","2021-12-15T21:18:55.000Z","2021-12-15T21:17:34.000Z","2021-12-15T21:16:07.000Z","2021-12-15T13:11:13.000Z","2021-12-15T13:10:13.000Z","2021-12-03T21:02:40.000Z","2021-12-01T21:13:14.000Z","2021-12-01T13:13:14.000Z","2021-11-17T23:04:19.000Z","2021-11-12T21:06:43.000Z","2021-11-12T21:05:17.000Z","2021-11-03T13:06:25.000Z","2021-11-02T20:36:42.000Z","2021-11-02T20:34:38.000Z","2021-11-02T20:22:53.000Z","2021-11-01T20:03:35.000Z","2021-10-27T13:07:35.000Z","2021-10-26T17:06:11.000Z","2021-10-26T10:03:56.000Z","2021-10-20T20:03:51.000Z","2021-10-19T20:03:11.000Z","2021-10-13T12:06:04.000Z","2021-09-20T20:04:56.000Z","2021-09-17T20:05:51.000Z","2021-09-17T20:04:46.000Z","2021-09-14T20:07:12.000Z","2021-09-01T20:05:03.000Z","2021-08-27T20:35:46.000Z","2021-08-24T20:04:38.000Z","2021-08-13T20:02:50.000Z","2021-08-11T20:06:03.000Z","2021-08-06T20:08:35.000Z","2021-08-06T20:07:02.000Z","2021-08-05T20:05:20.000Z","2021-07-27T19:08:20.000Z","2021-07-27T10:04:06.000Z","2021-07-14T20:10:29.000Z","2021-06-30T20:02:01.000Z","2021-06-17T20:06:57.000Z","2021-06-16T20:04:23.000Z","2021-06-03T20:07:39.000Z","2021-05-28T12:36:08.000Z","2021-05-21T20:06:50.000Z","2021-05-21T20:03:57.000Z","2021-05-18T20:02:02.000Z","2021-05-11T20:05:22.000Z","2021-05-07T21:09:22.000Z","2021-05-05T20:05:53.000Z","2021-05-03T20:12:59.000Z","2021-05-03T20:12:22.000Z","2021-05-03T20:11:42.000Z","2021-05-03T20:10:55.000Z","2021-05-03T20:09:58.000Z","2021-05-03T20:09:28.000Z","2021-05-03T20:08:37.000Z","2021-05-03T20:07:59.000Z","2021-05-03T20:07:16.000Z","2021-04-30T20:29:04.000Z","2021-04-29T20:09:38.000Z","2021-04-29T20:04:45.000Z","2021-04-27T17:52:21.000Z","2021-04-27T10:06:09.000Z","2021-04-16T23:20:03.000Z","2021-04-14T23:01:28.000Z","2021-04-14T12:11:27.000Z","2021-04-13T20:07:51.000Z","2021-04-13T20:06:49.000Z","2021-04-13T20:05:39.000Z","2021-04-09T20:03:29.000Z","2021-04-07T20:09:24.000Z","2021-04-07T20:08:16.000Z","2021-03-17T20:06:26.000Z","2021-03-17T20:03:20.000Z","2021-03-05T21:17:48.000Z","2021-02-25T21:03:54.000Z","2021-02-24T21:13:02.000Z","2021-02-23T21:18:15.000Z","2021-02-23T21:16:38.000Z","2021-02-23T21:16:10.000Z","2021-02-23T21:10:08.000Z","2021-02-23T21:09:23.000Z","2021-02-23T21:08:47.000Z","2021-02-23T21:08:18.000Z","2021-02-23T21:06:08.000Z","2021-02-23T21:05:31.000Z","2021-02-23T21:04:33.000Z","2021-02-23T21:03:12.000Z","2021-02-23T21:02:24.000Z","2021-02-19T21:16:42.000Z","2021-02-19T21:16:24.000Z","2021-02-19T21:11:17.000Z","2021-02-19T21:10:23.000Z","2021-02-19T21:09:51.000Z","2021-02-17T21:37:04.000Z","2021-02-16T21:13:57.000Z","2021-02-16T17:23:49.000Z","2021-02-10T15:52:42.000Z","2021-02-05T17:55:20.000Z","2021-02-04T21:28:49.000Z","2021-02-04T21:16:36.000Z","2021-02-04T21:16:03.000Z","2021-02-04T21:15:07.000Z","2021-02-04T21:13:30.000Z","2021-02-04T21:12:49.000Z","2021-02-04T21:12:07.000Z","2021-02-04T21:11:02.000Z","2021-02-04T21:09:59.000Z","2021-02-04T21:08:38.000Z","2021-02-04T21:07:57.000Z","2021-02-04T21:07:25.000Z","2021-02-02T11:06:51.000Z","2021-01-29T14:56:51.000Z","2021-01-13T13:00:46.000Z","2020-12-21T21:45:39.000Z","2020-12-17T21:18:45.000Z","2020-12-10T21:20:44.000Z","2020-11-20T21:06:04.000Z","2020-11-17T21:06:57.000Z","2020-11-05T21:02:02.000Z","2020-11-02T21:14:43.000Z","2020-10-22T19:58:31.000Z","2020-10-22T10:15:35.000Z","2020-10-14T11:59:15.000Z","2020-09-17T20:33:35.000Z","2020-09-10T20:01:34.000Z","2020-08-21T20:15:37.000Z","2020-08-18T20:19:19.000Z","2020-08-18T20:17:46.000Z","2020-08-18T20:16:20.000Z","2020-08-14T20:03:24.000Z","2020-08-03T20:05:44.000Z","2020-07-31T21:22:51.000Z","2020-07-28T20:25:12.000Z","2020-07-23T18:21:14.000Z","2020-07-23T10:04:48.000Z","2020-07-15T12:46:16.000Z","2020-06-17T20:01:29.000Z","2020-06-09T20:09:48.000Z","2020-06-04T20:41:52.000Z","2020-06-04T20:38:35.000Z","2020-05-29T20:03:37.000Z","2020-05-22T20:03:28.000Z","2020-05-21T17:34:53.000Z","2020-05-15T20:14:21.000Z","2020-05-08T20:03:53.000Z","2020-05-01T20:35:52.000Z","2020-05-01T20:35:05.000Z","2020-05-01T20:34:21.000Z","2020-05-01T20:31:43.000Z","2020-05-01T20:31:00.000Z","2020-05-01T20:30:10.000Z","2020-05-01T20:29:08.000Z","2020-05-01T20:27:46.000Z","2020-04-30T21:02:41.000Z","2020-04-29T20:06:53.000Z","2020-04-29T18:47:03.000Z","2020-04-24T10:11:13.000Z","2020-04-23T13:32:12.000Z","2020-04-21T10:14:12.000Z","2020-04-21T10:04:23.000Z","2020-04-15T11:57:32.000Z","2020-03-18T20:05:37.000Z","2020-03-16T20:07:35.000Z","2020-03-09T20:02:04.000Z","2020-03-05T22:21:49.000Z","2020-02-27T21:12:57.000Z","2020-02-26T21:06:59.000Z","2020-02-26T21:05:00.000Z","2020-02-21T21:08:19.000Z","2020-02-21T21:07:30.000Z","2020-02-21T21:07:05.000Z","2020-02-21T21:06:14.000Z","2020-02-21T21:05:31.000Z","2020-02-21T21:05:00.000Z","2020-02-21T21:04:25.000Z","2020-02-21T21:04:03.000Z","2020-02-21T21:03:15.000Z","2020-02-21T21:02:44.000Z","2020-02-21T21:02:10.000Z","2020-02-20T22:14:14.000Z","2020-02-20T22:12:10.000Z","2020-02-20T22:08:46.000Z","2020-02-20T22:07:30.000Z","2020-02-20T22:06:02.000Z","2020-02-20T22:00:20.000Z","2020-02-20T21:58:49.000Z","2020-02-20T21:40:03.000Z","2020-02-20T21:17:27.000Z","2020-02-14T21:04:59.000Z","2020-02-14T18:30:06.000Z","2020-02-12T21:02:54.000Z","2020-02-12T13:02:49.000Z","2020-02-10T21:06:16.000Z","2020-02-10T21:05:38.000Z","2020-02-10T21:04:32.000Z","2020-02-07T15:15:35.000Z","2020-02-07T13:45:32.000Z","2020-02-06T21:23:44.000Z","2020-02-06T21:22:28.000Z","2020-02-06T21:21:24.000Z","2020-02-06T21:20:27.000Z","2020-02-06T21:19:32.000Z","2020-02-06T21:18:11.000Z","2020-02-06T21:17:13.000Z","2020-02-06T21:16:12.000Z","2020-02-06T21:14:55.000Z","2020-02-06T21:13:51.000Z","2020-02-06T21:11:41.000Z","2020-02-04T11:17:14.000Z","2020-01-15T15:43:48.000Z","2020-01-10T12:36:52.000Z","2019-11-21T21:02:37.000Z","2019-11-19T21:12:38.000Z","2019-11-08T22:39:36.000Z","2019-10-24T19:06:58.000Z","2019-10-24T10:22:15.000Z","2019-10-16T12:05:54.000Z","2019-09-30T20:05:21.000Z","2019-09-18T12:11:03.000Z","2019-09-09T20:03:02.000Z","2019-09-05T20:05:59.000Z","2019-09-04T20:08:14.000Z","2019-08-24T00:51:54.000Z","2019-08-19T20:11:37.000Z","2019-08-19T20:09:34.000Z","2019-08-19T20:07:22.000Z","2019-08-19T20:05:09.000Z","2019-08-02T20:01:49.000Z","2019-07-31T20:15:22.000Z","2019-07-25T20:26:44.000Z","2019-07-25T10:05:36.000Z","2019-07-17T12:33:54.000Z","2019-07-15T13:24:33.000Z","2019-07-10T20:25:49.000Z","2019-05-31T11:35:58.000Z","2019-05-24T17:39:51.000Z","2019-05-17T20:10:09.000Z","2019-05-16T20:02:10.000Z","2019-05-08T20:15:12.000Z","2019-05-03T20:18:53.000Z","2019-05-03T20:16:59.000Z","2019-05-03T20:13:59.000Z","2019-05-03T20:11:47.000Z","2019-05-03T20:08:52.000Z","2019-05-03T20:05:18.000Z","2019-05-03T20:02:08.000Z","2019-05-01T20:33:12.000Z","2019-05-01T20:23:55.000Z","2019-04-30T22:16:09.000Z","2019-04-25T19:08:10.000Z","2019-04-25T10:36:03.000Z","2019-04-17T13:15:56.000Z","2019-04-12T15:33:33.000Z","2019-04-12T13:26:55.000Z","2019-04-10T17:52:28.000Z","2019-04-08T20:07:55.000Z","2019-04-08T20:06:00.000Z","2019-03-29T20:16:32.000Z","2019-03-21T13:06:33.000Z","2019-03-21T13:04:38.000Z","2019-03-21T04:15:46.000Z","2019-03-20T21:29:00.000Z","2019-03-20T12:00:34.000Z","2019-03-19T18:52:02.000Z","2019-03-18T12:19:38.000Z","2019-03-18T12:14:16.000Z","2019-03-15T14:11:37.000Z","2019-03-11T17:00:32.000Z","2019-03-08T18:00:32.000Z","2019-02-28T03:00:31.000Z","2019-02-28T02:52:02.000Z","2019-02-28T01:32:05.000Z","2019-02-27T22:06:32.000Z","2019-02-27T00:15:19.000Z","2019-02-27T00:14:25.000Z","2019-02-27T00:13:04.000Z","2019-02-27T00:11:54.000Z","2019-02-27T00:10:57.000Z","2019-02-27T00:08:32.000Z","2019-02-22T14:01:03.000Z","2019-02-21T21:47:45.000Z","2019-02-21T21:46:16.000Z","2019-02-21T21:45:06.000Z","2019-02-21T21:44:19.000Z","2019-02-21T21:43:24.000Z","2019-02-21T21:42:30.000Z","2019-02-21T21:41:43.000Z","2019-02-21T21:40:38.000Z","2019-02-21T21:39:54.000Z","2019-02-21T21:38:18.000Z","2019-02-21T21:37:22.000Z","2019-02-21T21:27:32.000Z","2019-02-14T18:49:09.000Z","2019-02-13T14:43:59.000Z","2019-02-13T14:08:03.000Z","2019-02-11T18:11:48.000Z","2019-02-11T15:04:49.000Z","2019-02-08T14:46:32.000Z","2019-02-07T21:19:12.000Z","2019-02-07T21:18:26.000Z","2019-02-07T21:17:27.000Z","2019-02-07T21:16:42.000Z","2019-02-07T21:15:59.000Z","2019-02-07T21:14:58.000Z","2019-02-07T21:14:01.000Z","2019-02-07T21:13:12.000Z","2019-02-07T21:12:25.000Z","2019-02-07T21:11:34.000Z","2019-02-07T21:10:20.000Z","2019-02-07T16:00:32.000Z","2019-02-06T16:00:33.000Z","2019-02-05T22:22:12.000Z","2019-02-05T11:22:32.000Z","2019-02-04T21:46:02.000Z","2019-02-04T21:43:12.000Z","2019-01-29T12:02:35.000Z","2019-01-29T12:00:53.000Z","2019-01-28T23:08:34.000Z","2019-01-28T22:04:04.000Z","2019-01-28T22:01:33.000Z","2019-01-28T21:59:36.000Z","2019-01-28T21:57:33.000Z","2019-01-28T21:56:08.000Z","2019-01-28T21:54:35.000Z","2019-01-28T12:39:02.000Z","2019-01-28T12:37:37.000Z","2019-01-28T12:35:44.000Z","2019-01-16T12:22:04.000Z","2018-11-26T15:01:22.000Z","2018-11-19T22:05:01.000Z","2018-11-19T21:02:24.000Z","2018-11-19T21:01:25.000Z","2018-11-06T22:04:09.000Z","2018-10-25T20:04:44.000Z","2018-10-25T10:23:09.000Z","2018-10-17T11:31:37.000Z","2018-09-05T20:02:28.000Z","2018-08-23T20:11:05.000Z","2018-08-17T20:07:22.000Z","2018-08-17T20:06:41.000Z","2018-08-17T20:06:08.000Z","2018-08-17T20:05:25.000Z","2018-08-08T20:02:23.000Z","2018-08-07T21:21:12.000Z","2018-08-07T21:11:41.000Z","2018-07-26T20:50:30.000Z","2018-07-26T10:08:12.000Z","2018-07-18T11:10:32.000Z","2018-06-25T13:56:28.000Z","2018-06-08T20:14:29.000Z","2018-06-07T21:10:56.000Z","2018-06-06T22:51:27.000Z","2018-05-31T11:22:48.000Z","2018-05-16T20:19:27.000Z","2018-05-16T20:03:18.000Z","2018-05-10T20:58:52.000Z","2018-05-10T20:55:57.000Z","2018-05-10T20:54:06.000Z","2018-05-10T20:53:05.000Z","2018-05-10T20:52:11.000Z","2018-05-10T20:51:20.000Z","2018-05-10T20:50:19.000Z","2018-05-10T20:49:09.000Z","2018-05-09T20:28:00.000Z","2018-04-26T19:50:20.000Z","2018-04-26T11:01:01.000Z","2018-04-18T11:53:03.000Z","2018-03-28T12:00:33.000Z","2018-03-20T13:01:43.000Z","2018-03-13T20:01:40.000Z","2018-03-12T20:40:14.000Z","2018-03-08T13:31:34.000Z","2018-03-01T22:05:58.000Z","2018-03-01T21:03:42.000Z","2018-02-28T21:02:48.000Z","2018-02-26T21:08:54.000Z","2018-02-22T21:51:11.000Z","2018-02-22T21:50:27.000Z","2018-02-22T21:03:05.000Z","2018-02-21T21:59:09.000Z","2018-02-21T21:45:35.000Z","2018-02-21T21:44:46.000Z","2018-02-21T21:44:01.000Z","2018-02-21T21:43:17.000Z","2018-02-21T21:42:36.000Z","2018-02-21T21:41:39.000Z","2018-02-21T21:40:52.000Z","2018-02-21T21:40:08.000Z","2018-02-21T21:39:20.000Z","2018-02-21T21:38:22.000Z","2018-02-14T23:19:14.000Z","2018-02-14T22:54:02.000Z","2018-02-14T22:52:25.000Z","2018-02-14T22:47:27.000Z","2018-02-14T22:47:11.000Z","2018-02-14T22:44:09.000Z","2018-02-14T22:42:41.000Z","2018-02-14T22:39:52.000Z","2018-02-14T22:38:45.000Z","2018-02-14T22:38:07.000Z","2018-02-14T22:37:59.000Z","2018-02-14T22:37:26.000Z","2018-02-14T22:35:14.000Z","2018-02-14T22:31:26.000Z","2018-02-14T22:25:43.000Z","2018-02-14T16:11:32.000Z","2018-02-09T14:30:22.000Z","2018-02-06T11:40:53.000Z","2018-01-29T19:40:02.000Z","2018-01-17T12:05:06.000Z","2017-12-18T21:21:40.000Z","2017-12-11T21:30:07.000Z","2017-11-27T21:56:51.000Z","2017-11-21T21:02:40.000Z","2017-11-17T21:22:03.000Z","2017-11-13T21:44:36.000Z","2017-11-13T21:01:43.000Z","2017-11-09T21:05:29.000Z","2017-11-07T21:05:24.000Z","2017-11-03T00:42:37.000Z","2017-11-01T20:18:13.000Z","2017-11-01T20:11:04.000Z","2017-10-26T20:09:36.000Z","2017-10-26T10:19:34.000Z","2017-10-18T11:16:12.000Z","2017-10-10T16:27:19.000Z","2017-09-07T20:08:11.000Z","2017-09-07T20:07:10.000Z","2017-09-07T20:06:07.000Z","2017-09-07T20:05:15.000Z","2017-08-16T21:41:07.000Z","2017-08-16T21:08:51.000Z","2017-08-16T21:08:05.000Z","2017-08-16T21:07:15.000Z","2017-08-16T21:06:33.000Z","2017-08-15T21:03:52.000Z","2017-08-15T21:00:24.000Z","2017-08-15T20:59:21.000Z","2017-08-14T22:56:11.000Z","2017-07-28T20:24:08.000Z","2017-07-27T15:37:15.000Z","2017-07-27T10:18:12.000Z","2017-07-21T20:05:35.000Z","2017-07-18T20:06:27.000Z","2017-06-06T20:01:32.000Z","2017-05-31T16:43:14.000Z","2017-05-26T18:58:57.000Z","2017-05-26T18:55:46.000Z","2017-05-26T18:54:59.000Z","2017-05-26T18:54:05.000Z","2017-05-26T18:53:13.000Z","2017-05-26T18:52:19.000Z","2017-05-26T18:51:29.000Z","2017-05-26T18:50:40.000Z","2017-05-26T18:44:23.000Z","2017-05-24T20:28:51.000Z","2017-05-19T20:06:11.000Z","2017-05-17T20:07:58.000Z","2017-05-17T20:05:48.000Z","2017-05-03T20:32:34.000Z","2017-05-03T20:30:28.000Z","2017-04-27T19:44:15.000Z","2017-04-27T11:13:15.000Z"],"act":["33","","","33","34","","33","33","33","","","","","","","33","34","33","33","33","34","34","34","","","","","","","33","34","34","34","34","34","34","","33","","34","33","","","33","33","","","","","","","","","","","","","","","","34","34","34","34","34","34","","","33","33","33","","","","","","","","","33","33","33","","","","","","","","33","34","34","","33","","33","34","34","","33","","33","","33","","33","34","34","34","33","","","","","","","33","34","34","","33","34","34","33","","34","34","","33","","34","34","34","34","","","","","","","","34","34","34","34","","","","","","","","","","","","","","","","","","","","","","","34","34","","","","","","","","","","","","","","","","","","","33","34","34","","34","33","34","34","","","33","34","34","34","34","34","","34","","","34","","34","34","34","","33","","","","34","33","33","34","","","33","","","34","33","","","","33","33","34","34","","","","","","","","34","34","","","","","","","","","","","","","34","34","34","34","","","","","33","34","33","34","","","","","","","","","","","","","33","33","33","33","33","34","34","34","34","34","34","34","34","","33","33","","33","","33","","33","33","34","34","34","","34","34","","33","","","","34","34","34","33","33","34","34","","","","","","33","","34","33","34","34","","","","","","","","","","34","","34","","34","","34","34","34","34","","","","34","","34","","","","","","","","","","","","","","","","","","","","","","","","34","34","34","34","34","","","","","","","","","","","","","","","","34","34","34","34","34","34","","34","34","34","34","","34","","","","34","34","34","34","","","","","","33","33","34","34","34","","34","","34","34","34","34","","34","","","","","","","","","34","","34","34","34","34","34","34","34","34","34","34","","","","","34","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","34","34","34","34","","","","","","","","","","","","","","","","34","","34","33","33","34","","33","","","34","","33","34","","","34","","","","","","","","","","","","34","34","","","34","","","","","","","","","34","34","34","","","34","","","","","","","","","","","","","34","34","34","","","","","34","","34","","","34","","","","","","","","","","","34","34","34","34","34","34","","34","","","","","","","","34","","","","","","","","","","","","","","","","","","","","","34","","34","34","34","","","","","","","","","","","","","34","34","34","","","","","","","","34","34","34","","","","","","","","","","","34","34","34","","","","","34","","","","","","","","","","","","","34","33","34","34","34","34","34","34","34","","","","","","","","","","","","","","","","","","","","","","","","","","","","34","","34","","","","34","34","","","","","","","","","","","","34","34","34","","","","34","34","34","","34","","","","","","","","","","","34","34","34","34","34","34","","","","","","","","","","","","","","34","34","34","34","NE","34","34","34","","","34","","33","33","34","","","33","","","","33","","","","","","","","","","","","","","","","","","","","","","","34","34","34","34","34","","","","","","","","","","","","","","","","34","","34","34","","","","","","","","","34","34","","34","","34","","","34","34","34","34","","","","","","","","","","34","34","34","34","34","","34","34","","","","","","","","","","","34","34","34","34","34","34","","","","34","","","","","","","","","","","","","","","","","","34","","","","","","","","","","","","","","","34","34","34","34","34","","","","","","34","","","","34","34","","34","34","34","34","","","","","","","","","","","","","34","","34","34","","","","34","","","","","","","","","","34","","","","","","34","34"],"form":["144","4","4","144","SD","4","144","144","144","4","3","4","4","4","4","144","SCHEDULE 13G/A","144","144","144","SCHEDULE 13G","8-K","8-K","4","4","4","4","4","4","144","10-Q","8-K","8-K","SCHEDULE 13G","8-K","SCHEDULE 13G","4","144","4","8-K","144","4","4","144","144","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","SCHEDULE 13G/A","DEFA14A","DEFA14A","ARS","DEF 14A","PRE 14A","4","4","144","144","144","4","4","4","4","4","4","4","4","144","144","144","4","4","4","4","4","4","4","144","10-K","8-K","4","144","4","144","8-K","8-K","4","144","4","144","4","144","4","144","10-Q","8-K","8-K","144","4","4","4","4","4","4","144","10-Q","8-K","4","144","8-K/A","8-K","S-3ASR","4","SCHEDULE 13G/A","SD","4","144","4","SCHEDULE 13G/A","8-K","10-Q","8-K","4","4","4","4","4","4","4","4","SCHEDULE 13G/A","8-K","8-K","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","ARS","DEF 14A","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","144","SCHEDULE 13G/A","10-K","4","SCHEDULE 13G/A","144","8-K","8-K","4","4","144","SC 13G/A","10-Q","8-K","8-K/A","8-K","4","SC 13G/A","4","3","8-K","4","10-Q","8-K","8-K","4","144","4","4","4","8-K","144","144","SC 13G/A","4","4","144","4","4","SD","144","4","4","4","144","S-8","10-Q","8-K","4","4","4","4","4","4","4","8-K","8-K","4","4","4","4","4","4","4","4","4","4","4","4","8-K","DEFA14A","ARS","DEF 14A","4","3","4","4","144","8-K","144","8-K","4","4","4","4","4","4","4","4","4","4","4","4","144","144","144","144","144","10-K","SC 13G/A","SC 13G","SC 13G/A","8-K","SC 13G","SC 13G/A","8-K","4","144","144","4","144","4","144","4","144","144","10-Q","8-K","8-K","4","8-K","8-K","4","144","4","4","4","10-Q","8-K","8-K","144","144","8-K","SD","4","4","4","4","3","144","UPLOAD","10-Q","144","8-K","8-K","CORRESP","4","4","4","4","4","4","4","4","8-K","UPLOAD","8-K","CORRESP","8-K","UPLOAD","DEF 14A","ARS","8-K","8-K","4","3","4","8-K","4","10-K","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","SC 13G/A","SC 13G","8-K","8-K","SC 13G/A","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","SC 13G/A","8-K","SC 13G","8-K","8-K","8-K","4","10-Q","8-K","8-K","8-K","4","8-K/A","4","4","4","SC 13G/A","10-Q","8-K","8-K","3","3","4","3","4","S-3ASR","S-8","8-K","425","8-K","425","8-K","425","425","8-K","425","8-K","4","SD","4","4","4","4","4","4","4","4","8-K","425","10-Q","8-K","8-K","425","8-K","8-K","425","8-K","425","8-K","4","4","4","4","DEF 14A","4","4","4/A","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","SC 13G/A","SC 13G","SC 13G/A","10-K","4","4","4","4","4","4","4","4","4","4","4","4","4","425","425","8-K","425","8-K","EFFECT","424B3","SC 13G/A","CORRESP","S-4/A","UPLOAD","4","8-K","CORRESP","S-4","8-K","4","425","8-K","425","425","425","425","425","425","425","425","425","425","425","425","8-K","4","4","8-K","4","4","4","4/A","4","3","4","4","8-K","10-Q","8-K","4","4","8-K","4","4","4","4","4","4/A","4","4","4","4","4","4","10-Q","8-K","8-K","4","4","4","4","SD","4","8-K","4","4","SC 13G/A","4","4","4","4","4","4","4","4","4","4","8-K","8-K","8-K/A","10-Q","8-K","8-K","4","8-K","4","4","4","4","4","4","4","DEF 14A","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","3","3","8-K","4","SC 13G/A","SC 13G/A","10-K","4","4","4","4","4","4","4","4","4","4","4","4","8-K","SC 13G/A","8-K","4/A","4","4","4","4","4","4","10-Q","8-K","8-K","4","4","4","4","4","4","4","4","4","4","10-Q","8-K","8-K","4","4","4","4","SD","4","4","4","3","4","4","4","4","4","4","4","4","8-K","S-8","8-K","8-K","8-K","10-Q","8-K","8-K","DEF 14A","5","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","SC 13G/A","4","SC 13G/A","4","4","4","10-K","SC 13G","4","4","4","4","4","4","4","4","4","4","4","8-K","8-K","8-K","4","4","4","10-Q","8-K","8-K","4/A","8-K","4","3","4","4","4","4","4","4","4","4","10-Q","8-K","8-K","8-K","SC 13G/A","SD","4","4","4","4","4","4","4","4","4","4","4","4","4","8-K","10-Q","8-K","8-K","RW","8-K","SC 13G/A","8-K","425","425","8-K","425","EFFECT","424B3","DEF 14A","CORRESP","CORRESP","S-4/A","UPLOAD","425","425","S-4","425","4","425","4","4","4","4","4","4","425","4","4","4","4","4","4","4","4","4","4","4","4","SC 13G","SC 13G/A","8-K","10-K","SC 13G/A","425","4","4","4","4","4","4","4","4","4","4","4","425","425","425","8-K","425","SC 13G/A","8-K","425","425","425","425","425","425","425","425","8-K","8-K","425","8-K","4","8-K","4","4","8-K","10-Q","8-K","8-K","4","4","4","4","4","4","4","4","4","10-Q","8-K","8-K","8-K","8-K","4","8-K","SD","4","4","4","4","4","4","4","4","4","4","8-K","10-Q","8-K","8-K","DEF 14A","8-K","4","4","4","8-K","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","10-K","4","3","4","4","4","4","4","4","4","4","4","4","4","4","SC 13G/A","SC 13G/A","8-K","SC 13G/A","8-K","4","4","4","4","4","8-K","4","4","4","8-K","8-K","4","10-Q","8-K","8-K","SC 13G","4","4","4","3","4","4","4","4","4","4","3","4","8-K","4","10-Q","8-K","4","4","4","SD","4","4","4","4","4","4","4","4","4","8-K","4","4","4","4","4","10-Q","8-K"],"fileNumber":["001-32598","","","001-32598","001-32598","","001-32598","001-32598","001-32598","","","","","","","001-32598","005-60261","001-32598","001-32598","001-32598","005-60261","001-32598","001-32598","","","","","","","001-32598","001-32598","001-32598","001-32598","005-60261","001-32598","005-60261","","001-32598","","001-32598","001-32598","","","001-32598","001-32598","","","","","","","","","","","","","","","","005-60261","001-32598","001-32598","001-32598","001-32598","001-32598","","","001-32598","001-32598","001-32598","","","","","","","","","001-32598","001-32598","001-32598","","","","","","","","001-32598","001-32598","001-32598","","001-32598","","001-32598","001-32598","001-32598","","001-32598","","001-32598","","001-32598","","001-32598","001-32598","001-32598","001-32598","001-32598","","","","","","","001-32598","001-32598","001-32598","","001-32598","001-32598","001-32598","333-288501","","005-60261","001-32598","","001-32598","","005-60261","001-32598","001-32598","001-32598","","","","","","","","001-32598","005-60261","001-32598","001-32598","","","","","","","","","","","","","","","","","","","","","","","001-32598","001-32598","","","","","","","","","","","","","","","","","","","001-32598","005-60261","001-32598","","005-60261","001-32598","001-32598","001-32598","","","001-32598","005-60261","001-32598","001-32598","001-32598","001-32598","","005-60261","","","001-32598","","001-32598","001-32598","001-32598","","001-32598","","","","001-32598","001-32598","001-32598","005-60261","","","001-32598","","","001-32598","001-32598","","","","001-32598","333-279085","001-32598","001-32598","","","","","","","","001-32598","001-32598","","","","","","","","","","","","","001-32598","001-32598","001-32598","001-32598","","","","","001-32598","001-32598","001-32598","001-32598","","","","","","","","","","","","","001-32598","001-32598","001-32598","001-32598","001-32598","001-32598","005-60261","005-60261","005-60261","001-32598","005-60261","005-60261","001-32598","","001-32598","001-32598","","001-32598","","001-32598","","001-32598","001-32598","001-32598","001-32598","001-32598","","001-32598","001-32598","","001-32598","","","","001-32598","001-32598","001-32598","001-32598","001-32598","001-32598","001-32598","","","","","","001-32598","","001-32598","001-32598","001-32598","001-32598","","","","","","","","","","001-32598","","001-32598","","001-32598","","001-32598","001-32598","001-32598","001-32598","","","","001-32598","","001-32598","","","","","","","","","","","","","","","","","","","","","","","","005-60261","005-60261","001-32598","001-32598","005-60261","","","","","","","","","","","","","","","","005-60261","001-32598","005-60261","001-32598","001-32598","001-32598","","001-32598","001-32598","001-32598","001-32598","","001-32598","","","","005-60261","001-32598","001-32598","001-32598","","","","","","333-266041","333-266040","001-32598","001-32598","001-32598","","001-32598","","001-32598","001-32598","001-32598","001-32598","","001-32598","","","","","","","","","001-32598","","001-32598","001-32598","001-32598","001-32598","001-32598","001-32598","001-32598","001-32598","001-32598","001-32598","","","","","001-32598","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","005-60261","005-60261","005-60261","001-32598","","","","","","","","","","","","","","","","001-32598","","001-32598","333-262172","333-262172","005-60261","","333-262172","","","001-32598","","333-262172","001-32598","","","001-32598","","","","","","","","","","","","001-32598","001-32598","","","001-32598","","","","","","","","","001-32598","001-32598","001-32598","","","001-32598","","","","","","","","","","","","","001-32598","001-32598","001-32598","","","","","001-32598","","001-32598","","","005-60261","","","","","","","","","","","001-32598","001-32598","001-32598","001-32598","001-32598","001-32598","","001-32598","","","","","","","","001-32598","","","","","","","","","","","","","","","","","","","","","001-32598","","005-60261","005-60261","001-32598","","","","","","","","","","","","","001-32598","005-60261","001-32598","","","","","","","","001-32598","001-32598","001-32598","","","","","","","","","","","001-32598","001-32598","001-32598","","","","","001-32598","","","","","","","","","","","","","001-32598","333-237905","001-32598","001-32598","001-32598","001-32598","001-32598","001-32598","001-32598","","","","","","","","","","","","","","","","","","","","","","","","","","","","005-60261","","005-60261","","","","001-32598","005-60261","","","","","","","","","","","","001-32598","001-32598","001-32598","","","","001-32598","001-32598","001-32598","","001-32598","","","","","","","","","","","001-32598","001-32598","001-32598","001-32598","005-60261","001-32598","","","","","","","","","","","","","","001-32598","001-32598","001-32598","001-32598","333-229931","001-32598","005-60261","001-32598","","","001-32598","","333-229931","333-229931","001-32598","","","333-229931","","","","333-229931","","","","","","","","","","","","","","","","","","","","","","","005-60261","005-60261","001-32598","001-32598","005-60261","","","","","","","","","","","","","","","","001-32598","","005-60261","001-32598","","","","","","","","","001-32598","001-32598","","001-32598","","001-32598","","","001-32598","001-32598","001-32598","001-32598","","","","","","","","","","001-32598","001-32598","001-32598","001-32598","001-32598","","001-32598","001-32598","","","","","","","","","","","001-32598","001-32598","001-32598","001-32598","001-32598","001-32598","","","","001-32598","","","","","","","","","","","","","","","","","","001-32598","","","","","","","","","","","","","","","005-60261","005-60261","001-32598","005-60261","001-32598","","","","","","001-32598","","","","001-32598","001-32598","","001-32598","001-32598","001-32598","005-60261","","","","","","","","","","","","","001-32598","","001-32598","001-32598","","","","001-32598","","","","","","","","","","001-32598","","","","","","001-32598","001-32598"],"filmNumber":["261084095","","","261059252","261042324","","261022860","261019235","261011971","","","","","","","26984614","26983469","26978580","26977472","26976855","26976393","26963458","26958551","","","","","","","26946408","26926578","26920023","26919994","26918688","26917063","26913037","","26871697","","26862516","26861083","","","26843403","26843393","","","","","","","","","","","","","","","","26800106","26793659","26783056","26783047","26783035","26731002","","","26679879","26677697","26671425","","","","","","","","","26657748","26657213","26657192","","","","","","","","26626444","26617706","26613425","","26587441","","26546370","26541144","26531468","","251561692","","251538109","","251489637","","251456781","251435704","251432151","251393398","251322181","","","","","","","251211539","251168203","251163832","","251130417","251127673","251126195","251104475","","251029584","251008829","","25975121","","25943411","25935058","25921518","25919100","","","","","","","","25871779","25863240","25861858","25841214","","","","","","","","","","","","","","","","","","","","","","","25741599","25741565","","","","","","","","","","","","","","","","","","","25649110","25624067","25615130","","25613211","25606260","25595319","25531162","","","241470532","","241424789","241420558","241378584","241373278","","241289037","","","241282240","","241162425","241159685","241120944","","241111787","","","","241103306","241099267","241099056","241028556","","","241009346","","","24992113","24975525","","","","24954075","24909995","24903809","24899819","","","","","","","","24871329","24849357","","","","","","","","","","","","","24798749","24779552","24759895","24759842","","","","","24733073","24730986","24729628","24712841","","","","","","","","","","","","","24658958","24653438","24649449","24647555","24646545","24641874","24638485","","24628388","24626629","24625373","24555859","24536690","","231508748","231507679","","231460083","","231435598","","231397271","231379362","231372856","231369811","231330906","","231298057","231251233","","231187963","","","","231140851","231137851","231095568","23995318","23995277","23991243","23931701","","","","","","23921187","","23909922","23909842","23908709","23904145","","","","","","","","","","23850597","","23828594","","23813995","","23742614","23741286","23727270","23693783","","","","23676034","","23655229","","","","","","","","","","","","","","","","","","","","","","","","23626192","","23621835","23614410","23603107","","","","","","","","","","","","","","","","23554375","23544880","23540684","23538969","23532965","221454851","","221355207","221352150","221317239","221302419","","221248566","","","","","221127593","221126771","221092900","","","","","","221070217","221070208","221069749","221058097","221058085","","221041624","","221022339","221022335","221019351","221019350","","22957114","","","","","","","","","22860366","","22854935","22851635","22836360","22828721","22828719","22817300","22808821","22808816","22800480","22800419","","","","","22748460","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","22623952","22609691","22594378","","","","","","","","","","","","","","","","22576786","","22571490","22571061","22569809","22567559","","22558597","","","22539561","","22532218","211513220","","","211498506","","","","","","","","","","","","211493136","211493134","","","211461414","","","","","","","","","211350955","211347468","211345821","","","211320196","","","","","","","","","","","","","211117695","211115806","211090340","","","","","21976303","","21948959","","","21903879","","","","","","","","","","","21878575","21870608","21870418","21857829","21855763","21832699","","21824568","","","","","","","","21750546","","","","","","","","","","","","","","","","","","","","","21645383","","","21610667","21595114","","","","","","","","","","","","","21578912","21568788","21525092","","","","","","","","201254916","201251601","201238243","","","","","","","","","","","201043442","201042648","201028325","","","","","20927603","","","","","","","","","","","","","20836582","20830281","20829462","20812417","20809542","20803919","20803891","20792651","20724552","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","20600060","","","","20585183","20584756","","","","","","","","","","","","20570589","20527522","20519454","","","","191166189","191164738","191151984","","191098380","","","","","","","","","","","19974724","19972337","19958255","19954229","19949635","19868579","","","","","","","","","","","","","","19784007","19767074","19765264","19752306","19745616","19745356","","19737541","","","19696033","","19695842","19695367","19693619","","","19686879","","","","19640240","","","","","","","","","","","","","","","","","","","","","","","","19593627","19593501","19584093","19582653","","","","","","","","","","","","","","","","19566138","","19564264","19547108","","","","","","","","","19543838","19543835","","19528277","","181193252","","","181163846","181138927","181137523","181125413","","","","","","","","","","18972275","18970027","18957660","18916197","18889617","","18884895","18870003","","","","","","","","","","","18818691","18778370","18776085","18760233","18717036","18700739","","","","18658692","","","","","","","","","","","","","","","","","","18615088","","","","","","","","","","","","","","","18608923","18588704","18576185","18554876","18529751","","","","","","171196605","","","","171174348","171169166","","171156409","171154638","171141746","171129652","","","","","","","","","","","","","171032032","","17985120","17984327","","","","17880231","","","","","","","","","","17866998","","","","","","17788821","17786203"],"items":["","","","","","","","","","","","","","","","","","","","","","5.02","5.03,5.07,9.01","","","","","","","","","5.02,9.01","2.02,9.01","","1.01,2.03,9.01","","","","","8.01","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","2.02,9.01","","","","","5.02,9.01","8.01","","","","","","","","","","2.02,9.01","8.01","","","","","","","","","","2.02,9.01","","","8.01","8.01","","","","","","","","","5.02,7.01,9.01","","2.02,9.01","","","","","","","","","","5.07","8.01","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","2.02,9.01","8.01","","","","","","2.02,9.01","5.02","8.01","","","","","5.02","","","2.02,9.01","8.01","","","","","","5.02","","","","","","","","","","","","","","","","","2.02,9.01","","","","","","","","5.07","8.01","","","","","","","","","","","","","1.01,2.03,9.01","","","","","","","","","5.02","","7.01,9.01","","","","","","","","","","","","","","","","","","","","","","2.02,7.01,9.01","","","8.01,9.01","","","","","","","","","","","","2.02,9.01","8.01","","8.01,9.01","1.01,2.03,9.01","","","","","","","2.02,9.01","8.01","","","8.01,9.01","","","","","","","","","","","2.02,9.01","8.01,9.01","","","","","","","","","","5.07,8.01","","8.01,9.01","","5.02,9.01","","","","1.01,2.03,9.01","8.01","","","","5.02","","","","","","","","","","","","","","","","","","","","","","","","","","","","2.02,9.01","8.01","","","","","","","","","","","","","","","","","","5.02,9.01","","8.01,9.01","8.01,9.01","5.03,9.01","","","2.02,9.01","8.01,9.01","8.01,9.01","","9.01","","","","","","2.02,9.01","8.01,9.01","","","","","","","","1.01,2.01,2.03,7.01,9.01","","1.01,2.03,9.01","","7.01,9.01","","","8.01,9.01","","7.01,8.01,9.01","","","","","","","","","","","5.07","","","2.02,9.01","8.01,9.01","","1.01,2.03,9.01","5.02","","8.01,9.01","","7.01,8.01,9.01","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","2.02,9.01","","8.01","S-4,,2022-01-28 16:30:00","","","","","","","8.01,9.01","","","5.02","","","1.01,9.01","","","","","","","","","","","","","8.01,9.01","","","8.01","","","","","","","","","8.01,9.01","","2.02,9.01","","","8.01","","","","","","","","","","","","","","2.02,9.01","8.01,9.01","","","","","","","5.02","","","","","","","","","","","","","","1.01,2.03,8.01,9.01","5.07","5.02","","2.02,9.01","8.01,9.01","","8.01","","","","","","","","","","","","","","","","","","","","","","","","","","","","","5.02,9.01","","","","","","","","","","","","","","","","","2.02,9.01","","8.01,9.01","","","","","","","","","2.02,9.01","8.01,9.01","","","","","","","","","","","","2.02,9.01","8.01,9.01","","","","","","","","","","","","","","","","","","1.01,2.03,9.01","","5.02,5.07,9.01","8.01,9.01","8.01,9.01","","2.02,9.01","8.01,9.01","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","2.02,9.01","8.01,9.01","8.01,9.01","","","","","2.02,9.01","8.01,9.01","","8.01,9.01","","","","","","","","","","","","2.02,9.01","8.01,9.01","8.01,9.01","","","","","","","","","","","","","","","","5.07","","2.02,9.01","8.01,9.01","","1.02,8.01,9.01","","8.01,9.01","","","5.02,8.01","","S-4,,2019-03-20 16:00:00","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","1.01,9.01","","","","","","","","","","","","","","","","","","2.02,9.01","","","1.01,9.01","","","","","","","","","2.02,9.01","8.01,9.01","","8.01,9.01","","8.01,9.01","","","1.01,1.02,2.03,8.01,9.01","","2.02,9.01","8.01,9.01","","","","","","","","","","","2.02,5.02,9.01","8.01,9.01","2.01,8.01,9.01","1.01,9.01","","7.01,9.01","","","","","","","","","","","","5.07","","2.02,9.01","8.01,9.01","","7.01,9.01","","","","1.01,2.03,9.01","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","","2.02,9.01","","8.01,9.01","","","","","","1.01,2.03,8.01,9.01","","","","8.01,9.01","8.01,9.01","","","2.02,9.01","8.01,9.01","","","","","","","","","","","","","","5.02,9.01","","","2.02,9.01","","","","","","","","","","","","","","5.02,5.07,9.01","","","","","","","2.02,9.01"],"core_type":["144","4","4","144","SD","4","144","144","144","4","3","4","4","4","4","144","SCHEDULE 13G/A","144","144","144","SCHEDULE 13G","XBRL","XBRL","4","4","4","4","4","4","144","XBRL","XBRL","XBRL","SCHEDULE 13G","XBRL","SCHEDULE 13G","4","144","4","XBRL","144","4","4","144","144","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","SCHEDULE 13G/A","DEFA14A","DEFA14A","ARS","XBRL","XBRL","4","4","144","144","144","4","4","4","4","4","4","4","4","144","144","144","4","4","4","4","4","4","4","144","XBRL","XBRL","4","144","4","144","XBRL","XBRL","4","144","4","144","4","144","4","144","XBRL","XBRL","XBRL","144","4","4","4","4","4","4","144","XBRL","XBRL","4","144","XBRL","XBRL","S-3ASR","4","SCHEDULE 13G/A","SD","4","144","4","SCHEDULE 13G/A","XBRL","XBRL","XBRL","4","4","4","4","4","4","4","4","SCHEDULE 13G/A","XBRL","XBRL","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","ARS","XBRL","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","144","SCHEDULE 13G/A","XBRL","4","SCHEDULE 13G/A","144","XBRL","XBRL","4","4","144","SC 13G/A","XBRL","XBRL","XBRL","XBRL","4","SC 13G/A","4","3","XBRL","4","XBRL","XBRL","XBRL","4","144","4","4","4","XBRL","144","144","SC 13G/A","4","4","144","4","4","SD","144","4","4","4","144","S-8","XBRL","XBRL","4","4","4","4","4","4","4","XBRL","XBRL","4","4","4","4","4","4","4","4","4","4","4","4","XBRL","DEFA14A","ARS","XBRL","4","3","4","4","144","XBRL","144","XBRL","4","4","4","4","4","4","4","4","4","4","4","4","144","144","144","144","144","XBRL","SC 13G/A","SC 13G","SC 13G/A","XBRL","SC 13G","SC 13G/A","XBRL","4","144","144","4","144","4","144","4","144","144","XBRL","XBRL","XBRL","4","XBRL","XBRL","4","144","4","4","4","XBRL","XBRL","XBRL","144","144","XBRL","SD","4","4","4","4","3","144","LETTER","XBRL","144","XBRL","XBRL","CORRESP","4","4","4","4","4","4","4","4","XBRL","LETTER","XBRL","CORRESP","XBRL","LETTER","XBRL","ARS","XBRL","XBRL","4","3","4","XBRL","4","XBRL","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","SC 13G/A","SC 13G","XBRL","XBRL","SC 13G/A","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","SC 13G/A","XBRL","SC 13G","XBRL","XBRL","XBRL","4","XBRL","XBRL","XBRL","XBRL","4","XBRL","4","4","4","SC 13G/A","XBRL","XBRL","XBRL","3","3","4","3","4","S-3ASR","S-8","XBRL","425","XBRL","425","XBRL","425","425","XBRL","425","XBRL","4","SD","4","4","4","4","4","4","4","4","XBRL","425","XBRL","XBRL","XBRL","425","XBRL","XBRL","425","XBRL","425","XBRL","4","4","4","4","DEF 14A","4","4","4/A","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","SC 13G/A","SC 13G","SC 13G/A","XBRL","4","4","4","4","4","4","4","4","4","4","4","4","4","425","425","XBRL","425","XBRL","EFFECT","424B3","SC 13G/A","CORRESP","S-4/A","LETTER","4","XBRL","CORRESP","S-4","XBRL","4","425","XBRL","425","425","425","425","425","425","425","425","425","425","425","425","XBRL","4","4","XBRL","4","4","4","4/A","4","3","4","4","XBRL","XBRL","XBRL","4","4","XBRL","4","4","4","4","4","4/A","4","4","4","4","4","4","XBRL","XBRL","XBRL","4","4","4","4","SD","4","XBRL","4","4","SC 13G/A","4","4","4","4","4","4","4","4","4","4","XBRL","XBRL","XBRL","XBRL","XBRL","XBRL","4","XBRL","4","4","4","4","4","4","4","DEF 14A","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","3","3","XBRL","4","SC 13G/A","SC 13G/A","XBRL","4","4","4","4","4","4","4","4","4","4","4","4","XBRL","SC 13G/A","XBRL","4/A","4","4","4","4","4","4","XBRL","XBRL","XBRL","4","4","4","4","4","4","4","4","4","4","XBRL","XBRL","XBRL","4","4","4","4","SD","4","4","4","3","4","4","4","4","4","4","4","4","XBRL","S-8","XBRL","XBRL","XBRL","XBRL","XBRL","XBRL","DEF 14A","5","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","SC 13G/A","4","SC 13G/A","4","4","4","XBRL","SC 13G","4","4","4","4","4","4","4","4","4","4","4","XBRL","XBRL","XBRL","4","4","4","XBRL","XBRL","XBRL","4/A","XBRL","4","3","4","4","4","4","4","4","4","4","XBRL","XBRL","8-K","8-K","SC 13G/A","SD","4","4","4","4","4","4","4","4","4","4","4","4","4","8-K","10-Q","8-K","8-K","RW","8-K","SC 13G/A","8-K","425","425","8-K","425","EFFECT","424B3","DEF 14A","CORRESP","CORRESP","S-4/A","LETTER","425","425","S-4","425","4","425","4","4","4","4","4","4","425","4","4","4","4","4","4","4","4","4","4","4","4","SC 13G","SC 13G/A","8-K","10-K","SC 13G/A","425","4","4","4","4","4","4","4","4","4","4","4","425","425","425","8-K","425","SC 13G/A","8-K","425","425","425","425","425","425","425","425","8-K","8-K","425","8-K","4","8-K","4","4","8-K","10-Q","8-K","8-K","4","4","4","4","4","4","4","4","4","10-Q","8-K","8-K","8-K","8-K","4","8-K","SD","4","4","4","4","4","4","4","4","4","4","8-K","10-Q","8-K","8-K","DEF 14A","8-K","4","4","4","8-K","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","4","10-K","4","3","4","4","4","4","4","4","4","4","4","4","4","4","SC 13G/A","SC 13G/A","8-K","SC 13G/A","8-K","4","4","4","4","4","8-K","4","4","4","8-K","8-K","4","10-Q","8-K","8-K","SC 13G","4","4","4","3","4","4","4","4","4","4","3","4","8-K","4","10-Q","8-K","4","4","4","SD","4","4","4","4","4","4","4","4","4","8-K","4","4","4","4","4","10-Q","8-K"],"size":[5954,3265,4524,4196,528275,8455,4906,5374,4795,5160,446531,10644,9006,13249,8454,5254,7608,4323,5877,5383,7271,359647,515628,5142,5123,5124,5139,5090,5204,4800,5876960,181695,3058343,7288,2210662,7229,8958,6119,8962,276685,5535,4828,4747,4908,4884,5081,5030,5108,5110,5065,5069,5120,5144,5092,5131,5128,5171,5117,5182,5172,7052,19017,5179196,2069815,36679827,36847294,3095,19694,9315,8635,5540,10860,12349,7931,7939,7969,4639,7979,11705,4207,4299,4330,3115,4889,5128,5048,4930,4884,20508,5291,12919593,4157353,18921,4962,8333,4323,312569,276574,4386,4190,12835,4380,6442,4332,4610,8467,7643306,4041445,274659,5381,3066,3102,4862,7186,5036,8081,4179,8160408,3842001,4885,4869,276088,274633,859013,4630,7495,570297,4690,4333,4672,7492,211585,6340896,3837724,5443,4989,4956,4982,4995,5008,5070,5259,11155,276016,282848,4971,4970,4981,4960,4941,4947,4891,4914,4926,4969,4930,7231,7211,7221,7473,7141,7436,7216,7455,7217,7188,4930,55178749,34673073,4661,4691,4646,4634,4930,4668,4853,4651,4899,6451,6415,6362,6384,6378,6393,6418,6336,6417,4335,7508,14325393,9106,13528,4236,4793931,284184,6545,6439,4338,6416,7558956,4307330,253624,283581,4703,12944,5010,6995,281812,4685,7324799,4277711,283529,12930,5462,13450,3032,8346,167762,4382,4340,13739,5429,5951,4854,4637,14783,550919,5913,4680,4706,4610,6447,124084,6425149,4110212,5002,5002,5076,4963,4996,5015,4984,276658,283747,7169,7205,7185,7145,7193,7224,7218,7196,7225,7225,7227,4937,3082641,13477,20901348,86588997,5132,6980,4399,8394,4199,280314,4268,1002594,4451,22783,19194,7950,8094,4646,7936,7031,7939,7920,4888,13950,4724,5287,5819,5837,4716,15132127,67713,6417,12964,7186666,55600,13723,285677,4626,6066,6998,8021,4721,4716,6834,4778,4629,4102,9283710,5399109,285614,4389,193807,2131565,4537,4211,4389,4366,4360,9233838,5786719,286028,4246,4097,201401,539243,8736,4308,7108,9621,6971,4100,39628,8345433,5822,5522216,337712,23756,3025,3007,5048,4935,4968,5118,4987,4974,297445,45166,303996,33968,201531,46139,82155311,2157380,2291445,288596,4942,7101,4443,301959,11678,15606836,4561,4554,4576,4595,4564,4549,4593,4515,4537,4546,10325,4547,4571,6285,6281,6300,6288,6321,6265,16353,6320,6275,6296,67462,9402,5893343,346856,12860,7125,7130,7145,7405,7133,4857,7162,7327,7106,7545,7133,2977,7373,7116,7142,13478,364750,13441,329759,304853,578977,4396,9507529,4705297,302378,313633,4367,1742296,3302,4376,4394,6952,7095244,3372359,304900,14110,11751,18839,11700,5506,546883,134843,5308557,952958,1467226,62263,223113,26782,142524,358905,1845739,2143018,8210,515435,4321,4955,4936,4941,5632,4959,5016,4903,295326,17626,5508206,3382982,303827,1342797,1704007,273172,229988,441999,1153105,1456766,21505,19803,5225,8384,15991611,4560,8729,16100,17847,19221,5229,8174,22569,4555,4548,5227,4547,4550,4572,4590,4539,4518,4548,4547,4555,4571,6298,6276,6318,6955,6271,6294,6276,6272,6279,6733,78495,12856,14380661,7140,7118,7402,7769,7162,7144,7108,4857,7117,6852,6852,7287,7125,32641,4004856,4184292,139887,372732,1632,5409262,13478,9953,7480134,40027,4660,304678,14357,5708843,272620,22310,914323,1244591,81868,5867210,128250,6301067,20062,18128,17549,17772,16960,41249,19021,21721653,21936447,4553,14137,272240,4353,14418,4446,5173,4923,3611,9622,13239,326568,7757292,3557433,4544,10499,302733,11401,8214,13102,4716,4539,3875,5095,14470,21022,11973,4533,20563,9413685,3510162,302955,8010,7442,8898,9573,514993,4877,274971,4321,4496,13332,18806,4955,4959,4977,4936,4903,4941,5094,5633,5016,1127362,303522,285233,5687852,3394198,371297,29530,206514,19933,4535,11560,8201,4517,33274,9575,22325559,5867,4547,4550,4546,7835,8515,8544,4535,4496,37531,7830,7833,7828,7849,7878,5036,4923,4883,3519,3632,325547,13077,6733,13735,14888624,7509,7832,7358,7113,8034,7124,7103,7139,7118,4853,7118,7116,4196581,13319,207393,4745,6771,4360,4881,4352,4461,6579,9571941,3670554,219836,4562,6208,4880,4350,4374,4593,10122,13132,5506,15282,10028863,3772529,219352,4361,5117,16296,4445,521541,14854,4876,4445,4142,8757,4977,4959,5136,4936,4941,4955,5633,999038,122284,236390,172358,162816,7629152,3451400,218095,1141308,6635,4376,6451,5770,6679,5281,4350,4359,4338,4350,5029,4392,18194,4348,4350,4374,4371,6284,6306,6328,6306,6285,6966,6292,6284,4881,5031,6723,6566,13553,16635,6564,14921,17764200,13334,7372,7152,4868,7373,7113,7323,7132,7095,7116,7089,7090,3975396,213873,224079,4882,4545,5333,8003900,3265493,213861,4608,224152,5100,7526,4577,4880,4374,4375,4392,4350,5098,8403,7116322,3471362,48402,54842,12366,400136,4876,4347,5115,7190,9945,9641,8471,8462,9869,8507,5091,10441,7269,47896,5284048,2574386,47580,16402,32043,6717,41101,41635,22394,30199,30621,1632,2919779,926545,164615,170517,3132167,181187,13230,30899,2965400,16579,6064,17258,7047,6362,6394,6363,6371,6388,60943,16368,10213,8293,7838,17967,7806,7807,7796,7835,8474,7819,7827,6710,113411,524424,13413786,34048,18622,7277,10729,8318,7245,11785,7478,10745,7491,10727,7248,10728,17910,17785,160478,3492047,978367,13190,563238,563742,105722,25238,96202,1160605,1005070,5131252,54816,98793,3305263,3305797,48254,4805,52567,4361,7791,1315224,5607312,3339549,51740,11980,4817,8029,4348,7790,8032,10535,9987,15418,5463996,3136406,51862,104855,644278,9161,7319592,555611,4298,4310,6027,4870,5011,4894,4871,4858,4853,3202,47027,4326732,2988186,51650,742432,13732052,22172,9710,5734,1418023,12706,13389,10480,22792,17705,4814,4308,6753,4297,4321,4341,4313,4994,4341,4337,4366,6550,12186286,7231,9110,11471,6216,7493,4815,7236,10814,10577,10582,7173,7239,10607,10607,115266,45108,4275296,13280,52503,5029,4246,4796,4276,4366,857436,4314,5744,10624,62481,58978,14823,3957079,3973951,58097,14473,5943,5033,4830,7059,10387,4295,4567,4524,4313,4875,7072,4995,63989,14487,3655201,3720671,18438,4403,5077,657646,6318,4906,6345,4842,4854,4866,4848,3187,5108,84196,5228,4246,4246,5087,14367,3174914,2709340],"isXBRL":[0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,1,1,0,0,0,0,0,0,0,1,1,1,0,1,0,0,0,0,1,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,1,1,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,1,1,0,0,0,0,1,1,0,0,0,0,0,0,0,0,1,1,1,0,0,0,0,0,0,0,0,1,1,0,0,1,1,1,0,0,0,0,0,0,0,1,1,1,0,0,0,0,0,0,0,0,0,1,1,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,1,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,1,0,0,0,1,1,0,0,0,0,1,1,1,1,0,0,0,0,1,0,1,1,1,0,0,0,0,0,1,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,1,1,0,0,0,0,0,0,0,1,1,0,0,0,0,0,0,0,0,0,0,0,0,1,0,0,1,0,0,0,0,0,1,0,1,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,1,0,0,0,1,0,0,1,0,0,0,0,0,0,0,0,0,0,1,1,1,0,1,1,0,0,0,0,0,1,1,1,0,0,1,0,0,0,0,0,0,0,0,1,0,1,1,0,0,0,0,0,0,0,0,0,1,0,1,0,1,0,1,0,1,1,0,0,0,1,0,1,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,1,1,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,1,0,1,1,1,0,1,1,1,1,0,1,0,0,0,0,1,1,1,0,0,0,0,0,0,0,1,0,1,0,1,0,0,1,0,1,0,0,0,0,0,0,0,0,0,0,1,0,1,1,1,0,1,1,0,1,0,1,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,1,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,1,0,1,0,0,0,0,0,0,0,1,0,0,1,0,0,1,0,0,0,0,0,0,0,0,0,0,0,0,1,0,0,1,0,0,0,0,0,0,0,0,1,1,1,0,0,1,0,0,0,0,0,0,0,0,0,0,0,0,1,1,1,0,0,0,0,0,0,1,0,0,0,0,0,0,0,0,0,0,0,0,0,1,1,1,1,1,1,0,1,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,1,0,0,0,1,0,0,0,0,0,0,0,0,0,0,0,0,1,0,1,0,0,0,0,0,0,0,1,1,1,0,0,0,0,0,0,0,0,0,0,1,1,1,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,1,0,1,1,1,1,1,1,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,1,0,0,0,0,0,0,0,0,0,0,0,0,1,1,1,0,0,0,1,1,1,0,1,0,0,0,0,0,0,0,0,0,0,1,1,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,1,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,1,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,1,0,0,0,0,0,0,0,0,0,0,0,1,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,1,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,1,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,1,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,1,1,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,1,0],"isInlineXBRL":[0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,1,1,0,0,0,0,0,0,0,1,1,1,0,1,0,0,0,0,1,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,1,1,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,1,1,0,0,0,0,1,1,0,0,0,0,0,0,0,0,1,1,1,0,0,0,0,0,0,0,0,1,1,0,0,1,1,1,0,0,0,0,0,0,0,1,1,1,0,0,0,0,0,0,0,0,0,1,1,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,1,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,1,0,0,0,1,1,0,0,0,0,1,1,1,1,0,0,0,0,1,0,1,1,1,0,0,0,0,0,1,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,1,1,0,0,0,0,0,0,0,1,1,0,0,0,0,0,0,0,0,0,0,0,0,1,0,0,1,0,0,0,0,0,1,0,1,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,1,0,0,0,1,0,0,1,0,0,0,0,0,0,0,0,0,0,1,1,1,0,1,1,0,0,0,0,0,1,1,1,0,0,1,0,0,0,0,0,0,0,0,1,0,1,1,0,0,0,0,0,0,0,0,0,1,0,1,0,1,0,1,0,1,1,0,0,0,1,0,1,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,1,1,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,1,0,1,1,1,0,1,1,1,1,0,1,0,0,0,0,1,1,1,0,0,0,0,0,0,0,1,0,1,0,1,0,0,1,0,1,0,0,0,0,0,0,0,0,0,0,1,0,1,1,1,0,1,1,0,1,0,1,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,1,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,1,0,1,0,0,0,0,0,0,0,1,0,0,1,0,0,1,0,0,0,0,0,0,0,0,0,0,0,0,1,0,0,1,0,0,0,0,0,0,0,0,1,1,1,0,0,1,0,0,0,0,0,0,0,0,0,0,0,0,1,1,1,0,0,0,0,0,0,1,0,0,0,0,0,0,0,0,0,0,0,0,0,1,1,1,1,1,1,0,1,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,1,0,0,0,1,0,0,0,0,0,0,0,0,0,0,0,0,1,0,1,0,0,0,0,0,0,0,1,1,1,0,0,0,0,0,0,0,0,0,0,1,1,1,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,1,0,1,1,1,1,1,1,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,1,0,0,0,0,0,0,0,0,0,0,0,0,1,1,1,0,0,0,1,1,1,0,1,0,0,0,0,0,0,0,0,0,0,1,1,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,1,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0],"isXBRLNumeric":[0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,1,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,0,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,null],"primaryDocument":["xsl144X01/primary_doc.xml","xslF345X06/wk-form4_1780590979.xml","xslF345X06/wk-form4_1780590965.xml","xsl144X01/primary_doc.xml","formsdfy2025.htm","xslF345X06/wk-form4_1779983715.xml","xsl144X01/primary_doc.xml","xsl144X01/primary_doc.xml","xsl144X01/primary_doc.xml","xslF345X06/wk-form4_1779216671.xml","xslF345X06/wk-form3_1779216505.xml","xslF345X06/wk-form4_1779127963.xml","xslF345X06/wk-form4_1779127910.xml","xslF345X06/wk-form4_1779127900.xml","xslF345X06/wk-form4_1779127890.xml","xsl144X01/primary_doc.xml","xslSCHEDULE_13G_X02/primary_doc.xml","xsl144X01/primary_doc.xml","xsl144X01/primary_doc.xml","xsl144X01/primary_doc.xml","xslSCHEDULE_13G_X02/primary_doc.xml","entg-20260509.htm","ef20072733_8k.htm","xslF345X06/wk-form4_1778259322.xml","xslF345X06/wk-form4_1778259315.xml","xslF345X06/wk-form4_1778259307.xml","xslF345X06/wk-form4_1778259292.xml","xslF345X06/wk-form4_1778259283.xml","xslF345X06/wk-form4_1778259270.xml","xsl144X01/primary_doc.xml","entg-20260328.htm","ef20071714_8k.htm","entg-20260430.htm","xslSCHEDULE_13G_X02/primary_doc.xml","tm2613045d1_8k.htm","xslSCHEDULE_13G_X02/primary_doc.xml","xslF345X06/wk-form4_1776700535.xml","xsl144X01/primary_doc.xml","xslF345X06/wk-form4_1776370562.xml","entg-20260415.htm","xsl144X01/primary_doc.xml","xslF345X06/wk-form4_1775681161.xml","xslF345X06/wk-form4_1775681137.xml","xsl144X01/primary_doc.xml","xsl144X01/primary_doc.xml","xslF345X06/wk-form4_1775505528.xml","xslF345X06/wk-form4_1775505491.xml","xslF345X06/wk-form4_1775505464.xml","xslF345X06/wk-form4_1775505438.xml","xslF345X06/wk-form4_1775505401.xml","xslF345X06/wk-form4_1775505381.xml","xslF345X06/wk-form4_1775505347.xml","xslF345X06/wk-form4_1775161415.xml","xslF345X06/wk-form4_1775161405.xml","xslF345X06/wk-form4_1775161397.xml","xslF345X06/wk-form4_1775161386.xml","xslF345X06/wk-form4_1775161372.xml","xslF345X06/wk-form4_1775161360.xml","xslF345X06/wk-form4_1775161344.xml","xslF345X06/wk-form4_1775161331.xml","xslSCHEDULE_13G_X02/primary_doc.xml","a2026proxysupplement.htm","a2026noticeandaccess.htm","ars2025final.pdf","entg-20260323.htm","entg-20260306.htm","xslF345X05/wk-form4_1772738584.xml","xslF345X05/wk-form4_1772128782.xml","xsl144X01/primary_doc.xml","xsl144X01/primary_doc.xml","xsl144X01/primary_doc.xml","xslF345X05/wk-form4_1771888592.xml","xslF345X05/wk-form4_1771888581.xml","xslF345X05/wk-form4_1771888572.xml","xslF345X05/wk-form4_1771888562.xml","xslF345X05/wk-form4_1771888549.xml","xslF345X05/wk-form4_1771888532.xml","xslF345X05/wk-form4_1771888516.xml","xslF345X05/wk-form4_1771888455.xml","xsl144X01/primary_doc.xml","xsl144X01/primary_doc.xml","xsl144X01/primary_doc.xml","xslF345X05/wk-form4_1771354850.xml","xslF345X05/wk-form4_1771354821.xml","xslF345X05/wk-form4_1771354812.xml","xslF345X05/wk-form4_1771354800.xml","xslF345X05/wk-form4_1771354789.xml","xslF345X05/wk-form4_1771354755.xml","xslF345X05/wk-form4_1771354746.xml","xsl144X01/primary_doc.xml","entg-20251231.htm","entg-20260210.htm","xslF345X05/wk-form4_1770236386.xml","xsl144X01/primary_doc.xml","xslF345X05/wk-form4_1769113925.xml","xsl144X01/primary_doc.xml","ef20063411_form8k.htm","entg-20260114.htm","xslF345X05/wk-form4_1765469343.xml","xsl144X01/primary_doc.xml","xslF345X05/wk-form4_1764780795.xml","xsl144X01/primary_doc.xml","xslF345X05/wk-form4_1763495644.xml","xsl144X01/primary_doc.xml","xslF345X05/wk-form4_1762526511.xml","xsl144X01/primary_doc.xml","entg-20250927.htm","entg-20251030.htm","entg-20251015.htm","xsl144X01/primary_doc.xml","xslF345X05/wk-form4_1756313892.xml","xslF345X05/wk-form4_1756313719.xml","xslF345X05/wk-form4_1755807895.xml","xslF345X05/wk-form4_1755723965.xml","xslF345X05/wk-form4_1755712121.xml","xslF345X05/wk-form4_1755195745.xml","xsl144X01/primary_doc.xml","entg-20250628.htm","entg-20250730.htm","xslF345X05/wk-form4_1753123507.xml","xsl144X01/primary_doc.xml","entg-20250716.htm","entg-20250716.htm","ny20051518x1_s3asr.htm","xslF345X05/wk-form4_1749842592.xml","xslSCHEDULE_13G_X01/primary_doc.xml","formsdfy2024.htm","xslF345X05/wk-form4_1748014587.xml","xsl144X01/primary_doc.xml","xslF345X05/wk-form4_1747674280.xml","xslSCHEDULE_13G_X01/primary_doc.xml","ef20048761_8k.htm","entg-20250329.htm","entg-20250507.htm","xslF345X05/wk-form4_1745614706.xml","xslF345X05/wk-form4_1745601276.xml","xslF345X05/wk-form4_1745601226.xml","xslF345X05/wk-form4_1745601172.xml","xslF345X05/wk-form4_1745601122.xml","xslF345X05/wk-form4_1745601061.xml","xslF345X05/wk-form4_1745601005.xml","xslF345X05/wk-form4_1745600958.xml","xslSCHEDULE_13G_X01/primary_doc.xml","entg-20250423.htm","entg-20250416.htm","xslF345X05/wk-form4_1744147360.xml","xslF345X05/wk-form4_1744143168.xml","xslF345X05/wk-form4_1744143135.xml","xslF345X05/wk-form4_1744143099.xml","xslF345X05/wk-form4_1744143070.xml","xslF345X05/wk-form4_1744143033.xml","xslF345X05/wk-form4_1744142995.xml","xslF345X05/wk-form4_1744142965.xml","xslF345X05/wk-form4_1744142928.xml","xslF345X05/wk-form4_1744142897.xml","xslF345X05/wk-form4_1744142853.xml","xslF345X05/wk-form4_1743710136.xml","xslF345X05/wk-form4_1743710099.xml","xslF345X05/wk-form4_1743710069.xml","xslF345X05/wk-form4_1743710028.xml","xslF345X05/wk-form4_1743709989.xml","xslF345X05/wk-form4_1743709952.xml","xslF345X05/wk-form4_1743709911.xml","xslF345X05/wk-form4_1743709874.xml","xslF345X05/wk-form4_1743709824.xml","xslF345X05/wk-form4_1743709764.xml","xslF345X05/wk-form4_1743709727.xml","a2024arsfinal.htm","entg-20250314.htm","xslF345X05/wk-form4_1740444102.xml","xslF345X05/wk-form4_1740444060.xml","xslF345X05/wk-form4_1740444006.xml","xslF345X05/wk-form4_1740443879.xml","xslF345X05/wk-form4_1740443854.xml","xslF345X05/wk-form4_1740443833.xml","xslF345X05/wk-form4_1740443808.xml","xslF345X05/wk-form4_1740443774.xml","xslF345X05/wk-form4_1740443746.xml","xslF345X05/wk-form4_1740443713.xml","xslF345X05/wk-form4_1740188027.xml","xslF345X05/wk-form4_1740187809.xml","xslF345X05/wk-form4_1740187577.xml","xslF345X05/wk-form4_1740187547.xml","xslF345X05/wk-form4_1740187523.xml","xslF345X05/wk-form4_1740187492.xml","xslF345X05/wk-form4_1740187453.xml","xslF345X05/wk-form4_1740187430.xml","xsl144X01/primary_doc.xml","xslSCHEDULE_13G_X01/primary_doc.xml","entg-20241231.htm","xslF345X05/wk-form4_1739384301.xml","xslSCHEDULE_13G_X01/primary_doc.xml","xsl144X01/primary_doc.xml","entg-20250206.htm","entg-20250115.htm","xslF345X05/wk-form4_1733260569.xml","xslF345X05/wk-form4_1732045627.xml","xsl144X01/primary_doc.xml","entg13gasep24.txt","entg-20240928.htm","entg-20241104.htm","entg-20240905.htm","entg-20241016.htm","xslF345X05/wk-form4_1727888989.xml","tv0015-entegrisinc.htm","xslF345X05/wk-form4_1725644195.xml","xslF345X02/wk-form3_1725644022.xml","entg-20240905.htm","xslF345X05/wk-form4_1724184657.xml","entg-20240629.htm","entg-20240731.htm","entg-20240717.htm","xslF345X05/wk-form4_1721051772.xml","xsl144X01/primary_doc.xml","xslF345X05/wk-form4_1720466888.xml","xslF345X05/wk-form4_1720466831.xml","xslF345X05/wk-form4_1720466722.xml","ef20032109_8k.htm","xsl144X01/primary_doc.xml","xsl144X01/primary_doc.xml","us29362u1043_060724.txt","xslF345X05/wk-form4_1717529502.xml","xslF345X05/wk-form4_1717529430.xml","xsl144X01/primary_doc.xml","xslF345X05/wk-form4_1716994549.xml","xslF345X05/wk-form4_1716937438.xml","formsdfy2023.htm","xsl144X01/primary_doc.xml","xslF345X05/wk-form4_1715972687.xml","xslF345X05/wk-form4_1715972625.xml","xslF345X05/wk-form4_1715972550.xml","xsl144X01/primary_doc.xml","ef20028157_s8.htm","entg-20240330.htm","entg-20240501.htm","xslF345X05/wk-form4_1714067341.xml","xslF345X05/wk-form4_1714067292.xml","xslF345X05/wk-form4_1714067251.xml","xslF345X05/wk-form4_1714067206.xml","xslF345X05/wk-form4_1714067163.xml","xslF345X05/wk-form4_1714067112.xml","xslF345X05/wk-form4_1714067057.xml","entg-20240424.htm","entg-20240417.htm","xslF345X05/wk-form4_1712171854.xml","xslF345X05/wk-form4_1712171816.xml","xslF345X05/wk-form4_1712171774.xml","xslF345X05/wk-form4_1712171716.xml","xslF345X05/wk-form4_1712171679.xml","xslF345X05/wk-form4_1712171619.xml","xslF345X05/wk-form4_1712171575.xml","xslF345X05/wk-form4_1712171537.xml","xslF345X05/wk-form4_1712171497.xml","xslF345X05/wk-form4_1712171443.xml","xslF345X05/wk-form4_1712171407.xml","xslF345X05/wk-form4_1712171371.xml","ef20025430_8k.htm","ef20025060_defa14a.htm","a202310ka.pdf","entg-20240318.htm","xslF345X05/wk-form4_1710274645.xml","xslF345X02/wk-form3_1710193859.xml","xslF345X05/wk-form4_1710188274.xml","xslF345X05/wk-form4_1710188239.xml","xsl144X01/primary_doc.xml","entg-20240307.htm","xsl144X01/primary_doc.xml","ef20022925_8k.htm","xslF345X05/wk-form4_1708639384.xml","xslF345X05/wk-form4_1708553084.xml","xslF345X05/wk-form4_1708552807.xml","xslF345X05/wk-form4_1708552838.xml","xslF345X05/wk-form4_1708552756.xml","xslF345X05/wk-form4_1708552722.xml","xslF345X05/wk-form4_1708552690.xml","xslF345X05/wk-form4_1708552614.xml","xslF345X05/wk-form4_1708552567.xml","xslF345X05/wk-form4_1708552479.xml","xslF345X05/wk-form4_1708552420.xml","xslF345X05/wk-form4_1708552377.xml","xsl144X01/primary_doc.xml","xsl144X01/primary_doc.xml","xsl144X01/primary_doc.xml","xsl144X01/primary_doc.xml","xsl144X01/primary_doc.xml","entg-20231231.htm","s013024a.htm","entg13gdec23.txt","tv0854-entegrisinc.htm","entg-20240213.htm","entg_13g.htm","us29362u1043_012424.txt","entg-20240117.htm","xslF345X05/wk-form4_1703696875.xml","xsl144X01/primary_doc.xml","xsl144X01/primary_doc.xml","xslF345X05/wk-form4_1702571031.xml","xsl144X01/primary_doc.xml","xslF345X05/wk-form4_1701196997.xml","xsl144X01/primary_doc.xml","xslF345X05/wk-form4_1700255573.xml","xsl144X01/primary_doc.xml","xsl144X01/primary_doc.xml","entg-20230930.htm","entg-20231102.htm","entg-20231018.htm","xslF345X05/wk-form4_1696362185.xml","ef20011575_8k.htm","ef20010543_8k.htm","xslF345X05/wk-form4_1692879306.xml","xsl144X01/primary_doc.xml","xslF345X05/wk-form4_1692304087.xml","xslF345X05/wk-form4_1692304020.xml","xslF345X05/wk-form4_1692303906.xml","entg-20230701.htm","entg-20230803.htm","entg-20230719.htm","xsl144X01/primary_doc.xml","xsl144X01/primary_doc.xml","brhc20053958_8k.htm","formsdfy2022.htm","xslF345X04/wk-form4_1684353838.xml","xslF345X04/wk-form4_1684353725.xml","xslF345X04/wk-form4_1684353681.xml","xslF345X04/wk-form4_1684181352.xml","xslF345X02/wk-form3_1684181099.xml","xsl144X01/primary_doc.xml","filename1.pdf","entg-20230401.htm","xsl144X01/primary_doc.xml","entg-20230511.htm","brhc20052674_8k.htm","filename1.htm","xslF345X04/wf-form4_168271268028339.xml","xslF345X04/wf-form4_168271261673050.xml","xslF345X04/wf-form4_168271256651508.xml","xslF345X04/wf-form4_168271251580374.xml","xslF345X04/wf-form4_168271241349802.xml","xslF345X04/wf-form4_168271231596774.xml","xslF345X04/wf-form4_168271215900242.xml","xslF345X04/wf-form4_168271208251661.xml","entg-20230426.htm","filename1.pdf","entg-20230419.htm","filename1.htm","brhc20051289_8k.htm","filename1.pdf","entg-20230317.htm","a202210k.pdf","brhc10049582_8k.htm","brhc10049044_8k.htm","xslF345X03/wf-form4_167770462498467.xml","xslF345X02/wf-form3_167770452230899.xml","xslF345X03/wf-form4_167761867476915.xml","entg-20230227.htm","xslF345X03/wf-form4_167718629059087.xml","entg-20221231.htm","xslF345X03/wf-form4_167701381484496.xml","xslF345X03/wf-form4_167701373988686.xml","xslF345X03/wf-form4_167701369521013.xml","xslF345X03/wf-form4_167701366051892.xml","xslF345X03/wf-form4_167701361950248.xml","xslF345X03/wf-form4_167701358487547.xml","xslF345X03/wf-form4_167701353901514.xml","xslF345X03/wf-form4_167701350216603.xml","xslF345X03/wf-form4_167701346506368.xml","xslF345X03/wf-form4_167701342582794.xml","xslF345X03/wf-form4_167701338812434.xml","xslF345X03/wf-form4_167701334595158.xml","xslF345X03/wf-form4_167701329970403.xml","xslF345X03/wf-form4_167649549052710.xml","xslF345X03/wf-form4_167649545949246.xml","xslF345X03/wf-form4_167649541572709.xml","xslF345X03/wf-form4_167649535922013.xml","xslF345X03/wf-form4_167649531236812.xml","xslF345X03/wf-form4_167649526798379.xml","xslF345X03/wf-form4_167649522394652.xml","xslF345X03/wf-form4_167649517896391.xml","xslF345X03/wf-form4_167649513655282.xml","xslF345X03/wf-form4_167649509702976.xml","e020823a.htm","entg13gdec22.txt","entg-20230214.htm","brhc10048138_8k.htm","tv0830-entegrisinc.htm","xslF345X03/wf-form4_167537331830814.xml","xslF345X03/wf-form4_167537295983597.xml","xslF345X03/wf-form4_167537288274953.xml","xslF345X03/wf-form4_167537283164752.xml","xslF345X03/wf-form4_167537275763688.xml","xslF345X03/wf-form4_167537271689019.xml","xslF345X03/wf-form4_167537266224144.xml","xslF345X03/wf-form4_167537260070488.xml","xslF345X03/wf-form4_167537248446801.xml","xslF345X03/wf-form4_167537235014220.xml","xslF345X03/wf-form4_167537229955031.xml","xslF345X03/wf-form4_167537224878599.xml","xslF345X03/wf-form4_167537216620028.xml","xslF345X03/wf-form4_167537211986903.xml","xslF345X03/wf-form4_167537206657747.xml","us29362u1043_012623.txt","entg-20230123.htm","us29362u1043_012023.txt","entg-20230119.htm","entg-20230118.htm","entg-20221208.htm","xslF345X03/wf-form4_166871860377217.xml","entg-20221001.htm","entg-20221102.htm","entg-20221019.htm","brhc10042805_8k.htm","xslF345X03/wf-form4_166491433511961.xml","brhc10041818_8ka.htm","xslF345X03/wf-form4_166249559466655.xml","xslF345X03/wf-form4_166076690799553.xml","xslF345X03/wf-form4_166076680089884.xml","entg13gajul22.txt","entg-20220702.htm","entg-20220802.htm","entg-20220720.htm","xslF345X02/wf-form3_165780172212596.xml","xslF345X02/wf-form3_165780147036775.xml","xslF345X03/doc4.xml","xslF345X02/doc3.xml","xslF345X03/wf-form4_165731297585346.xml","ny20004700x1_s3asr.htm","ny20004700x2_s8.htm","ny20004647x3_8k.htm","ny20004647x2_425.htm","ny20004647x1_8k.htm","brhc10039042_425.htm","brhc10039042_8k.htm","brhc10039089_425.htm","ny20003790x5_425.htm","ny20003790x3_8k.htm","ny20003790x4_425.htm","ny20003790x2_8k.htm","xslF345X03/wf-form4_165454584929229.xml","formsdfy2021.htm","xslF345X03/wf-form4_165281938261177.xml","xslF345X03/wf-form4_165126332100129.xml","xslF345X03/wf-form4_165126326123396.xml","xslF345X03/wf-form4_165126316949392.xml","xslF345X03/wf-form4_165126295071696.xml","xslF345X03/wf-form4_165126277570587.xml","xslF345X03/wf-form4_165126269321515.xml","xslF345X03/wf-form4_165126262183221.xml","entg-20220427.htm","ny20003000x6_425.htm","entg-20220402.htm","entg-20220426.htm","entg-20220420.htm","ny20003659x4_425.htm","ny20003659x3_8k.htm","entg-20220406.htm","ny20003000x5_425.htm","ny20003000x4_8k.htm","ny20003000x3_425.htm","ny20003000x2_8k.htm","xslF345X03/wf-form4_164884343409825.xml","xslF345X03/wf-form4_164884336382216.xml","xslF345X03/wf-form4_164875760125441.xml","xslF345X03/wf-form4_164875726598216.xml","a2022proxystatement.htm","xslF345X03/wf-form4_164746091039767.xml","xslF345X03/wf-form4_164677332603931.xml","xslF345X03/wf-form4a_164616896810655.xml","xslF345X03/wf-form4_164574989170815.xml","xslF345X03/wf-form4_164574981319801.xml","xslF345X03/wf-form4_164573669600324.xml","xslF345X03/wf-form4_164573661407464.xml","xslF345X03/wf-form4_164573653081892.xml","xslF345X03/wf-form4_164573644911065.xml","xslF345X03/wf-form4_164565132311835.xml","xslF345X03/wf-form4_164565124479903.xml","xslF345X03/wf-form4_164565109604386.xml","xslF345X03/wf-form4_164565098821765.xml","xslF345X03/wf-form4_164565071748218.xml","xslF345X03/wf-form4_164565064188526.xml","xslF345X03/wf-form4_164565055221501.xml","xslF345X03/wf-form4_164565048540815.xml","xslF345X03/wf-form4_164565036297893.xml","xslF345X03/wf-form4_164565029821587.xml","xslF345X03/wf-form4_164565020546088.xml","xslF345X03/wf-form4_164565011267245.xml","xslF345X03/wf-form4_164495924519840.xml","xslF345X03/wf-form4_164495920928273.xml","xslF345X03/wf-form4_164495917628179.xml","xslF345X03/wf-form4_164495913549730.xml","xslF345X03/wf-form4_164495909479629.xml","xslF345X03/wf-form4_164495904692173.xml","xslF345X03/wf-form4_164495900869060.xml","xslF345X03/wf-form4_164495896042059.xml","xslF345X03/wf-form4_164495887772253.xml","entg13gadec21.txt","s503613960a.htm","tv0820-entegrisinc.htm","entg-20211231.htm","xslF345X03/wf-form4_164392359093194.xml","xslF345X03/wf-form4_164392353799932.xml","xslF345X03/wf-form4_164392347003876.xml","xslF345X03/wf-form4_164392341385579.xml","xslF345X03/wf-form4_164392335500066.xml","xslF345X03/wf-form4_164392328278185.xml","xslF345X03/wf-form4_164392319761987.xml","xslF345X03/wf-form4_164392310951639.xml","xslF345X03/wf-form4_164392302061706.xml","xslF345X03/wf-form4_164392296003858.xml","xslF345X03/wf-form4_164392288618608.xml","xslF345X03/wf-form4_164392274956861.xml","xslF345X03/wf-form4_164392263588208.xml","brhc10033391_425.htm","brhc10033396_425.htm","entg-20220201.htm","ny20001665x24_425.htm","ny20001665x23_8k.htm","xslEFFECTX01/primary_doc.xml","ny20001665x22_424b3.htm","us29362u1043_012822.txt","filename1.htm","ny20001665x20_s4a.htm","filename1.pdf","xslF345X03/wf-form4_164272006009212.xml","entg-20220119.htm","filename1.htm","ny20001665x17_s4.htm","entg-20211218.htm","xslF345X03/wf-form4_163977486909155.xml","ny20001665x16_425.htm","ny20001665x15_8k.htm","ny20001665x14_425.htm","ny20001665x13_425.htm","ny20001665x12_425.htm","ny20001665x11_425.htm","ny20001665x9_425.htm","ny20001665x8_425.htm","ny20001665x7_425.htm","ny20001665x6_425.htm","ny20001665x5_425.htm","ny20001665x4_425.htm","ny20001665x3_425.htm","ny20001665x2_425.htm","ny20001665x1_8k.htm","xslF345X03/wf-form4_163856534544968.xml","xslF345X03/wf-form4_163839318193370.xml","entg-20211130.htm","xslF345X03/wf-form4_163719023879473.xml","xslF345X03/wf-form4_163675118075756.xml","xslF345X03/wf-form4_163675109338129.xml","xslF345X03/wf-form4a_163594477405657.xml","xslF345X03/wf-form4_163588534816801.xml","xslF345X02/wf-form3_163588526046434.xml","xslF345X03/wf-form4_163588455208904.xml","xslF345X03/wf-form4_163579700197520.xml","entg-20211027.htm","entg-20211002.htm","entg-20211026.htm","xslF345X03/wf-form4_163476021821809.xml","xslF345X03/wf-form4_163467377547934.xml","entg-20211013.htm","xslF345X03/wf-form4_163216828360270.xml","xslF345X03/wf-form4_163190912703411.xml","xslF345X03/wf-form4_163190905457155.xml","xslF345X03/wf-form4_163165001717738.xml","xslF345X03/wf-form4_163052655540426.xml","xslF345X03/wf-form4a_163009652865273.xml","xslF345X03/wf-form4_162983546149439.xml","xslF345X03/wf-form4_162888493321408.xml","xslF345X03/wf-form4_162871234333190.xml","xslF345X03/wf-form4_162828049357497.xml","xslF345X03/wf-form4_162828040676683.xml","xslF345X03/wf-form4_162819381411649.xml","entg-20210703.htm","entg-20210727.htm","entg-20210714.htm","xslF345X03/wf-form4_162508330340627.xml","xslF345X03/wf-form4_162396035900489.xml","xslF345X03/wf-form4_162387383871086.xml","xslF345X03/wf-form4_162275081003115.xml","formsdfy2020.htm","xslF345X03/wf-form4_162162759353227.xml","entg-20210520.htm","xslF345X03/wf-form4_162136806348564.xml","xslF345X03/wf-form4_162076350002421.xml","us29362u1043_050621.txt","xslF345X03/wf-form4_162024513402936.xml","xslF345X03/wf-form4_162007276626333.xml","xslF345X03/wf-form4_162007272229705.xml","xslF345X03/wf-form4_162007268325750.xml","xslF345X03/wf-form4_162007263257154.xml","xslF345X03/wf-form4_162007258514445.xml","xslF345X03/wf-form4_162007254846145.xml","xslF345X03/wf-form4_162007250369150.xml","xslF345X03/wf-form4_162007246676638.xml","xslF345X03/wf-form4_162007240944854.xml","d165421d8k.htm","entg-20210429.htm","entg-20210217.htm","entg-20210403.htm","entg-20210427.htm","entg-20210416.htm","xslF345X03/wf-form4_161844127417706.xml","entg-20210414.htm","xslF345X03/wf-form4_161834445603056.xml","xslF345X03/wf-form4_161834439545692.xml","xslF345X03/wf-form4_161834432626182.xml","xslF345X03/wf-form4_161799858817736.xml","xslF345X03/wf-form4_161782610541012.xml","xslF345X03/wf-form4_161782603926192.xml","xslF345X03/wf-form4_161601156703628.xml","a2021proxystatement.htm","xslF345X03/wf-form4_161497905069975.xml","xslF345X03/wf-form4_161428701749678.xml","xslF345X03/wf-form4_161420113561590.xml","xslF345X03/wf-form4_161411507181191.xml","xslF345X03/wf-form4_161411496212349.xml","xslF345X03/wf-form4_161411492517247.xml","xslF345X03/wf-form4_161411458603123.xml","xslF345X03/wf-form4_161411454131037.xml","xslF345X03/wf-form4_161411450693923.xml","xslF345X03/wf-form4_161411446989538.xml","xslF345X03/wf-form4_161411435114137.xml","xslF345X03/wf-form4_161411431128263.xml","xslF345X03/wf-form4_161411425609033.xml","xslF345X03/wf-form4_161411416043719.xml","xslF345X03/wf-form4_161411412782810.xml","xslF345X03/wf-form4_161376936217155.xml","xslF345X03/wf-form4_161376933017569.xml","xslF345X03/wf-form4_161376904737625.xml","xslF345X02/wf-form3_161376900961047.xml","xslF345X02/wf-form3_161376897153685.xml","entg-20210217.htm","xslF345X03/wf-form4_161351000000328.xml","entg13gadec20.txt","tv0784-entegrisinc.htm","entg-20201231.htm","xslF345X03/wf-form4_161247411221609.xml","xslF345X03/wf-form4_161247338265537.xml","xslF345X03/wf-form4_161247334559287.xml","xslF345X03/wf-form4_161247328888298.xml","xslF345X03/wf-form4_161247319758504.xml","xslF345X03/wf-form4_161247315467337.xml","xslF345X03/wf-form4_161247310815234.xml","xslF345X03/wf-form4_161247304657414.xml","xslF345X03/wf-form4_161247297584620.xml","xslF345X03/wf-form4_161247290364517.xml","xslF345X03/wf-form4_161247286152222.xml","xslF345X03/wf-form4_161247282452314.xml","entg-20210202.htm","us29362u1043_012921.txt","entg-20210113.htm","xslF345X03/wf-form4a_160858709486538.xml","xslF345X03/wf-form4_160823991063044.xml","xslF345X03/wf-form4_160763522870790.xml","xslF345X03/wf-form4_160590635102751.xml","xslF345X03/wf-form4_160564720356854.xml","xslF345X03/wf-form4_160461008465799.xml","xslF345X03/wf-form4_160435166648806.xml","entg-20200926.htm","entg-20201022.htm","entg-20201014.htm","xslF345X03/wf-form4_160037480092859.xml","xslF345X03/form4.xml","xslF345X03/wf-form4_159804092347856.xml","xslF345X03/wf-form4_159778194679995.xml","xslF345X03/wf-form4_159778185147140.xml","xslF345X03/wf-form4_159778176701631.xml","xslF345X03/wf-form4_159743530683427.xml","xslF345X03/wf-form4_159648512311345.xml","xslF345X03/wf-form4_159623055823242.xml","xslF345X03/wf-form4_159596768208586.xml","entg-20200627.htm","entg-20200723.htm","entg-20200715.htm","xslF345X03/wf-form4_159242407273207.xml","xslF345X03/wf-form4_159173337097041.xml","xslF345X03/wf-form4_159130329335973.xml","xslF345X03/wf-form4_159130309708485.xml","formsdfy2019.htm","xslF345X03/wf-form4_159017779047788.xml","xslF345X03/wf-form4_159008247464772.xml","xslF345X03/wf-form4_158957364327130.xml","xslF345X02/wf-form3_158896821542936.xml","xslF345X03/wf-form4_158836533105370.xml","xslF345X03/wf-form4_158836528824740.xml","xslF345X03/wf-form4_158836524349764.xml","xslF345X03/wf-form4_158836508658035.xml","xslF345X03/wf-form4_158836504274679.xml","xslF345X03/wf-form4_158836499237724.xml","xslF345X03/wf-form4_158836493131363.xml","xslF345X03/wf-form4_158836484837689.xml","d33434d8k.htm","entegrisforms-8.htm","entg-20200429.htm","d893569d8k.htm","d870107d8k.htm","entg-20200328.htm","entg-20200421.htm","entg-20200415.htm","d860226ddef14a.htm","xslF345X03/wf-form5_158438923816020.xml","xslF345X03/wf-form4_158378410719134.xml","xslF345X03/wf-form4_158344689206356.xml","xslF345X03/wf-form4_158283796038752.xml","xslF345X03/wf-form4_158275120221956.xml","xslF345X03/wf-form4_158275108267288.xml","xslF345X03/wf-form4_158231928161079.xml","xslF345X03/wf-form4_158231923328144.xml","xslF345X03/wf-form4_158231919773427.xml","xslF345X03/wf-form4_158231915667451.xml","xslF345X03/wf-form4_158231911460781.xml","xslF345X03/wf-form4_158231908294370.xml","xslF345X03/wf-form4_158231904816439.xml","xslF345X03/wf-form4_158231901315613.xml","xslF345X03/wf-form4_158231897859704.xml","xslF345X03/wf-form4_158231894184115.xml","xslF345X03/wf-form4_158231890937318.xml","xslF345X03/wf-form4_158223683727296.xml","xslF345X03/wf-form4_158223671262536.xml","xslF345X03/wf-form4_158223650899802.xml","xslF345X03/wf-form4_158223643252375.xml","xslF345X03/wf-form4_158223634568075.xml","xslF345X03/wf-form4_158223600269385.xml","xslF345X03/wf-form4_158223591227659.xml","xslF345X03/wf-form4_158223478616403.xml","xslF345X03/wf-form4_158223342987396.xml","xslF345X03/wf-form4_158171428215963.xml","entg13gadec19.txt","xslF345X03/wf-form4_158154135224196.xml","tv01255-entegrisinc.htm","xslF345X03/wf-form4_158136875924199.xml","xslF345X03/wf-form4_158136872123229.xml","xslF345X03/wf-form4_158136865483825.xml","entg-12312019x10k.htm","us29362u1043_020620.txt","xslF345X03/wf-form4_158102420732228.xml","xslF345X03/wf-form4_158102413135891.xml","xslF345X03/wf-form4_158102406752982.xml","xslF345X03/wf-form4_158102400972484.xml","xslF345X03/wf-form4_158102395481155.xml","xslF345X03/wf-form4_158102387332170.xml","xslF345X03/wf-form4_158102381659453.xml","xslF345X03/wf-form4_158102375533968.xml","xslF345X03/wf-form4_158102367783360.xml","xslF345X03/wf-form4_158102361383154.xml","xslF345X03/wf-form4_158102348339333.xml","entg2019q4.htm","entgform8-kq12020divid.htm","entgform8-kprojectsimba.htm","xslF345X03/wf-form4_157437014140495.xml","xslF345X03/wf-form4_157419794362396.xml","xslF345X03/wf-form4_157325275969943.xml","entg-2019928x10q.htm","entg2019q3.htm","entgform8-kq4dividend.htm","xslF345X03/wf-form4a_156987389847094.xml","entgform8-k.htm","xslF345X03/wf-form4_156805936407456.xml","xslF345X02/wf-form3_156771394345247.xml","xslF345X03/wf-form4_156762767841343.xml","xslF345X03/wf-form4_156660787856668.xml","xslF345X03/wf-form4_156624548106906.xml","xslF345X03/wf-form4_156624535799245.xml","xslF345X03/wf-form4_156624522621814.xml","xslF345X03/wf-form4_156624509349458.xml","xslF345X03/wf-form4_156477609387208.xml","xslF345X03/wf-form4_156460410620559.xml","entg-2019629x10q.htm","entg2019q2.htm","entgform8-kq32019dividend.htm","entgform8-kprojecthelios.htm","us29362u1043_071019.txt","formsdfy2018.htm","xslF345X03/wf-form4_155871957420338.xml","xslF345X03/wf-form4_155812379541391.xml","xslF345X03/wf-form4_155803691501860.xml","xslF345X03/wf-form4_155734633077081.xml","xslF345X03/wf-form4_155691471795842.xml","xslF345X03/wf-form4_155691460342121.xml","xslF345X03/wf-form4_155691442395224.xml","xslF345X03/wf-form4_155691429167310.xml","xslF345X03/wf-form4_155691411803748.xml","xslF345X03/wf-form4_155691390349252.xml","xslF345X03/wf-form4_155691371388321.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","form8-kxresultsofsharehold.htm","entg-2019330x10q.htm","entg2019q1.htm","entgform8-kq22019dividend.htm","d735608drw.htm","d703509d8k.htm","entg13gamar19.txt","d733426d8k.htm","d733426d8k.htm","d722444d425.htm","d721559d8k.htm","d721559d8k.htm","xslEFFECTX01/primary_doc.xml","d689947d424b3.htm","d674736ddef14a.htm","filename1.htm","filename1.htm","d689947ds4a.htm","filename1.pdf","d721189d425.htm","d721582d425.htm","d689947ds4.htm","d715040d425.htm","xslF345X03/edgar.xml","d690691d425.htm","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","d698660d425.htm","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","entg13gdec18.txt","gmt_entg.htm","d644807d8k.htm","entg-12312018x10k.htm","entegrisinc.htm","d698948d425.htm","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","d624876d425.htm","d639000d425.htm","d691975d425.htm","entg2018q4.htm","d624755d425.htm","us29362u1043_020419.txt","d700523d8k.htm","d700523d8k.htm","d689784d425.htm","d635102d425.htm","d635099d425.htm","d635105d425.htm","d700441d425.htm","d697741d425.htm","d658321d425.htm","d679500d8k.htm","d667754d8k.htm","d667754d8k.htm","entgform8-kq12019dividend.htm","xslF345X03/edgar.xml","entgform8-ksharerepurchase.htm","xslF345X03/edgar.xml","xslF345X03/edgar.xml","d523873d8k.htm","entg-2018929x10q.htm","entg2018q3.htm","entgform8-kq42018dividend.htm","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","entg-2018630x10q.htm","entg2018q2.htm","entgform8-kq32018dividend.htm","entg8-ktransactionclosing.htm","entg8-kpurchaseagreementan.htm","xslF345X03/edgar.xml","entg8-ktransactionannounce.htm","formsdfy2017.htm","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","form8-kxresultsofsharehold.htm","entg-2018331x10q.htm","entg2018q1.htm","entgform8-kq22018dividend.htm","d501424ddef14a.htm","form8-kanalystday2018.htm","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","entgform8-kablamendment.htm","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","entg-12312017x10k.htm","xslF345X03/edgar.xml","xslF345X02/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","eps7787_entg.htm","entegrisinc.htm","entg2017q4.htm","us29362u1043_012418.txt","entgform8-kq12018dividend.htm","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","form8-k2017bondclosing.htm","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","form8-k2017bondofferingpri.htm","form8-k2017bondofferinglau.htm","xslF345X03/edgar.xml","entg-2017930x10q.htm","entg2017q3.htm","entgform8-kinitialquarterl.htm","t308181.txt","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X02/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X02/edgar.xml","xslF345X03/edgar.xml","entgform8-kitem502newdirec.htm","xslF345X03/edgar.xml","entg-201771x10q.htm","entg2017q2.htm","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","formsdfy2016.htm","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","form8-kxresultsofsharehold.htm","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","xslF345X03/edgar.xml","entg-201741x10q.htm","entg2017q1.htm"],"primaryDocDescription":["","FORM 4","FORM 4","","SD","FORM 4","","","","FORM 4","FORM 3","FORM 4","FORM 4","FORM 4","FORM 4","","","","","","","8-K","8-K","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","","10-Q","8-K","8-K","","FORM 8-K","","FORM 4","","FORM 4","8-K","","FORM 4","FORM 4","","","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","","DEFA14A","DEFA14A","ARS","DEF 14A","PRE 14A","FORM 4","FORM 4","","","","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","","","","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","","10-K","8-K","FORM 4","","FORM 4","","8-K","8-K","FORM 4","","FORM 4","","FORM 4","","FORM 4","","10-Q","8-K","8-K","","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","","10-Q","8-K","FORM 4","","8-K/A","8-K","S-3ASR","FORM 4","","SD","FORM 4","","FORM 4","","8-K","10-Q","8-K","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","","8-K","8-K","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","ARS","DEF 14A","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","","","10-K","FORM 4","","","8-K","8-K","FORM 4","FORM 4","","","10-Q","8-K","8-K/A","8-K","FORM 4","SCHEDULE 13G/A","FORM 4","FORM 3","8-K","FORM 4","10-Q","8-K","8-K","FORM 4","","FORM 4","FORM 4","FORM 4","8-K","","","","FORM 4","FORM 4","","FORM 4","FORM 4","SD","","FORM 4","FORM 4","FORM 4","","S-8","10-Q","8-K","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","8-K","8-K","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","8-K","DEFA14A","2023 10-K ARS","DEF 14A","FORM 4","FORM 3","FORM 4","FORM 4","","8-K","","8-K","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","","","","","","10-K","SCHEDULE 13G (AMENDMENT NO. 2)","","SCHEDULE 13G/A","8-K","","","8-K","FORM 4","","","FORM 4","","FORM 4","","FORM 4","","","10-Q","8-K","8-K","FORM 4","8-K","8-K","FORM 4","","FORM 4","FORM 4","FORM 4","10-Q","8-K","8-K","","","8-K","SD","FORM 4","FORM 4","FORM 4","FORM 4","FORM 3","","","10-Q","","8-K","8-K","","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","8-K","","8-K","","8-K","","DEF 14A","2022 10K ARS","8-K","8-K","FORM 4","FORM 3","FORM 4","8-K","FORM 4","10-K","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","SCHEDULE 13G/A (AMENDMENT NO. 1)","","8-K","8-K","SCHEDULE 13G/A","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","","8-K","","8-K","8-K","8-K","FORM 4","10-Q","8-K","8-K","8-K","FORM 4","8-K/A","FORM 4","FORM 4","FORM 4","","10-Q","8-K","8-K","FORM 3","FORM 3","FORM 4 SUBMISSION","FORM 3 SUBMISSION","FORM 4","S-3ASR","FORM S-8","FORM 8-K","425","8-K","425","8-K","425","425","8-K","425","FORM 8-K","FORM 4","SD","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","8-K","425","10-Q","8-K","8-K","425","FORM 8-K","8-K","425","FORM 8-K","425","FORM 8-K","FORM 4","FORM 4","FORM 4","FORM 4","DEF 14A","FORM 4","FORM 4","FORM 4/A","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","","SCHEDULE 13G","SCHEDULE 13G/A","10-K","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","425","425","8-K","425","8-K","","424B3","","","S-4/A","","FORM 4","8-K","","S-4","8-K","FORM 4","425","8-K","FORM 425","425","FORM 425","425","425","425","425","FORM 425","425","425","425","425","FORM 8-K","FORM 4","FORM 4","8-K","FORM 4","FORM 4","FORM 4","FORM 4/A","FORM 4","FORM 3","FORM 4","FORM 4","8-K","10-Q","8-K","FORM 4","FORM 4","8-K","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4/A","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","10-Q","8-K","8-K","FORM 4","FORM 4","FORM 4","FORM 4","SD","FORM 4","8-K","FORM 4","FORM 4","","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","8-K","8-K","8-K/A","10-Q","8-K","8-K","FORM 4","8-K","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","DEF 14A","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 3","FORM 3","8-K","FORM 4","","SCHEDULE 13G/A","10-K","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","8-K","","8-K","FORM 4/A","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","10-Q","8-K","8-K","FORM 4","PRIMARY DOCUMENT","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","10-Q","8-K","8-K","FORM 4","FORM 4","FORM 4","FORM 4","SD","FORM 4","FORM 4","FORM 4","FORM 3","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","8-K","S-8","8-K","8-K","8-K","10-Q","8-K","8-K","DEF 14A","FORM 5","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","","FORM 4","SCHEDULE 13G/A","FORM 4","FORM 4","FORM 4","10-K","","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","8-K","8-K","8-K","FORM 4","FORM 4","FORM 4","10-Q","8-K","8-K","FORM 4/A","8-K","FORM 4","FORM 3","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","10-Q","8-K","8-K","8-K","","SD","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","FORM 4","PRIMARY DOCUMENT","PRIMARY DOCUMENT","8-K","10-Q","8-K","8-K","RW","FORM 8-K","","8-K","8-K","425","8-K","8-K","","424B3","DEF 14A","","","AMENDMENT NO.1 TO FORM S-4","","425","425","FORM S-4","425","PRIMARY DOCUMENT","425","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","425","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","","ENTEGRIS, INC. - SC 13G/A","8-K","10-K","","425","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","425","425","425","8-K","425","","8-K","8-K","425","425","425","425","425","425","425","8-K","8-K","8-K","8-K","PRIMARY DOCUMENT","8-K","PRIMARY DOCUMENT","PRIMARY DOCUMENT","8-K","10-Q","8-K","8-K","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","10-Q","8-K","8-K","8-K","8-K","PRIMARY DOCUMENT","8-K","SD","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","8-K","10-Q","8-K","8-K","DEF 14A","8-K","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","8-K","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","10-K","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","ENTG - 13G/A - 2017","","8-K","","8-K","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","8-K","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","8-K","8-K","PRIMARY DOCUMENT","10-Q","8-K","8-K","","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","8-K","PRIMARY DOCUMENT","10-Q","8-K","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","SD","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","8-K","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","PRIMARY DOCUMENT","10-Q","8-K"]},"files":[{"name":"CIK0001101302-submissions-001.json","filingCount":1534,"filingFrom":"1999-12-23","filingTo":"2017-04-25"}]}}